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SEMI C57-0305 © SEMI 2005 5 NOTE 6: The sampling system and hygrom eter should be designed to ope rate und er the sample pressure, or the sample pressure must be reduced (by a regulator with a diaphragm of stainle ss ste…

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SEMI C57-0305 © SEMI 2005 4
9.2.4.4 Compare the average peak area of the calibration standard to that of the argon sample being tested.
Calculate the concentration of hydrogen and nitrogen, using the formula below.
9.2.4.5 The result may not exceed the specifications in Table 1.
9.3 Oxygen — This procedure is for the determination of oxygen in argon using a continuous flow analyzer using
an electrochemical method.
9.3.1 Detection Limit — 100 ppb.
9.3.2 Flow Rate — Set sample flow rates in accordance with the instrument manufacturer’s instructions.
9.3.3 Calibration Standard — 3–15 ppm oxygen in argon or in accordance with the instrument manufacturer’s
instructions.
9.3.4 Operating Procedure
9.3.4.1 Do not change the initial sample flow setting once established.
9.3.4.2 Introduce argon sample and record oxygen reading. The result may not exceed the specification in Table 1.
9.4 Total Hydrocarbons — This procedure is for the determination of total hydrocarbons in argon using a
continuous flow flame ionization detector equipped total hydrocarbon analyzer.
NOTE 3: The 0–1 range can be used provided that zero and span gas standards in hydrogen with known levels of hydrocarbons
between 0 and 1 ppm are used in the calibration of the analyzer.
NOTE 4: As the flow rate and heat capacity of the matrix gas affect the instrument output, the zero gas matrices should be
coincided with that of the sample gas.
NOTE 5: The effective response of a flame ionization detector-equipped total hydrocarbon analyzer to different hydrocarbons
can vary and should be approximated. However, the response of the common hydrocarbon impurities in argon can be accurately
totaled and compared to methane.
9.4.1 Detection Limit — 0.1 ppm.
9.4.2 Flow Requirements
9.4.2.1 High purity, hydrocarbon-free (less than 0.1 ppm) hydrogen: 35–40 mL/min or 40% hydrogen in either
helium or nitrogen matrix at 75–80 mL/min.
9.4.2.2 Dry, hydrocarbon-free (less than 0.1 ppm) air: 350–400 mL/min.
9.4.2.3 Set sample flow rates in accordance with the instrument manufacturer’s instructions.
9.4.3 Calibration Standards
9.4.3.1 Zero argon with known quantity of hydrocarbons at 0.1 ppm level.
9.4.3.2 The upper level span gas not exceeding five times the concentration of the specification.
9.4.4 Operating Procedure
9.4.4.1 Do not change the initial flow settings for hydrogen, air and sample once established.
9.4.4.2 Introduce the zero argon with known quantity of hydrocarbons and using the 0–10 ppm range, set the needle
(or output) to read the correct level using the zero adjust knob.
9.4.4.3 Introduce the span gas standard in argon and using the span adjust knob, set the needle (or output reading)
to match the level of hydrocarbons in the span gas.
9.4.4.4 Introduce argon sample into the analyzer and read the quantity of hydrocarbons on the analyzer meter. The
result may not exceed the specification in Table 1.
9.5 Water — This procedure is for the determination of trace moisture (water) in argon using a continuous flowing
piezoelectric hygrometer.
Sample Peak
Area
Standard Peak Area
Concentration
of Standard
Concentration
of Sample
SEMI C57-0305 © SEMI 2005 5
NOTE 6: The sampling system and hygrometer should be designed to operate under the sample pressure, or the sample pressure
must be reduced (by a regulator with a diaphragm of stainless steel or other suitable material) to accommodate the pressure
restrictions of the analytical hygrometer.
NOTE 7: Other hygrometers may also be used, e.g. CRDS, FTIR, TDLAS, and vibrating quarts.
9.5.1 Detection Limit — 0.1 ppm (vol/vol) at –90C (–130F).
9.5.2 Flow Requirements — Set the sample pressure and flow rate in accordance with the instrument
manufacturer’s instructions.
9.5.3 Calibration Standards — Construct a calibration curve which contains at least three points covering the range
of interest. Verify the standards employed independently by another analytical method.
9.5.4 Operating Procedure
9.5.4.1 Obtain a continuous flow sample of gas from the source using a clean and passivated stainless steel line
which has been purged dry after exposure to ambient moisture.
9.5.4.2 After prepurging with a dry gas, allow the sample gas to flow through the sampling system and the
piezoelectric moisture hygrometer until a stable reading is obtained.
9.5.4.3 Determine the moisture content of the argon sample by comparing the reading to calibration curve. The
result may not exceed the specification in Table 1.
10 Analytical Procedures for Grade 5.2 Argon (See Notes 1 and 2 in §9)
10.1 Carbon Monoxide and Carbon Dioxide — Use the procedure in ¶9.1 for the analysis of carbon monoxide and
carbon dioxide except that the calibration standard should be 0.2–1 ppm carbon monoxide, 0.2–1 ppm carbon
dioxide with balance Ar.
10.2 Hydrogen and Nitrogen — Use the procedure in ¶9.2 for the analysis of hydrogen and nitrogen except that the
calibration standard should be 5–25 ppm nitrogen in argon.
10.3 Oxygen — Use the procedure in ¶9.3 for the analysis of oxygen except that the calibration standard should be
0.5–2.5 ppm oxygen in argon.
10.4 Total Hydrocarbons — Use the procedure in ¶9.4 for the determination of total hydrocarbons.
10.5 Water — Use the procedure in ¶9.5 for the determination of water.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C58-0305 © SEMI 2005 1
SEMI C58-0305
SPECIFICATIONS AND GUIDELINES FOR HYDROGEN
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 10, 2004. Initially available at www.semi.org February 2005; to be published
March 2005.
1 Purpose
1.1 The purpose of this document is to provide a series of specifications for different grades of Hydrogen (H
2
) that
are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades of hydrogen used in the semiconductor industry.
2.2 If analytical methods are not complete, the requirements are presented as a guideline.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Description
3.1 Hydrogen is a colorless gas. Its vapors are highly flammable, colorless, tasteless, and nontoxic. It is the lightest
gas known.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined in SEMI C3.
7 Requirements
7.1 Purity and other requirements for the various grades of hydrogen are given in Table 1.