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SEMI E62-0705 © SEMI 1997, 2005 2 4.1.3 carrier capacity — the number of substrates t hat a ca rrier holds (as defi ned in SEM I E1.9). 4.1.4 cassette — an open structure that holds o ne or more subst rates. 4.1.5 door s…

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SEMI E62-0705 © SEMI 1997, 2005 1
SEMI E62-0705
PROVISIONAL SPECIFICATION FOR 300 mm FRONT-OPENING
INTERFACE MECHANICAL STANDARD (FIMS)
This provisional specification was technically approved by the global Physical Interfaces & Carriers
Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on
April 7, 2005. It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally
published in 1997; previously published March 2003.
1 Purpose
1.1 This standard specifies the tool side of the interface between a process or metrology tool and a front-opening
box used to transport and store 300 mm wafers (which may or may not be in removable cassettes) in an IC factory.
2 Scope
2.1 This standard is intended to set an appropriate level of specification that places minimal limits on innovation
while ensuring modularity and interchange-ability at all mechanical interfaces. Only the physical interface is
specified; no materials requirements or micro-contamination limits are given. The interface specified in this standard
can be for a sealed mini-environment, but it could also just be a well-defined automation interface.
2.2 This standard is provisional because the front-opening interface is a new technology. Once interface testing is
done, this standard should be modified and upgraded from provisional status.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm
Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer
Carriers
3.2 ISO Standard
1
ISO 4287 — Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions
and surface texture parameters
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 bilateral datum plane — a vertical plane that bisects the wafers and that is perpendicular to both the
horizontal and facial datum planes (as defined in SEMI E57).
4.1.2 box — a protective portable container for a cassette and/or substrate(s).
1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30 Website: www.iso.ch
SEMI E62-0705 © SEMI 1997, 2005 2
4.1.3 carrier capacity — the number of substrates that a carrier holds (as defined in SEMI E1.9).
4.1.4 cassette — an open structure that holds one or more substrates.
4.1.5 door seal zone — a surface on the exterior side of the port door for sealing to the box door.
4.1.6 facial datum plane — a vertical plane that bisects the wafers and that is parallel to the front side of the carrier
(where wafers are removed or inserted). On tool load ports, it is also parallel to the load face plane specified in
SEMI E15 on the side of the tool where the carrier is loaded and unloaded (as defined in SEMI E57).
4.1.7 frame seal zone — a surface on the exterior side of the frame of the port door for sealing to the frame of the
box door.
4.1.8 horizontal datum plane — a horizontal plane from which projects the kinematic-coupling pins on which the
carrier sits. On tool load ports, it is at the load height specified in SEMI E15 and might not be physically realized as
a surface (as defined in SEMI E57).
4.1.9 load face plane — the furthest physical vertical boundary plane from the cassette centroid or carrier centroid
on the side (or sides) of the tool where loading of the tool is intended (as defined in SEMI E15).
4.1.10 minienvironment — a localized environment created by an enclosure to isolate the product from
contamination and people.
4.1.11 pod — a box having a Standard Mechanical Interface (SMIF) per SEMI E19.
4.1.12 wafer carrier — any cassette, box, pod, or boat that contains wafers (as defined in SEMI E15).
5 Requirements
5.1 Datum Planes — The physical alignment mechanism from the box to the tool load port consists of features (not
specified in this standard) on the box that mate with three or six pins underneath as defined in SEMI E57. Most of
the dimensions of the interface from the box to the tool load port are determined with respect to the three orthogonal
datum planes defined in that standard: the horizontal datum plane, the facial datum plane, and the bilateral datum
plane. However, the dimensions in this standard do not apply when the box is placed on the load port, but rather
when the box has been moved horizontally into place against the front-opening interface. Otherwise, the front-
opening interface would interfere with the kinematic coupling during loading, and the minimum rear clearance in
E15 would be violated.
5.2 Symmetry — All of the dimensions for the interface are bilaterally symmetric about the bilateral datum plane
and about a plane z30 above the horizontal datum plane with the following exceptions (as viewed by a person
standing in front of the tool and facing the interface):
The registration pins are in the lower right and upper left quadrants of the port door.
Both latch keys turn 90° counter-clockwise from vertical to unlatch the box door from the box.
5.3
Door Alignment Maintenance Mechanism — The two registration pins that are used to limit the maximum
displacement of the box door while on the port door are shown in Figures 1 and 2 and specified in Table 1. The
over-all surface finish of the registration pins must have a final roughness height less than or equal to r47. The
registration pins are surrounded by reserved space for optional vacuum application.
5.4 Locking Mechanism — The box door is locked and unlocked by a set of two 13.5 mm by 5 mm heads on shafts
that have a 5 mm diameter. These latch keys must unlatch the box door from the box by rotating counter-clockwise
to horizontal and must latch the box door to the box by rotating clockwise to vertical (as viewed by a person
standing in front of the tool facing the interface). The latch keys must not rotate beyond these limits of the rotation
angle . To allow seal compression by latches, the torque delivered by the port to turn the latch keys must be at least
f30. Thus, it is recommended that no box door be designed that needs more torque than this. Figure 3 shows front,
side and top views of the latch keys. In addition, convex features on the outer edges of the latch keys (adjacent to the
surface defined by y36) must have a blend radius of r41 to prevent small contact patches with large stresses that
might cause wear and particles. Other convex features on the latch keys need only be de-burred and rounded off.
The over-all surface finish of the latch keys must have a final roughness height less than or equal to r47.
SEMI E62-0705 © SEMI 1997, 2005 3
5.5 Seal Zones — On the exterior side of the port must be two areas for sealing to the box. The door seal zone must
be just inside the rim of the port door in the area between x32 and x33 from the facial datum plane and between z32
and z33 from the vertical center line of the port (which is z30 above the facial datum plane). Similarly, the frame
seal zone must be on the frame of the port door in the area between x34 and x35 from the facial datum plane and
between z34 and z35 from the vertical center line of the port. The door and its frame must be designed to mate with
a front-opening box that conforms to SEMI E47.1. Specifically, the port door and its frame must have surfaces that
mate with the seal zones and the reserved spaces for vacuum application (which includes all of the circles bounded
by r38 except for the holes for the registration pins at the center of each circle). It is recommended that a gap be
maintained between mating surfaces on the box and load port (unless the minienvironment is purged with an inert
gas, in which case a tight seal is recommended).
5.6 Inner and Outer Radii — All required concave features may have a radius of up to r45 to allow cleaning and to
prevent contaminant build-up. All required convex features may also have a radius of up to r46 to prevent small
contact patches with large stresses that might cause wear and particles. Note that these limits on the radius of all
required features are specified as a maximum (not a minimum) to ensure that the required features are not rounded
off too much. The lower bound on the radius is up to the interface supplier. Note also that this radius applies to
every required feature unless another radius is called out specifically.
5.7 Force Between Box and Port — The force with which the load port holds the box in place against the FIMS
interface must be greater than the force with which the load port presses the box door into the box.
5.8 Force Between Box Door and Box — The load port must press the box door into the box with a force of f34.
5.9 Door Return Repeatability — The load port must return the port door to the closed position after opening with a
repeatability given by the dimensions x37 and z37.
5.10 Force Applied by Latch Keys — If the load port uses retracting latch keys, once the latch keys have been
turned to the position that unlocks the box door from the box ( = 0 ± 1°), the force (in a direction perpendicular to
the facial datum plane) applied by each latch key to the FOUP door must be no greater than f35.
5.11 Door Accommodation — The load port must mate completely with the box at the FIMS interface. One method
to accomplish this is to have the load port door protrude sufficiently (with some cushioning ability) to meet the
FOUP door (however far the FOUP door protrudes within what SEMI E47.1 allows). The load port door (at least on
the seal zone plate) must also accommodate variations in angle (with respect to the Facial Datum Plane) of the
FOUP door (however much the FOUP door varies in angle within what SEMI E47.1 allows).
6 Related Documents
6.1 SEMI Standards
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI M31 — Provisional Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship
300 mm Wafers