semi合集-English.pdf - 第2393页

SEMI E84-0305 © SEMI 1999, 2005 37 / O GV A PI Conce pt AGV/ R / / R PI O PI O Concept B AGV/ GV Internal equipment buff er Internal equipment bu ff er NOTE 1: Simultaneous hand-off: us e two PI/O at the same tim e. NOTE…

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SEMI E84-0305 © SEMI 1999, 2005 36
Bay wall
(possible location)
SEMI
E15.1
Load port
ceiling
Female plug on
equipment -
interface point
Equipment
boundary
top view
100 mm
300 mm
zone where plug can be
located - top or top edge
of the equipment
side view
100 mm
300 mm
100 mm
Bay wall
(possible location)
Figure A1-1
Connection Plug Location for Overhead Delivery
Production Equipment Production Equipment
1 PI/O per 2 Load ports
1 PI/O per Load port
PI/O
PI/O
PI/O
Figure A1-2
Two Different PI/O Configurations
SEMI E84-0305 © SEMI 1999, 2005 37
/
O
GV
A
PI
Concept
AGV/R
/
/
R
PI O
PI O
Concept
B
AGV/ GV
Internal equipmentbuffer
Internal equipmentbuffer
NOTE 1: Simultaneous hand-off: use two PI/O at the same time.
NOTE 2: Continuous hand-off for different load port: use each PI/O sequentially.
Figure A1-3
Optional PI/O Configuration for Internal Buffer Equipment
PI
/
O
PI
Fixed
e
q
ui
p
ment buffer
/
O
Figure A1-4
Typical PI/O Configuration for Fixed Buffer Equipment
A1-1.7 This standard specifies a signal “on” state as 1.8 Vdc or less. Typical TTL circuits typically require a pull-
down to 0.8 Vdc or less. For hard-wired connections, some TTL input circuits might not be able to sense an “on”
state between 0.8 Vdc and 1.8 Vdc. One possible implementation is to provide an input receiver circuit.
SEMI E84-0305 © SEMI 1999, 2005 38
floor
D7
D8
H7
W8
H8
Exclusion
Volume for
Parallel I/O
Device
Center of Optical beam
PI/O interface sensor unit
Beam direction
H
W
W8
H8
D8
D
Figure A1-5
Example of the PI/O Interface Sensor Unit Implementation at Load Port for AGV/RGV
A1-1.8 Equipment Integration Test Mode — It is recommended that the passive equipment provide a method to
disable any physical carrier engagement/movement after the SEMI E84 sequence (example carrier clamping on the
load port and docking to the FIMS port) on a load port by load port basis. This functionality will support equipment
level testing of automated carrier transfers and SEMI E84 communications at load ports.
A1-2 Reticle Loadport Connector Locations
A1-2.1 For equipment with reticle carrier loadports, if the connection for automated delivery to the equipment is
made using an electrical connector, the connector should be located on the top of the equipment outside of the
easement for overhead transport. The connector should be no more than 600 mm from the edge of the easement.
A1-3 Additional Interbay AMHS Information
A1-3.1 This section describes error generation and recovery examples (mainly for active equipment) for interbay
AMHS (i.e., OHS, stockers). The following are errors that could conceivably occur during transfer operations (load,
unload). The procedures are designed for a technician with considerable knowledge of AMHS equipment. Error
recovery should always follow the recovery procedures specified in the equipment manuals.
A1-3.2
OHS (Active Type) Error Examples
Table A1-1 Load Operation Errors
No. Error Description OHS Reaction
1
The L_REQ does not go OFF in the allotted amount of time during a
load transaction.
2
Anytime during the transfer a load operation failure or stop positioning
failure is detected.
The load operation sequence is stopped and an
error is displayed.