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SEMI M23-0703 © SEMI 1993, 2003 12 NOTICE: SEMI makes no warranties or representations as to the su itability of the standard set forth herein for any particular application . The determinati on of the suitability o f th…

SEMI M23-0703 © SEMI 1993, 2003 11

Figure 6

SEMI Wafer Edge Profile Template

Table 3 Edge Profile — Dimension and Tolerance Requirements

Property Dimensions Units

Edge Profile Coordinate: x-coordinate y-coordinate

Point A 75 0

µm

Point B 510 0

µm

Point C 50 (See NOTE 1.)

µm

Point D 0 75

µm

NOTE 1: The y-coordinate of point C is 1/3 the nominal wafer thickness.

Figure 7

Example of Acceptable and Unacceptable Wafer Edge Profiles

SEMI M23-0703 © SEMI 1993, 2003 12

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

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standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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SEMI M23.1-0600 © SEMI 1993, 20001

SEMI M23.1-0600

STANDARD FOR ROUND 50 mm DIAMETER POLISHED

MONOCRYSTALLINE INDIUM PHOSPHIDE WAFERS

This standard was technically approved by the Global Compound Semiconductor Committee and is the direct

responsibility of the Japanese Compound Semiconductor Committee. Current edition approved by the

Japanese Regional Standards Committee on April 28, 2000. Initially available at www.semi.org May 2000;

to be published June 2000. Originally published in 1993; previously published in 1996.

The complete specification for this product includes all general requirements of SEMI M23.

Table 1 Dimension and Tolerance Requirements

Property Dimension Tolerance Units

DIAMETER 50.0 ± 0.5 mm

THICKNESS, CENTER POINT

A 350 ± 25 µm

B 450 ± 25 µm

PRIMARY FLAT LENGTH 16 ± 2 mm

SECONDARY FLAT LENGTH 8 ± 2 mm

BOW to be specified

TOTAL THICKNESS VARIATION to be specified

: For reference purposes, the metric (SI) units apply.

Table 2 Orientation and Flat Location Requirements

Property Requirement

OPTION Dove-Tail

PRIMARY FLAT ORIENTATION

)110( ± 0.5°, under an indium facet. The primary flat shall be

perpendicular to the “Dove-tail” etch figure.

SECONDARY FLAT ORIENTATION 90 ± 5° clockwise from the primary flat.

SURFACE ORIENTATION

A { 100} ± 0.5°

B { 100} off 2° ± 0.5° toward any { 110} plane

ORTHOGONAL MISORIENTATION ± 5°