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SEMI E54.16-0705 © SEMI 2005 27 8.3 Following the LonMark Interoperability Guidelin es durin g product design will allow easy product certification . Application-specific functional profile(s) are av ailable to download …

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SEMI E54.16-0705 © SEMI 2005 26
Controller Object (C)
Profile ID = 180.51, Instance ID = 01 through q
Sequence
Number
Name Storage Class CDM Tag Standard NV or CP Data Type
21 AlarmSettleTime CP CA21 SCPTalrmSetT2
22 AlarmErrorBand CP CA22 SCPTalrmErrorBand (*)
#2
24 WarningSettleTime CP CA24 SCPTalrmSetT1
25 WarningErrorBand CP CA25 SCPTwarningErrorBand (*)
#2
#1
The form and content of this SNVT is context-specific.
#2
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 28 Controller-C Object Instance Network Services
Controller Object (C)
Profile ID = 180.51, Instance ID = 01 through q
Service Request
Code
Service Name CDM Tag Request Parameters Result Parameters
1 Reset CS1 Controller Object
RQ_RESET
2 Abort CS2 Controller Object
RQ_ABORT (*)
#1
3 Recover CS3 Controller Object
RQ_RECOVER (*)
#1
6 Operate CS4 Controller Object
RQ_NORMAL
4 GetAttribute CS5 Read NV or CP NV or CP Value
5 SetAttribute CS6 Controller Object
RQ_RESTORE (*)
#1
NVO Value
7 RestoreDefault CS7 Controller Object
RQ_PROPAGATE (*)
#1
NVO Value
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
7.14.1 Controller Object Network Variables — A new functional profile is defined with the following mandatory
network variables and behaviors. This functional profile forms part of the LONMARK Functional Profiles for SEMI
SAN-compliant devices based on LONWORKS.
7.14.1.1 SNVT_xxx — The setting of the actuator (associated with the object instance) that is to be made available
on the network. The form and content of this SNVT is context-specific.
7.14.2 Controller Object Configuration Parameters — The Controller object has configuration properties to control
exception reporting as shown in Table 27. These parameters are Standard Configuration Property Types (SCPTs).
Extensions to the current SCPT list and Interoperability Guidelines are marked by an asterisk (*).
8 Protocol Compliance
8.1 A method of testing protocol compliance is required to verify implementation conformance to the standard. By
virtue of the fact that the intermediate layers of the ANSI/EIA/CEA-709.1 (LONWORKS) protocol are implemented
in commercially available silicon, compliance verification is needed only at the physical and application layers. The
LONMARK Interoperability Association provides a compliance verification service to its members. When the SEMI
Sensor/Actuator Network functional profiles are approved and incorporated by LONMARK International Association,
this service may be used to verify compliance with the SEMI guidelines.
8.2 The certification procedure and checklist may be viewed and obtained by accessing web site
http://www.lonmark.org.
SEMI E54.16-0705 © SEMI 2005 27
8.3 Following the LonMark Interoperability Guidelines during product design will allow easy product certification.
Application-specific functional profile(s) are available to download from the User Guides section to ease the
specification process. All questions about guidelines and certification should be directed to “cert@lonmark.org”.
Design assistance may be obtained by referencing “lm_confm.pdf”.
9 Specific Device Type Information
9.1 This section provides for the mapping of network-visible specific device model structure and behavior,
specified in a SEMI standard Specific Device Model specification, to the ANSI/EIA/CEA-709.1 (LONWORKS)
protocol. Each subsection is devoted to a single Specific Device Model specification. As additional SEMI SDM
specifications are created, additional SDM mappings are added as subsections to this NCS specification. Unless
otherwise noted, all attributes and services described are instance level attributes (as opposed to class level
attributes). Device-type-specific items, such as overrides to the standard connector, may also be noted in these
subsections.
9.1.1 Note that the formats of object instance attributes and services are detailed in the associated Specific Device
Model specification. The presentation of the attributes and services to a LONWORKS network is detailed in the tables
contained in the following sub-sections and in the LONMARK Application Layer Interoperability Guidelines
document. Note that relationships between object classes, including inheritance are defined in the associated SDM
specification and the CDM specification.
9.1.2 The instance identifier format of 1 through n, assigned to an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 3 of this document and the CDM document for a further explanation
of object instance assignments.
9.2 Specific Device Model For Mass Flow Device — These sections detail the network mapping required to support
the Specific Device Model For Mass Flow Device (see reference SEMI E54.3 of §4.1). Table 29 summarizes the
Mass Flow Device object types. Subsequent Table 30 to Table 49 detail the instance attributes and services
associated with each Mass Flow Device object type.
Table 29 Mass Flow Device Object Types
SEMI SDM Object
Identifier
Object Name
LONMARK Profile
ID
LONMARK Functional Profile Name
MFD1 (DM) Device Manager 0
Node Object
MFD2 (SAC) Sensor/Actuator/Controller 0
Node Object
MFD3 Sensor-AI-MF 180.13
SFPTsemiSensorAIMF
MFD4 Sensor-AI-AT 180.12
SFPTsemiSensorAIAT
MFD5 Assembly-MFM 180.82
SFPTsemiAssemblyMFM
MFD6 Sensor-AI-Aux 180.14
SFPTsemiSensorSensorAIAux
MFD7 Actuator-AO-MF 180.32
SFPTsemiActuatorAOMF
MFD8 Controller 180.51
SFPTsemiController
MFD9 Local Link --
Turnaround Connection
#1
MFD10 SISO 180.71
SFPTsemiSISO
MFD11 SISO-Setpoint 180.72
SFPTsemiSISOSetpoint
MFD12 Assembly-MFC 180.83
SFPTsemiAssemblyMFC
#1
A turnaround connection is not a profile, but is a protocol-specific method of creating a link
9.2.1 The presentation of the Mass Flow Device - Device Manager(DM) Object — is as defined by SEMI E54.1,
CDM standard specification. There are no additional object instance attributes or services required by this SDM.
SEMI E54.16-0705 © SEMI 2005 28
9.2.2 The presentation of the Mass Flow Device – Sensor/Actuator Controller (SAC) Object — is as defined by
SEMI E54.1, CDM standard specification. There are no additional object instance attributes or services required by
this SDM.
9.2.3 Sensor-AI-MF — The presentation of the Sensor Analog Input Mass Flow (Sensor-AI-MF) object instance
attributes are as indicated in Table 30. The presentation of Sensor-AI-MF object services is indicated in Table 31.
Table 30 Sensor-AI-MF Object Instance Network Variables
Sensor-AI-MF
Profile ID = 180.13, Instance ID = 01 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Flow Totalizer NVO A1 SNVT_vol_f
129 Flow Hours NVO A2 SNVT_time_hour
130 Zero Offset Mode CP A5 SCPTzeroOffsetMode (*)
#1
131 Zeroing Status NVO A6 SNVT_zeroing_stat (*)
#1
132 Autorange Status NVO A7 SNVT_autorange_stat (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 31 Sensor-AI-MF Object Instance Network Services
Sensor-AI-MF
Class ID = 180.13, Instance ID = 01 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
129 Perform Zero Offset S1 Controller Object
RQ_ZERO_OFFSET (*)
#1
130 Query-Supported Gas Types S2 Controller Object
RQ_QUERY_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
131 Selected Programmed Gas Type S3 Controller Object
RQ_SELECT_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
132 Insert Gas Type S4 Controller Object
RQ_INSERT_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
133 Delete Gas Type S5 Controller Object
RQ_DELETE_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
134 Get Gas Calibration Data Value S6 Controller Object
RQ_GET_CAL_DATA (*)
#1
LONMARK file transfer –
Context Specific
135 Set Gas Calibration Data Value S7 Controller Object
RQ_SET_CAL_DATA (*)
#1
LONMARK file transfer –
Context Specific
136 Autorange S8 Controller Object
RQ_AUTORANGE (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
9.2.4 Service Requests Code — The service request is implemented as a network variable update containing a file
request to an nviSemiReq input to the Sensor-AI-MF Object functional block of a device. This input is defined by
the SNVT_semi_req type as follows:
typedef enum {
struct {
CMD_PERFORM_ZERO_OFFSET = 129,
CMD_QUERY_SUPPORTED_GAS_TYPES = 130,
CMD_SELECTED_PROGRAMMED_GAS = 131,