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SEMI S18-1102 © SEMI 2002 2 SEMI S2 — Environm ental, Health, and Safety Guideline for Sem iconductor Man u facturing Eq uipment SEMI S4 — Safety Gui deline for the Segregation/Se paration of Gas Cyli nders Containe d in…

SEMI S18-1102 © SEMI 2002

SEMI S18-1102

ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SILANE

FAMILY GASES HANDLING

This guideline was technically approved by the Global Environmental, Health, and Safety Committee and is

the direct responsibility of the Japan Environmental, Health, and Safety Committee. Current edition approved

by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org

September 2002; to be published November 2002.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supersede the official guideline. The task

force has supplied them to clarify and to enhance usage

of the guideline by equipment designers.

1 Purpose

1.1 This guideline is intended as a minimum set of

safety and health criteria for silane family gases

handling related to equipment and facilities used in

semiconductor or Flat Panel Display (FPD)

manufacturing.

2 Scope

2.1 Silane family gases which are described in this

guideline are: monosilane (SiH

), disilane (Si

trisilane (Si

), dichlorosilane (SiH

) and

trichlorosilane (SiHCl

2.2 This guideline includes the following sections:

• Purpose

• Scope

• Limitations

• Referenced Standards

• Terminology

• General Principles

• Education and Training

• Leak Detection and Alarm Systems

• Fire Detection, Suppression and Alarm Systems

• Emergency Response

• Materials, Components, and Construction for

Silane Family Gas Handling Equipment and

Facilities.

• Pressurization and Leak Testing

• Storage

• Supply Systems

• Distribution Systems for Gas Supply

• Equipment Using Silane Family Gases

• Exhaust Systems and Plumbing

• Exhaust Treatment Systems

• Related Documents

2.3 This safety guideline does not purport to address all

of the safety issues associated with its use. It is the

responsibility of the users of this guideline to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document is not intended to impart

requirements on any party.

3.2 This document is not intended to apply to gas

manufacturers or distribution companies.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

4.1 SEMI Standards

SEMI F1 — Specification for Leak Integrity of High

Purity Gas Piping Systems and Components

SEMI F3 — Guide for Welding Stainless Steel Tubing

for Semiconductor Manufacturing Applications

SEMI F4 — Specification for Pneumatically Actuated

Cylinder Valves

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F6 — Guide for Secondary Containment of

Hazardous Gas Piping Systems

SEMI F13 — Guide for Gas Source Control Equipment

SEMI F14 — Guide for the Design of Gas Source

Equipment Enclosures

SEMI F15 — Test Method for Enclosures Using Sulfur

Hexafluoride Tracer Gas and Gas Chromatography

SEMI S1 — Safety Guideline for Equipment Safety

Labels

SEMI S18-1102 © SEMI 2002

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S4 — Safety Guideline for the

Segregation/Separation of Gas Cylinders Contained in

Cabinets

SEMI S5 — Safety Guideline for Flow Limiting

Devices

SEMI S6 — Safety Guideline for Ventilation

SEMI S10  Safety Guideline for Risk Assessment

SEMI S13  Safety Guideline for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI S14  Safety Guidelines for Fire Risk

Assessment and Mitigation for Semiconductor

Manufacturing Equipment

4.2 NFPA

Standards

NFPA 13  Installation of Sprinkler Systems

NFPA 70  National Electrical Code

NFPA 318  Standard for the Protection of

Cleanrooms

4.3 Compressed Gas Association

CGA P-20  Standard for the Classification of Toxic

Gas Mixtures

CGA P-23  Standard for Categorizing Gas Mixtures

Containing Flammable and Nonflammable Components

4.4 Other Documents

High Pressure Gas Safety Law

The High Pressure Gas Safety Institute of Japan

(KHK), Application Guide for the High Pressure Gas

Safety Law

Santa Clara County Toxic Gas Ordinance No. NS-

517.44

SSA Journal

,  Volume 11 No. 4, Winter 1997

1 National Fire Protection Association, 1 Batterymarch Park, PO Box

9101, Quincy, MA 02269-9101

2 Compressed Gas Association, 1725 Jefferson Davis Highway, Suite

1004, Arlington, Virginia 22202-4102

3 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,

Tokyo 105-8447

4 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,

Tokyo 105-8447

5 Santa Clara County TGO

6 SSA Journal, SSA Journal Headquarters 1313 Dolly Madison Blvd.

Suite402, McLean, VA22101

4.5 US Code of Federal Regulations

Uniform Fire Code (UFC)

Sections 51, 79 and 80 

Semiconductor Facility-Specific Sections

29CFR 1910.1200

,  “Hazard Communication”

(OSHA)

NIOSH Pocket Guide  available online at

http://www.cdc.gov/niosh/topreq.html

4.6 EU Directive

The Safety Sheets Directive 93/112 EEC

5 Terminology

5.1 Terminology defined in SEMI S2 should be

referred to except if otherwise specified below.

5.2 Abbreviations and Acronyms

5.2.1 ACGIH

— American Conference of

Governmental Industrial Hygienists. (ACGIH is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.2.2 ESOV  Emergency Shut Off Valve.

5.2.3 IDLH  Immediately Dangerous to Life and

Health, concentration of airborne contaminants,

normally expressed in parts per million or milligrams

per cubic meter, which represents the maximum level

from which one could escape within thirty minutes

without any escape-impairing symptoms or irreversible

health effects. This level is established by the National

Institute of Occupational Safety and Health (NIOSH).

[SEMI F6]

5.2.4 MSDS  Material Safety Data Sheet, a

document that provides information on the properties of

a chemical material in a format specified by a

regulation such as OSHA 29 CFR 1910.1200, “Hazard

Communication”.

5.2.5 PTFE  Poly Tetra Fluoro Ethylene.

5.2.6 SSCS  silane safety control system. SSCSs are

integrated systems of detection devices that, when

monitored as a group, provide for an overall status of

the safety of the hazardous gas handling system (e.g.,

pressure transducers linked to valve status monitors and

valve cycle counting programs or excess-flow

monitoring interlocked to shutdown the source).

5.2.7 TLVs

 Threshold Limit Values for chemical

substances in the work environment adopted by

ACGIH

(TLV

is a registered trademark of the

7 Uniform Fire Code, 5360 South Workman Mill Road, Whitter, CA

90601

8 Occupational Safety and Health Administration U.S. Department

of Labor, http://www.osha.gov

SEMI S18-1102 © SEMI 2002

American Conference of Governmental Industrial

Hygienists.) [SEMI F6].

5.2.8 TWA — Time Weighted Average  As defined

by the American Conference of Governmental

Industrial Hygienists (ACGIH

) [SEMI F6].

5.2.9 VMB — Valve Manifold Box.

5.3 Definitions

5.3.1 abatement system — a system used to modify the

effluent from a process in order to make it safe to emit

from the facility or to reduce emissions of hazardous

materials to safe levels.

5.3.2 authorized personnel  those persons trained

and capable of performing activities involving the risks

associated with the defined tasks.

5.3.3 carriage  a hand cart for carrying one or two

gas cylinders.

5.3.4 chlorosilane  dichlorosilane or trichlorosilane.

5.3.5 controlled condition  when related to silane

family gases, a condition in which the gas is controlled

within the confines of an approved piping system with

controls that can determine if the safe parameters of the

piping system have failed.

5.3.6 exhaust treatment system  a system similar to

an abatement system, except it handles only the

airborne emissions from a process in order to make

them safe to emit or to reduce the levels of hazardous

materials to safe emission levels.

5.3.7 fail-safe  designed so that a failure does not

result in an increased risk [SEMI S2].

5.3.8 flammable gas  any gas that forms an ignitable

mixture in air at 20 degrees C (68°F) and 101.3 kPa

(14.7 psia) [SEMI S2].

5.3.9 Flow Limiting Device  a device installed in a

valve that is designed to reduce the maximum flow

from the valve under full flow conditions [SEMI F5]

[One such device is a Restricted Flow Orifice (RFO)].

5.3.10 foolproof  designed so that any single human

error or misuse does not result in unacceptable risk.

5.3.11 occupational exposure limits (OELs)  Various

terms are used to refer to OELs, such as permissible

exposure levels, Threshold Limit Values

, maximum

acceptable concentrations, maximum exposure limits,

and occupational exposure standards. When OELs are

used to specify work-area criteria in this document ,

OELs are generally established on the basis of an eight

hour workday. When OELs are used to specify criteria

in this document for alarm or warning in non-

occupational area, OELs established on shorter

exposure basis may be used. However, the criteria

used in determining OELs can differ among the various

countries that have established values. Refer to the

national bodies responsible for the establishment of

OELs. (Threshold Limit Value is a registered trademark

of the American Conference of Governmental Industrial

Hygienists.)

5.3.12 oxidizer gas  a gas which will support

combustion or increase the burning rate of a

combustible material with which it may come in contact

[SEMI S4].

5.3.13 pyrophoric gas  “a gas which upon contact

with air will ignite spontaneously at or below a

temperature of 54°C (130°F) [SEMI S4]” at a pressure

of 101.3kPa (14.7psia).

5.3.14 safe shutdown condition  a condition in which

all hazardous energy sources are removed or suitably

contained and hazardous production materials are

removed or contained, unless this results in additional

hazardous conditions.

5.3.15 safe state  a condition in which the equipment

does not present any uncontrolled hazards to itself or to

personnel. It does not allow hazardous production

chemicals to flow.

An acceptable safe state is

determined by the designer of the equipment and is

based on the hazards in the design.

5.3.16 silane  any of monosilane, disilane, or

trisilane.

5.3.17 unacceptable risks — risks of a degree or type

which are not acceptable to the person who approves a

design or procedure.

5.3.18 unsafe gas condition  a condition in which the

gas is not safely contained within the designed

parameters of the equipment process, or which could

lead to a gas emission or gas hazard.

6 General Principles

6.1 Since silane family gases have several hazardous

properties, personnel should wear appropriate

protective equipment when working with silane family

gas sources.

6.1.1 Monosilane (SiH

), disilane (Si

) and trisilane

(Si

) are pyrophoric. If these gases are mixed with

stronger oxidizing gases than air, combustion and

explosion energies can radically increase.

6.1.2 Dichlorosilane (SiH

) is pyrophoric and

trichlorosilane (SiHCl

) is flammable. Dichlorosilane

(SiH

) and trichlorosilane (SiHCl

) are also

corrosive gases. If these gases are mixed with