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SEMI G46-88 © SEMI 1988 7 Figure 5 Figure 6 Interpretation of Heating Curves of Figure 5 NOTE: Inflectio n point in curve occu rs at approximately t H = 400 m s.

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SEMI G46-88 © SEMI 1988 6
Heating Time t
H
(seconds)
DUT #1 CU
(m V/A)
DUT#9 CU
(m V/A)
1 × 10
-4
43 43
1.5 43 43
24343
34343
44343
64343
84343
1 × 10
-3
45 45
1.5 45 45
24747
34848
45050
65153
85863
1 × 10
-2
63 70
1.5 75 86
2 85 100
3 100 122
4 112 140
6 130 168
8 145 190
1 × 10
-1
157 208
1.5 179 243
2 195 268
3 220 308
4 239 337
6 265 373
8 285 398
1 × 10
0
300 416
1.5 323 449
2 340 470
3 362 497
4 377 518
6 398 518
8 411 563
1 × 10
1
421 578
Figure 4
Heating Curve Data for Highest and Lowest Reading Devices from Figure 3
SEMI G46-88 © SEMI 19887
Figure 5
Figure 6
Interpretation of Heating Curves of Figure 5
NOTE: Inflection point in curve occurs at approximately t
H
= 400 ms.
SEMI G46-88 © SEMI 1988 8
Figure 7
K Factor Calibration Setup and Procedure