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SEMI F73-1102 © SEMI 2002 10 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J I K L M N O P Q S R T U 3 4 14 A 15 16 Figure A2-2 Large Particle in Grids K, L, M, 7 and 8 is Ass umed to be an Example of Debris from Sample Prepar…

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APPENDIX 2
EXAMPLE OF DEFECTS
NOTE: The material in this appendix is an official part of SEMI F73 and was approved by full letter ballot procedures.
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Figure A2-1
Diffuse Black Spots in Grids F4, H8, and Along Rows 11 Through 14 are Believed to be Surface
Contamination, Probably Hydrocarbon, and Should be Counted. This Type of Contamination Should be
Apparent in Surface Analysis (Auger or ESCA) if it is Not an Artifact of Sample Preparation. The “Mottled”
Appearance Should Not be Counted.
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Figure A2-2
Large Particle in Grids K, L, M, 7 and 8 is Assumed to be an Example of Debris from Sample Preparation
and Should Not be Counted. Lightly Etched Grain and Twin Boundaries in Grids G Through J, 6 Through
13 are Not Significant Defects and are Not Counted.
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Figure A2-3
Heavily Etched Grain and Twin Boundaries; Worst Cases Should be Counted – E5 Through H15; I and J 9,
10 and 11; K9 Through P10. Also Pits at P3, L5, I6, M8, P10, S11, J10 and K10, C10, C11, D10, D11, E12,
J13, L12, C14.