semi合集-English.pdf - 第7691页

SEMI T7-0303 © SEMI 1997, 2003 4 Figure 4 Data Matrix Code Symbol Loca tion on Back Surface of Notched 300 mm Diameter Wafer NOTE 1: The peripheries ar e of wafers of nominal diameter with nominal notch dimensions. The d…

SEMI T7-0303 © SEMI 1997, 2003 3

32 cells per row

C1 C2

8 cells per

column

Nominal Dimensions (mm)

R1 = 3.875

C1 = 0.875

R2 = 4.000

C2 = 1.000

Figure 2

Data Matrix Field Dimensions

ECC200 - 8 rows × 32 columns

To Wafer Cente

Dimensions in millimeters are o

center to center of dots

Figure 3

Data Matrix Code Fields

ECC200 - 8 rows × 32 columns

SEMI T7-0303 © SEMI 1997, 2003 4

Figure 4

Data Matrix Code Symbol Location on Back Surface of Notched 300 mm Diameter Wafer

NOTE 1: The peripheries are of wafers of nominal diameter with nominal notch dimensions. The dots of the finder pattern are

shown for an 8 row x 32 column data matrix code symbol with 125 µ m spacing.

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require the use of copyrighted

material or of an invention covered by patent rights. RVSI Acuity CiMatrix has filed a statement with SEMI

asserting that the patented or copyrighted item can be used by the public for the purpose of implementing this

standard without specific license and without payment of royalty or other charge. Attention is also drawn to the

possibility that some elements of this standard may be subject to patented technology or copyrighted items other

than those identified above. Semiconductor Equipment and Materials International (SEMI) shall not be held

responsible for identifying any or all such patented technology or copyrighted items. By publication of this

standard, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection

with any item mentioned in this standard. Users of this standard are expressly advised that determination of any

such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI T8-0698

(Reapproved 1104)

SPECIFICATION FOR MARKING OF GLASS FLAT PANEL DISPLAY

SUBSTRATES WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL

This specification was technically reapproved by the Global Traceability Committee and is the direct

responsibility of the North American Traceability Committee. Current edition approved by the North

American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org

September 2004; to be published November 2004. Originally published June 1998.

1 Purpose

1.1 This specification is intended to provide a marking

symbology that can be used to mark glass flat panel

display (FPD) substrates within the fixed quality area of

the edge exclusion area of the substrate.

2 Scope

2.1 This specification defines the geometric and spatial

relationships and content (including the error checking

and correcting code) of rectangular two-dimensional (2-

D), machine-readable, binary Data Matrix symbology

for front-surface or back-surface marking of glass FPD

substrates (sometimes called “motherglass” substrates)

which comply with the edge specifications of SEMI

D12. It may be used in conjunction with the

alphanumeric marking codes specified in SEMI M12

and SEMI M13 or the bar code specified in SEMI T1.

2.2 Although this specification does not specify the

marking techniques that may be employed when

complying with its requirements, it is assumed that the

symbol will be obtained by laser scribing individual

dots. A survivability experiment executed by the United

States Display Consortium found such marks suitable.

NOTE 1: Other techniques could include resist exposure and

grit blasting.

2.3 Data Matrix symbology is applicable to a broad

range of FPD products including virgin substrates,

processed and patterned substrates, panel assemblies,

and displays. An application note describes the

application of Data Matrix symbology to individual

panel sections contained within a multi-panel

motherglass substrate. The format and algorithms of

this code are based on two-dimensional symbology

specified in AIM International Symbology

Specification - Data Matrix.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI D12 — Specification for Edge Condition of Flat

Panel Display (FPD) Substrates

SEMI M12 — Specification for Serial Alphanumeric

Marking of the Front Surface of Wafers

SEMI M13 — Specification for Alphanumeric Marking

of Silicon Wafers

SEMI T1 — Specification for Back Surface Bar Code

Marking of Silicon Wafers

3.2 AIM International Technical Specifications

AIM International Symbology Specification - Data

Matrix

3.3 ANSI Standard

ANSI MH10.8.2 — Data Application Identifier

Standard

3.4 Uniform Commercial Council Standard

Manufacturer Identification Codes

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 alignment bar, of a data matrix code symbol — a

solid line of contiguous filled cells abutting a line of

alternatively filled and empty cells (AIM International

Symbology Specification - Data Matrix).

1 AIM International, Inc., 634 Alpha Drive, Pittsburgh, PA 15238-

2802, tel 412.963.8588, fax 412.938.8753

2 American National Standards Institute, Headquarters: 1819 L

Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;

Fax: 202.293.9287, New York Office: 11 West 42nd Street, New

York, NY 10036, USA. Telephone: 212.642.4900; Fax:

212.398.0023, Website: www.ansi.org23

3 Uniform Code Council, 7887 Washington Village Drive, Suite 300

Dayton, OH 45459 Telephone: 937.435.3870, Fax: 937.435.7317,

Website: info@uc-council.org