semi合集-English.pdf - 第5682页
SEMI P10-0705 © SEMI 1990, 2005 177 TI TLE_TYPE MASK TI TLE_JUSTIFICATION L TI TLE_LOCATION -22000.0, 1000.0 M IRROR_TITLE F RO TATE_TITLE 0 ROTATE _TITLE_CHARACTERS 0 END _TITLE TITLE_2 !( MIRRO R_MASK T BLANK_SIZE 5/90…
SEMI P10-0705 © SEMI 1990, 2005 176
!
MASK_SET_NAME ABC123
MASK_SET_VERSION ABC123
!
END_MASK_SET_OPTIONS ABC123
!
MASK_GROUP_ID UT1X_GROUP_1
END_MASK_GROUP_OPTIONS UT1X_GROUP_1
!
PLACEMENT_TOP_CELL UT_1X_TOP_CELL
!
!-----------MASKS-------------------------
MASK_ID 100001
MASK_NAME NAME100001
DELIVERABLE_MASK T
PO_NUMBER 123456789
RELEASE_NUMBER 987654
STATUS NEW
DUE_DATE_TIME_REQUESTED 01-Jan-2002, 10:44
PRICE 1111.0
REPAIRS_AUTHORIZED T
!
START_SHIPPABLE_DATA 1
SHIP_CD_PRINTOUT T
SHIP_DEFECT_DATA T
SHIP_REGISTR_DATA T
END_SHIPPABLE_DATA 1
!
PRODUCT_TYPE 1X_STD_FIELD_RETICLE
PRODUCT_MAGNIFICATION 1X
PRODUCT_IMAGING_TYPE BINARY
QUANTITY 1
WAFER_EXPOSURE_TOOL ULTRATECH
JOB_NAME j1000001.jb
JOB_LEVEL 1
!
START_TITLE TITLE_1
TITLE_TEXT ABC123
TITLE_TYPE DEVICE
TITLE_JUSTIFICATION L
TITLE_LOCATION -33000.0, -1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_1
!
START_TITLE TITLE_2
TITLE_TEXT NAME100001
SEMI P10-0705 © SEMI 1990, 2005 177
TITLE_TYPE MASK
TITLE_JUSTIFICATION L
TITLE_LOCATION -22000.0, 1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_2
!(
MIRROR_MASK T
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTIVE_CHROME
UT1X_UNCUT T
TOP_PELLICLE_TYPE Pellicle Part Number
GUIDES_REQD STANDARD
!
START_DEFECT_DEFINITION UT1X_1
GOOD_FIELDS (1 AND 2)
END_DEFECT_DEFINITION UT1X_1
!
START_DEFECT_DEFINITION PREPELL_DIE2DIE_1
AUTO_INSPECTION_REQD T
DIE_TO_DIE_INSPECTION T
DEFECT_SIZE_CL 1.0
DEFECT_SIZE_DK 1.0
DEFECT_COUNT 0
END_DEFECT_DEFINITION PREPELL_DIE2DIE_1
!
QUALITY_GROUP_ID ABC123
PACKAGE Package Part Number
END_MASK 1000001
!------------------------------------------
!
! The TOP_CELL's role in the P10 Standard is to provide a means to list and locate all of the
! Patterns on the Mask. Within the TOP_CELL Cell ID section (below) both Patterns and other Cells
! can be listed. The value for the Top Cell is given by the PLACEMENT_TOP_CELL keyword in the
! MASK_GROUP section above.
!
! This example lays out each component of the Mask using the "CELL_INSTANCE" keyword.
! Each Ultratech Field is represented by a "FLD_x" designation for a Cell Instance, where "x" is
! the field number. The general idea is to designate a cell for each Field separately and to let
! the MASK_PATTERNS cell hold the remaining data. In this example the FLD_1 cell contains Field 1,
! the FLD_2 cell holds Field 2, and the MASK_PATTERNS cell holds Barcode, BOJ, EOJ, Fiducial,
! and Logo data. Other types of Patterns could also be included in the MASK_PATTERNS cell.
!
!
!----------CELLS--------------------------
SEMI P10-0705 © SEMI 1990, 2005 178
CELL_ID UT_1X_TOP_CELL !-- refers to PLACEMENT_TOP_CELL
END_CELL_OPTIONS UT_1X_TOP_CELL
!
CELL_INSTANCE FLD_1 !--Field 1 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_1
START_PLACEMENT F1
LOCATION -32000.0, 28000.0
END_PLACEMENT F1
END_CELL_INSTANCE FLD_1
!
CELL_INSTANCE FLD_2 !--Field 2 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_2
START_PLACEMENT F2
LOCATION 25500.0, 28500.0
END_PLACEMENT F2
END_CELL_INSTANCE FLD_2
!
CELL_INSTANCE MASK_PATTERNS !--Other data cell with TOP_CELL
END_CELL_INSTANCE_OPTIONS MASK_PATTERNS
END_CELL_INSTANCE MASK_PATTERNS
END_CELL UT_1X_TOP_CELL
!
!
! Each CELL_ID below lists the components in that cell, using the PATTERN_GROUP_INSTANCE keyword,
! along with placement data.
!
! Field 1
CELL_ID FLD_1 !--This refers to CELL_INSTANCE FLD_1
END_CELL_OPTIONS FLD_1
!
PATTERN_GROUP_INSTANCE FLD_1_PG
START_PLACEMENT FDPN1
LOCATION -20000.0, 20000.0
STEPPING_DISTANCE 10000.0, 0.0
STEPPING_COUNT 2, 1
END_PLACEMENT FDP_1
END_PATTERN_GROUP_INSTANCE FLD_1_PG
END_CELL FLD_1
!
! Field 2
CELL_ID FLD_2 !--This refers to CELL_INSTANCE FLD_2
END_CELL_OPTIONS FLD_2
!
PATTERN_GROUP_INSTANCE FLD_2_PG
START_PLACEMENT FDP_2
LOCATION 50000.0, 20000.0
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1