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SEMI E54.15-0305 © SEMI 2005 24 9.3.15 Assembly-ISPM#9 –– The presentation of the Assembly #9 In -Situ Particle Monitor (Assembly-ISPM#9) object instance attributes and serv ices are as indicated in Table 41. Table 41 A …

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9.3.12 Assembly-ISPM#6 –– The presentation of the Assembly #6 In-Situ Particle Monitor (Assembly-ISPM#6)
object instance attributes and services are as indicated in Table 38.
Table 38 Assembly-ISPM#6 Object Instance Attributes and
Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the Assembly #7 In-Situ Particle Monitor (Assembly-ISPM#7)
object instance attributes and services are as indicated in Table 39.
Table 39 Assembly-ISPM#7 Object Instance Attributes and
Services
Assembly-ISPM#7
Class ID = 147, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.14 Assembly-ISPM#8 –– The presentation of the Assembly #8 In-Situ Particle Monitor (Assembly-ISPM#8)
object instance attributes and services are as indicated in Table 40.
Table 40 Assembly-ISPM#8 Object Instance Attributes and
Services
Assembly-ISPM#8
Class ID = 148, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.15-0305 © SEMI 2005 24
9.3.15 Assembly-ISPM#9 –– The presentation of the Assembly #9 In-Situ Particle Monitor (Assembly-ISPM#9)
object instance attributes and services are as indicated in Table 41.
Table 41 Assembly-ISPM#9 Object Instance Attributes and
Services
Assembly-ISPM#9
Class ID = 149, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.16 Assembly-ISPM#48 –– The presentation of the Assembly #48 In-Situ Particle Monitor (Assembly-ISPM#48)
object instance attributes and services are as indicated in Table 42.
Table 42 Assembly-ISPM#48 Object Instance Attributes and
Services
Assembly-ISPM#48
Class ID = 150, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4 Specific Device Model For Endpoint Device –– These sections detail the network mapping required to support
the Specific Device Model for Endpoint (EPD) Devices (see reference SEMI E54.11 ¶4.1). Table 43 summarizes
the Endpoint Device Object types. Subsequent Tables 44 to 50 details the attributes and services associated with
each Endpoint Device object type.
Table 43 Endpoint Device Object Types
SDM Object
Identifier
Object Name SafetyBUS p Class ID
EPD1 Device Manager (DM) 1
EPD2 Sensor Actuator Controller
(SAC)
2
EPD3 Sensor-BI-TH-EP 137
EPD4 Assembly-EPD#1 138
EPD5 Assembly-EPD#2 139
EPD6 Assembly-EPD#3 140
EPD7 Assembly-EPD#4 141
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9.4.1 Device Manager –– The presentation of the extended EPD Device Manager (DM) object instance attributes
and services are as indicated in Table 44.
Table 44 DM Object Instance Attributes and Services
Device Manager Object (DM)
Class ID = 01, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.2 Sensor Actuator Controller (SAC) –– The presentation of the extended EPD Sensor Actuator Controller
(SAC) object attributes and services are as indicated in Table 45.
Table 45 SAC Object Instance Attributes and Services
Sensor, Actuator, Controller Object (SAC)
Class ID = 02, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
65 Number of Endpoint Objects SacA65
Services
ID Service Name SDM Tag
33 Reset Endpoint S33
34 Download Recipe S34
35 Upload Recipe S35
36 Calibrate S36
9.4.3 Sensor-BI-TH-EP –– The presentation of the Sensor Binary Input Threshold Endpoint (Sensor-BI-TH-EP)
object instance attributes and services are as indicated in Table 46.
Table 46 Sensor-BI-TH-EP Object Instance Attributes and Services
Sensor-BI-TH-EP
Class ID = 137, Instance ID = 01 through 1024
Attributes
ID Attribute Name SDM Tag
128 Minimum Time EpA1
129 Maximum Time EpA2
130 Target Time EpA3
131 Elapsed Time EpA4
132 Time Stamp EpA5
133 Recipe Identifier EpA6
134 Step Identifier EpA7