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SEMI PR8-0703 © SEMI 2003 18 Example: Equipm ent Event <EdaData> <EquipmentID> <Supplier>Some Supp lier</Supplier> <Model>8400</Mo del> <ImmutableID >998948< ImmutableID > …

SEMI PR8-0703 © SEMI 2003 17

HTTP headers used for these messages are “urn:semi-org:ws:eda_ps_v0.0:EdaEnabled”, “urn:semi-

org:ws:eda_ps_v0.0:EdaDisabled”, and “urn:semi-org:ws:eda_ps_v0.0:EdaData”, respectively.

7.7.6.1 EdaEnabled — Whenever the equipment EDA port enters the EDAEnabled state, it shall send the

EdaEnabled message to each configured client. The equipment will not send any additional messages to a

configured client until it receives a successful response to the EdaEnabled message from that client. If the response

is not received the equipment will retry the EdaEnabled message a specific number of times and at a specific

interval. Both the number of retries and the retry interval shall be configurable at the equipment. If at the end of

this retry cycle the expected response to the EdaEnabled message has not been received from that client then the

equipment shall deactivate all of that client’s hibernating data collection plans and each of those DCPs shall enter

the Inactive state (see transition 7 in Figure 5). The equipment will activate those DCPs again only when a

subsequent ActivatePlan request is received from a configured client.

7.7.6.2 EdaDisabled — Whenever the equipment EDA port is entering the EDADisabled state, the equipment shall

send the EdaDisabled message to each configured client.

Table 19 EdaEnabled/Disabled Message

Behavior

Tag Name Description XML Datatype

EdaEnabled EdaDisabled

See columns 3 and 4

in this row for tag

names, shown in

quotes.

Operation Name

element

Complex Required-“EdaEnabled” Required- “EdaDisabled”

EquipmentID EquipmentID

element

Complex Required Required

7.7.7 Event Data — The Event data format is a simple, general-purpose event format intended for communicating

fundamental events from the SECS/GEM interface, and other similar data. The event may be used as a container for

parametric data that does not have a particular context within either an operational segment or an exception event.

Event data can be provided anywhere within the EdaData message structure following the EquipmentID element. It

can appear zero or more times, and can be interspersed with Exception data.

Table 20 Event Description

Tag Name Description XML Datatype Behavior

Event Operation Name Complex Required

EventTime Event time and date stamp. dateTime Required

Locator Unique identifier for the tool entity, or

namable, to which the event applies.

String Required

EventID Event identifier String Required

Context Complex element containing all context

Param elements.

Complex Optional- 0 or 1

Param Complex element that contains all fields

pertaining to a single context param.

Complex 1 Required (if Context element

included), Many Optional

Data Complex element containing all data

param elements.

Complex Required-Exactly 1

Param Complex element that contains all fields

pertaining to a single data param.

Complex 1 Required, Many Optional

Extension Element containing any additional

information provided by the supplier.

Any Optional

SEMI PR8-0703 © SEMI 2003 18

Example: Equipment Event

<Supplier>Some Supplier</Supplier>

</EquipmentID>

<Event>

<Locator>cluster.tool.module</Locator>

<Param>

<Name>PrJobID</Name>

<Value>

</Value>

</Param>

<Param>

<Name>ShotNum</Name>

<Value>

</Value>

</Param

</Context>

<Data>

<Param>

<Name>Temperature</Name>

<Value>

</Value>

</Param>

<Param>

<Name>Pressure</Name>

<Value>

</Value>

</Param>

</Data>

</Event>

</EdaData>

7.7.8 Locator — This attribute provides a unique identifier for a particular equipment component based on its

position in the tool hierarchy. Legal values for the locator attribute are derived by starting with the name of root

equipment component in the hierarchy followed by the ‘.’ character, followed by the names of any components

between the root and target component (each name separated by the ‘.’ character), followed by the name of the

target component. A shorthand notation for this pattern is: “root.node.node.node.target”.

SEMI PR8-0703 © SEMI 2003 19

7.7.9 Exception Event

7.7.9.1 Exception event is an event concerned with errors, faults, or other unexpected events detected by the

equipment. Exception data can be provided anywhere within the EdaData message structure following the

EquipmentID element. It can appear zero or more times, and can be interspersed with Event data.

Table 21 Exception Event Format Definition, valid between “Msg” tags

Tag Name Description XML Datatype Behavior

ExEvent Operation Name element Complex Required

ExTime Exception time and date stamp dateTime Required

Locator Unique identifier for the tool entity , or namable, to which the

event applies.

String Required

ErrorCode Unique code indicating the error type. May be the SECSGEM

ALID.

String Required

ExType Name of the event type. “Alarm” is reserved for E30 alarms. String Required

ExState “set” and “clear” are used for exceptionType “Alarm”.

Otherwise, use of this field is supplier-defined. If this field is not

applicable for the exceptionType, the contents shall be “none”.

String Required

ExDesc A text description of the exception. String Required

Severity The supplier-defined severity. String Supplier Optional

Data Complex element that contains all Param elements. Complex Optional

Extension Reserved for supplier extensions. Any Supplier Optional

Example: Exception Event with Attached Parametric Detail

<Supplier>Some Supplier</Supplier>

</EquipmentID>

<Locator>stepper.stage.optics </Locator>

<ExType>Alarm</Extype>

<ExDesc>Failed to see clearly</ExceptionDesc>

<Data>

<Param>

<Name>AlignLandingEnergy</Name>

<Value>

</Value>

</Param>

</Data>

</ExEvent>

</EdaData>

7.7.9.2 Representation of SEMI E30 Alarms — It is expected that the supplier will need to transmit exception event

messages corresponding to SEMI E30 alarms, and possibly other exceptions, through the EDA interface. Whenever

an exception event message corresponding to an E30 alarm is transmitted, the ErrorCode element shall contain the

value of the ALID data item, and the ExDesc element shall contain the value of the ALTX data item. If the E30

alarm message is triggered by the Alarm Detected event then the contents of the ExState element shall contain “set”,