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SEMI E123-0703 © SEMI 2003 8 Collection Event Name Description Typi cal Variable Data Re ference / Comments MediaCntInterval MediaCount Interval EXECUTING event. SkipCntInterval SkipCountInterval CSE. EXECUTING event. Me…

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SEMI E123-0703 © SEMI 2003 7
# Current State Trigger New State Actions Comments
27 ABORTING Unsafe conditions have
been resolved where
possible.
ABORTED The handler is waiting for alarm
and ABORT conditions to be
cleared.
The only state change
allowed is to IDLE.
28 ABORTED An operator has verified
that all alarms and abort
conditions have been
cleared.
IDLE None None
29 IDLE An alarm is set. IDLE with
ALARMS
The handler waits for all alarms
to be cleared.
None
30 IDLE with
ALARMS
All alarms have been
cleared.
IDLE None The IDLE state is free of
alarms.
6.6 Process Model Conditions Table
Table 2 Process Resume Conditions
Condition Next State
Checking determines that process program conditions were
changed.
SETTING UP
Previous State PRELOADING. PRELOADING
Previous State LOADING. LOADING
Previous State AWAITING COMMAND. AWAITING COMMAND
Previous State CONTACTOR OPEN. CONTACTOR OPEN
Previous State READY. READY
Previous State was SETTING UP. SETTING UP
7 Collection Event List
7.1 Requirements
7.1.1 ALL SEMI E30-required Events are required by the HSEM. Since a Processing State Model is required by the
HSEM, all state transitions are required Events.
7.1.2 This section of the HSEM lists only those collection events that are not associated with a change of state or
those requiring specific data variables or Reports defined in the HSEM.
7.2 Collection Event Tables — The first table contains required events and associated reports. The second table
contains required events and associated data variables.
Table 3 Processing State Transitions Requiring Report Levels
Transition From State To State Required variables or Report
SETUP COMPLETE (3) SETTING UP READY Setup Report
Table 4 Other Required Collection Events
Collection Event Name Description Typical Variable Data Reference / Comments
CarrierEmpty Last item from carrier was removed. MediaID Configuration specific event
(CSE). EXECUTING event.
CarrierFull Output carrier capacity is full. MediaID CSE. Valid in
EXECUTING event.
ReaderFailed Any type of failure related to reading
of units.
ReaderType, ReaderErrorType CSE. PROCESSING event
UnitCntInterval UnitCountInterval, Clock EXECUTING event.
SEMI E123-0703 © SEMI 2003 8
Collection Event Name Description Typical Variable Data Reference / Comments
MediaCntInterval MediaCountInterval EXECUTING event.
SkipCntInterval SkipCountInterval CSE. EXECUTING event.
MediaChange MediaID, MediaType EXECUTING event.
SortComplete Sorting of unit(s) from last BIN-
UNITS command to sort categories has
completed.
CategoryCount EXECUTING event.
InputsEmpty No materials available on direct
inputs. There may still be unit(s) in
process buffers or under processing.
UnitCount, CategoryCount EXECUTING event.
LastUnitCompleted Handler completed unloading last unit,
i.e. no materials available in all inputs
or buffers.
UnitCount, CategoryCount EXECUTING event.
UnitsReady At load complete, this event notifies
Host that unit(s) is ready to be
processed and indicates loaded status
of process site(s).
See Units Ready Report EXECUTING event.
PreloadComplete Handler completes preloading of units
to its process buffers, e.g. unit(s) is
ready to be transferred to process
site(s) from buffers.
BufferID, BufferType CSE. PROCESSING event.
BufferEmpty One of process buffer emptied. ID of
buffer identifies which buffer.
BufferID, BufferType CSE. EXECUTING event.
8 Variable Items
8.1 The purpose of this section is to define the list of
variable items required by the HSEM. Values of these
variables are available to the host through collection
event reports and host status queries.
8.2 Requirements
8.2.1 All generic variable items defined in SEMI E30
are required by all HSEM equipment.
8.2.2 Variable items required by HSEM are
categorized as follows:
• Common Variables (CVs) — Variables common to
all handlers.
• Configuration-Specific Variables (CSVs) —
Variables associated with a specific configuration
of the above equipment class.
8.3 Data Types
8.3.1 Equipment constants have various uses in HSEM,
including the following:
• Equipment offsets that match the performance of
several pieces of equipment that would otherwise
perform differently due to inherent manufacturing
differences. Examples are home values and motion
axis scaling factors.
• Setting the configuration of the equipment to allow
for different material specifications, equipment
options, material flows, frequency of automatic
functions, etc. Examples are media and yield
check frequency.
• Managing optional machine features. Examples
are constants that indicate whether optional
features, such as automated media stackers, are
present and control the configuration and function
of these optional subsystems when they are
present.
8.3.2 Status Variables are valid at all times. A status
variable may not be changed by the host but may be
changed by the equipment or operator. The value of
status variables may be queried by the host at anytime.
8.3.3 Variables that are valid upon the occurrence of
specific collection event can be queried by the host. An
attempt to read a data variable at the wrong time shall
not generate an error, but the data reported may not
have relevant meaning.
8.3.4 Data Item Requirements for Multi-Head, Multi-
Site Equipment — The identification for multi-head and
multi-site data (data variable, status variables, events,
etc.) is addressed in this specification through the use of
status variables with list structures. In the table below,
the subheading “Process-Site Group” contains variables
that must be available for all process-sites on the
handler equipment. When multiple process-sites exist,
either a list structure or table structure may be used to
show multiple occurrences of a specific variable.
SEMI E123-0703 © SEMI 2003 9
8.4 Variable Item Table
Table 5 Variable Item Table
Variable Name Category Description Format Comments
Physical Handler Group
ProcessBuffers CSV ID of all implemented input and
output buffers and their type.
Structure
(List of)
BufferID
BufferType
This is a configuration
specific variable item
(CSV). List by number of
buffers.
BufferID CSV Input or Output Buffer ID, valid in
reports only.
Text
BufferType CSV Input or Output Type, valid in
reports only.
Integer
CategoryID CV List of sort category IDs currently
configured in handler.
(List of)
sort category ID
Valid in all states. List by
category.
CategoryCount CSV Count of units in each sort category. Structure
(List of)
sort category ID
UnitCount
Valid in PROCESS states.
List by category.
EquipSerialID CV Identification of Equipment. Text Valid in all states.
KitID CSV ID of unique tooling unit. Text Valid in all states.
LightPoleStatus CSV Color/status (i.e., Red/flash) Text Valid in all states.
LinkPortStatus CSV (3 = Input/Output linked,
2 = Input linked,
1 = Output linked,
0 = HANDLER not Linked)
Enumerated Valid in all sub-states.
MediaID CV Media Serial Number Text Valid in Executing state.
MediaType CV Media Type Text Valid in Executing state.
OperationType CSV Current Operation Mode (i.e.,
maintenance, production).
Text Valid in all states.
OperatorID CSV Current Operator ID. Text Valid in all states.
QueueStatus CV PPID Queued to be run. Integer Valid in all states.
ReaderType CSV Type of reader installed on handler. Text Supplier defined.
ReaderErrorType CSV Type of error detected by the
material reader.
Text Supplier defined.
Process-Site Components
AlignmentCount CSV Number of units since last alignment
(i.e., Homing/Adjustment).
Integer Valid in all states.
InsertionForce CSV Insertion-Force energy Float Valid in PROCESSING
state.
InsertionForceSetpoint CSV Insertion-Force set point (setpoint). Float Valid in all states.
MediaChangeTime CV Elapsed time to replace media and
send ready.
Text Valid in all states.
MediaCount CV Number of media since last reset. Integer Valid in all states.
MediaCountInterval CV Event generated when number of
media is completed.
Integer Valid in all states.
PresentPositionActual CSV Present position actual. Integer Valid in all states.
PresentPositionSetpoint CSV Present position set points
(setpoint).
Integer Valid in all states.
ProcessSiteTemp CSV Process-site temperature (setpoint). Float Celsius - Set point.
ProcessSiteID CV ID of process-site in configuration. Integer Valid in all states.