semi合集-English.pdf - 第596页
16 Illustrations Flow Flow Flow Flow 12 3 45 HBD VIU VFD HED VID VFU HUD HBD = Horizontal Base Down VIU = Vertical Inlet Up VFD = Veritical Flow Down HED = Horizontal Either side Down VID = Vertical Inlet Down VFU = Vert…
Table 2 Sample Attitude Test Data
MFC Mfg/Model/Serial # Acme/ XYZ-100/0001
Name Plate Gas/Range Nitrogen 100 sccm
Test Gas Nitrogen
Temp 20.2 C
Date 3/9/98
Factory Calibration Gas Nitrogen
Attitude Pressure
(kPa)
Indicated Flow
by DUT with
Zero Actual Flow
(% F.S.)
Zero Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
Actual Flow by Flow
Standard at 100%
DUT Setpoint
(% F.S.)
Span Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
1 135.8
0
0
100
0
2 135.8
0.1
-0.1
100.2
0.2
3 135.8
0
0
100
0
4 135.8
-0.1
0.1
99.8
-0.2
5 135.8
0
0
100
0
ZAS
max
=
0.2
SAS
max
=
0.4
1 308
0
0
100
0
2 308
0.15
-0.15
100.2
0.2
3 308
0
0
100
0
4 308
-0.15
0.15
99.8
-0.2
5 308
0
0
100
0
ZAS
max
=
0.3
SAS
max
=
0.4
NOTE 1: The values in bold italics are calculated values.
SEMI E80-0299 © SEMI 1999, 2004 5
16 Illustrations
Flow
Flow
Flow
Flow
12
3
45
HBD VIU
VFD
HED VID
VFU
HUD
HBD = Horizontal Base Down
VIU = Vertical Inlet Up
VFD = Veritical Flow Down
HED = Horizontal Either side Down
VID = Vertical Inlet Down
VFU = Vertical Flow Up
HUD = Horizontal Upside Down
*
For this test method the DUT
must be mounted ±1
O
in all
axes
*****
Figure 1
MFC Mounting Attitudes
SEMI E80-0299 © SEMI 1999, 2004 6
DUT
Flow
Standard
Flexible Gas Line
V1 V2R1 F1
P
P1
P
DUT
Flow
Standard
Regulator
Filter
Isolation Valve
Pressure Transducer
Device Under Test
Flow Standard
Figure 2
Test Setup
SEMI E80-0299 © SEMI 1999, 2004 7