semi合集-English.pdf - 第1436页

SEMI 30.1-0200 © SEMI 1998, 2000 11 Transi- tion # Previ ous State Trigger New State Actions Comments 20 P AUSI NG The e quipme nt has achieved a “sa fe state.” PAUSED The equipm ent is waiting for a command (PP-UPDATE, …

SEMI 30.1-0200 © SEMI 1998, 2000 10

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tion #

Previous State Trigger New State Actions Comments

PROCESS The equipment has

received an ABORT

command.

ABORTING The equipment is put in a “safe

state” if necessary.

Data may be invalid or not

available.

PROCESS An alarm occurs. ALARM

PAUSED

PROCESS activity is

suspended, and the equipment

is waiting for all alarms to be

cleared.

ALARM PAUSED is a

PAUSE Sub-State.

PROCESS The equipment has

received a PAUSE

command.

PAUSING PROCESS shall be suspended

at the next opportunity.

Actions to put the equipment

in a “safe state” will be

performed.

This transition is required if

the user wants to make

changes to the current process

program being executed.

PROCESS

PAUSE

The equipment has

received a RESUME

command.

PROCESS

State

Proceed with the suspended

process Sub-State.

If a RESUME command is

received in the CHECKING

state, then the PP-UPDATE

command is canceled. Some

equipment may only allow

RESUME remote command

from the PAUSE state.

CHECKING The equipment has

validated “all”

requested updates to

the current process

program being

executed; changes are

done before entering

into the next state.

PROCESS

State

Verification is appropriate in

this state to check the changes

made to the process program

updated.

If an alarm occurs in the

CHECKING state, then the

PP-UPDATE command is

canceled.

STOPPING The equipment

cleanup is complete,

and the equipment is

free of alarms.

IDLE Equipment waits for a

command/or determines if

there is a ISEM job queued.

IDLE state entry requires that

no process program is selected.

PAUSE The equipment has

received a STOP

command.

STOPPING The equipment proceeds with

cleanup.

Normally, data is preserved

and is valid.

PAUSE The equipment has

received an ABORT

command.

ABORTING Any unsafe condition is

resolved if possible.

Data may be invalid or not

available.

STOPPING The equipment has

received an ABORT

command or an alarm

was received while

STOPPING.

ABORTING Any unsafe condition is

resolved if possible.

Data may be invalid or not

available.

ABORTING Unsafe conditions

have been resolved

where possible.

ABORTED The equipment is waiting for

alarm and ABORT conditions

to be cleared.

The only state change allowed

is to IDLE.

17 ABORTED All alarms and abort

conditions have been

cleared.

IDLE Equipment is waiting for a

command (PP-SELECT, PP-

ASSIGN, or MAP-

CARRIER).

If needed, the CLEANUP

command clears the abort

conditions. IDLE state entry

requires that no ISEM job or

process program be selected.

18 IDLE An alarm is set. IDLE with

ALARMS

The equipment waits for all

alarms to be cleared.

None

19 IDLE with

ALARMS

All alarms have been

cleared.

IDLE None IDLE is free of alarms.

SEMI 30.1-0200 © SEMI 1998, 200011

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Previous State Trigger New State Actions Comments

20 PAUSING The equipment has

achieved a “safe state.”

PAUSED The equipment is waiting for a

command (PP-UPDATE,

RESUME, STOP, or

ABORT).

None

21 PROCESS

PAUSED

An alarm is set. ALARM

PAUSED

The equipment waits for all

alarms to be cleared or for a

STOP or ABORT command.

None

22 ALARM

PAUSED

All alarms are cleared. PAUSED The equipment is waiting for a

command (RESUME, PP-

UPDATE, STOP, or ABORT).

None

23 LOAD Material transfer to

processing location is

complete.

WORKING The substrate is being

processed.

None

24 WORKING The processing of the

specific material being

processed successfully

completed.

UNLOAD This material is transferred

from the processing location.

Normal completion of the

substrate.

25 UNLOAD The material unload is

complete.

LOAD The equipment returns to

LOAD and determines if

processing is complete, if not,

transfers the next substrate to

the processing location.

None

26 WORKING The processing of the

specific material being

processed abnormally

ended.

UNLOAD This material is transferred

from the processing location.

Error exit from WORKING.

Data may be invalid.

27 ALIGN The material alignment

is complete, and

inspection is required.

INSPECT The equipment determines if

another region needs to be

inspected.

This transition is to the

INSPECT SETUP Sub-State

of INSPECT.

28 INSPECT

SETUP

All inspect setup

activity is complete,

and the inspection is

not complete.

INSPECT

REGION

The equipment inspects the

current alignment region.

None

29 INSPECT

REGION

The region inspection

has ended.

INSPECT

SETUP

The equipment determines if

another region needs to be

inspected.

None

30 INSPECT

SETUP

Inspection of this

alignment group is

complete.

INSPECT

COMPLETE

The equipment determines if

(a) additional alignment areas

are required to do more

inspections, (b) the recipe on

this material is complete, or (c)

a review of the current

alignment area is required.

The next transition is

conditional.

31 INSPECT

COMPLETE

The inspection of this

alignment area ended,

and additional

inspections may be

required.

ALIGN An inspection group is

complete, and additional

inspections may be required.

None

32 ALIGN The material alignment

is complete, and

review is required.

REVIEW The material is reviewed. This transition is to the

REVIEW SETUP Sub-State of

REVIEW.

33 REVIEW

SETUP

Anomaly data is

needed to perform the

review.

ACQUIRE

ANOMALY

DATA

Anomaly data is being

acquired.

Anomaly data may come from

the host or equipment.

SEMI 30.1-0200 © SEMI 1998, 2000 12

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34 ACQUIRE

ANOMALY

DATA

Anomaly data has

been acquired for the

review, or no more

anomaly data is

available.

REVIEW

SETUP

The equipment determines

what to do.

35 REVIEW

SETUP

The equipment has

anomaly data, and the

review is not complete.

ACQUIRE

ANOMALY

IMAGE

The equipment acquires the

anomaly image at the specified

site.

The image may be a stored

image or from an imaging

device.

36 ACQUIRE

ANOMALY

IMAGE

The equipment has

acquired the anomaly

image for the specified

site.

CLASSIFY The operator or equipment

classifies the anomaly.

None

37 CLASSIFY All anomalies have

been classified for the

site.

REVIEW

SETUP

The equipment determines

what to do.

None

38 REVIEW

SETUP

The review of the align

area is complete.

REVIEW

COMPLETE

Transition to next state is to be

determined.

None

39 REVIEW

COMPLETE

The review of this

alignment area ended,

and additional review

is required.

ALIGN A review group is complete,

and additional alignment is

required.

None

40 INSPECT The alignment area

inspection is complete,

and review is required.

REVIEW The material is reviewed. This transition is to the

REVIEW SETUP Sub-State of

REVIEW.

41 REVIEW

COMPLETE

The review is

complete, and

inspection is required.

INSPECT The material is inspected. This transition is to the

INSPECT SETUP Sub-State

of INSPECT.

42 CHECKING Validation of

requested process

program changes

failed.

PAUSED The equipment is waiting for a

new command.

No process program

parameters have been changed.

43 PAUSED The equipment

receives a PP-

UPDATE command.

CHECKING The equipment begins

validating requested changes

to the process program.

No process program

parameters are updated or

changed before “all” requested

changes are validated.

44 LOAD Previous process

program has

completed, and there

are additional process

programs assigned to

the “CARRIERBLD”.

See Section 13.

SETTING UP The equipment performs setup

according to specifications of

the next process program.

PROCESS-BLD-GROUP may

include an AUTOSTART

command within its body.

Otherwise, the equipment

waits for a START command.

8 Collection Event List

This section identifies data collection events and defines (Stream 6) reporting levels for variable items. The host can

use the report definition scenario defined in SEMI E30 to define reports at ISEM-defined levels. The intent of this

section is to ensure data is available at specific events and to optimize data reporting to the SECS-II host by

allowing data to be grouped at reporting levels.

8.1 Requirements

8.1.1 This standard requires all collection events listed in the SEMI E30 standard. This standard requires the ISEM

events in Table 2 for data collection (RunDataComplete, SubstrateDataComplete, GroupDataComplete,

RegionDataComplete, and AnomalyDataComplete). These events are separate from the processing state transitions.

These collection events shall occur before or on the processing state transition specified in Table 1. This was done to