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SEMI E118.1-1104 © SEMI 2003, 2004 2 7 Service Para m eter to Data Item Mapping 7.1 Table 2 s h ows the m apping between message paramete rs de fined by WIDR and data item s defined by SECS- II. For parameters specified …

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SEMI E118.1-1104 © SEMI 2003, 2004 1
SEMI E118.1-1104
SPECIFICATION FOR SECS-I AND SECS-II PROTOCOL FOR WAFER
ID READER COMMUNICATION INTERFACE STANDARDS
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the Japanese Information and Control Committee. Current edition approved by the
Japanese Regional Standards Committee on July 23, 2004. Initially available at www.semi.org September
2004; to be published November 2004. Originally published March 2003; last published March 2004.
1 Purpose
1.1 This document maps the services and data of the
Wafer ID Reader (WIDR) standard to SECS-II streams
and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of
WIDR that use the SECS-II message protocol (SEMI
E5).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 SECS — SEMI Equipment Communications
Standard
4.1.2 WIDR — Wafer ID Reader
5 Physical Requirements
5.1 The WIDR using the SECS-I protocol shall use a
9-pin female connector.
6 Service Message Mapping
6.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the service messages defined in
SEMI E118
.
6.2 Request and notification messages are mapped to
primary (odd-numbered) SECS-II functions and
response messages are mapped to secondary (even-
numbered) SECS-II functions.
6.3 In some cases, a common set of parameters allows
more than one service to be mapped to the same stream
and function, with an additional SECS-II data item used
to differentiate between the two services.
Table 1 Services Mapped to SECS-II Messages
Message Name Stream,Function SECS-II Name
ChangeState S18,F13/F14 Subsystem Command Request/Acknowlege
Get Attributes S18,F1/F2 Read Attribute Request/Data
Get Status S18,F13/F14 Subsystem Command Request/Acknowledge
Perform Diagnostics S18,F13/F14 Subsystem Command Request/Acknowledge
Read WID S18,F9/F10 Read ID Request/Data
Reset S18,F13/F14 Subsystem Command Request/Acknowledge
Set Attributes S18,F3/F4 Write Attribute Request/Acknowledge
Read WIDC S18,F15/F16 Read 2D Code Condition Request/Data
SEMI E118.1-1104 © SEMI 2003, 2004 2
7 Service Parameter to Data Item Mapping
7.1 Table 2 shows the mapping between message parameters defined by WIDR and data items defined by SECS-II.
For parameters specified in the definitions of a WIDR service, either the parameters themselves, or individual
elements of complex parameters, map to a specific data item.
Table 2 Service Parameters to Data Item Mapping
Parameter Name SECS-II Data Item Format Values
Attribute ID ATTRID 20 Name of attribute
Attribute Value ATTRVAL 20
HeadID TARGETID 20 “00”-“31”
Identifies either an individual head (“01”-
“31”) or the WIDR subsystem itself (“00”).
PM Information STATUS 20 “NE” = Normal execution, “MR” =
Maintenance required
Result Status SSACK 20 “NO” = Normal operation;
“EE” = Execution error;
“CE” = Communication error;
“HE” = Hardware error
StateRequest CPVAL 20 “OP”, “MT”
Status STATUSLIST L,4
1. <PMInformation>
2. <AlarmStatus>
3. <OperationalStatus>
4. <HeadStatus>
Current values of PM Information with the
corresponding attributes for WIDR and Head
(if applicable). See Tables 4 and 5.
Wafer ID MID 20
2D Code Read Condition CONDITIONLIST L,7
1. <Cell Size>
2. <Contrast>
3. <Damage Percent>
4. <Number Error Bits>
5. <Read Time>
6. <Matrix Style>
7. <Matrix Polarity>
Current values of Cell Size, Contrast,
Damage Percent, Number Error Bits, Read
Time, Matrix Style, Matrix Polarity with the
corresponding attributes for Code Condition.
See Table 6.
CONDITIONLIST data shall be formatted in
the fixed order as in Format column.
NOTE 1: There are also data items used in SECS-II messages that do not map to specific services parameters. Services with the same set of
parameters are mapped to the same SECS-II message by adding an additional data item to differentiate between the services. Table 3 contains the
SECS-II data items that have not a corresponding WIDR service parameter.
Table 3 Additional Data Requirements Table
SECS-II Data Item Function Value
SSCMD Used to differentiate between different subsystem commands
indicated.
“ChangeState”
“GetStatus”
“Perform Diagnostics”
“Reset”
SEMI E118.1-1104 © SEMI 2003, 2004 3
8 Data
8.1 WIDR Attributes
8.1.1 Table 4 specifies the values for the WIDR attribute identifiers and limitations on values.
Table 4 WIDR Attribute Definitions
Attribute Name Description Access Format Value
Fundamental
“Configuration” Number of heads. RO 20
“01”“31”
“AlarmStatus” Current WIDR substate of ALARM STATUS. RO 20 “0” = NO ALARMS
“1” = ALARMS
“OperationalStatus” Current WIDR substate of OPERATIONAL. RO 20 “IDLE”, “BUSY”,
“MANT”
“SoftwareRevisionLevel” Revision (version) of software. RO 20 8 byte maximum
Optional
“DateInstalled” Date the subsystem was installed. RO 20 “YYYYMMDD” format
“DeviceType” Identifies subsystem as a Wafer ID Reader. RO 20 “WIDR”
“HardwareRevisionLevel” Revision number of the hardware. RO 20 8 byte maximum
“MaintenanceData” Supplier dependent. RO 20 80 byte maximum
“Manufacturer” The name or identifier of the manufacturer. RO 20 20 byte maximum
“ModelNumber” The manufacturers model designation. RO 20 20 byte maximum
“SerialNumber” Subsystem serial number assigned by
manufacturer.
RO 20 20 byte maximum
8.2 Read Head Attributes
8.2.1 Table 5 shows the format and values for the Read Head.
Table 5 Read Head Attribute Definitions
Attribute Name Description Access Format Value
Fundamental
“HeadStatus” The current state. RO 20 “IDLE”,
“BUSY”,
“NOOP”
“HeadID” Head number 0–31. RO 20 2 digits, “00” through “31”.
Optional
“HeadCondition” The current Maintenance
status.
RO 20 Enumerated:
“NO” = No alarms
“NM” = Needs maintenance
“NP” = No power
“RW” = Read fault
“HeadDateInstalled” Date this head was installed. RO 20 “YYYYMMDD” format
“HeadMaintenanceData” Supplier dependent. RO 20 Text