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Table 1 Matrix Code Symbol Dimensions Square Arrays for Use on 125 to 200 mm Wafers C 1 , R 1 (µ m) #1 C 2 , R 2 (µ m) #1 # of cells in row or column 16 18 20 16 18 20 125 µ m spacing 1875 2125 2375 2000 2250 2500 150 µ …

4 Terminology

4.1 Definitions

4.1.1 binary values — a dot in the wafer surface

indicates the binary value 1. The absence of a dot, or a

smooth surface surrounding a cell center point,

indicates the binary value 0.

4.1.2 border column — the outermost column of a data

matrix code symbol.

4.1.3 border row — the outermost row of a data matrix

code symbol.

4.1.4 cell center point, of an array — the point at

which the centerline of a row intersects the centerline of

a column.

4.1.5 cell spacing, of an array — the (equal) vertical or

horizontal distance between the cell center points of

contiguous cells.

4.1.6 cell, of a data matrix code symbol — the area

within which a dot may be placed to indicate a binary

value.

4.1.7 center line, of a row or column — the line

positioned parallel to, and spaced equally between, the

boundary lines of the row or column.

4.1.8 central area, of a cell — the area enclosed by a

circle centered at the cell center point; used by code

readers to sense the binary value of the cell.

4.1.9 data matrix code symbol — a two-dimensional

array of square cells arranged in contiguous rows and

columns.

4.1.10 dot — a localized region with a reflectance

which differs from that of the surrounding surface.

NOTE 2: To assure reading efficiency, a minimum contrast

of 30% is required between the reflectance value of a dot and

the surrounding wafer surface. Various densitometers can

provide such measurements nondestructively.

4.1.11 dot misalignment, within a cell — the distance

between the physical center point of a dot and the cell

center point.

4.1.12 reference point, of a data matrix code symbol —

the physical center point of a corner cell common to a

border row and border column, used to identify the

physical location of the symbol on the object being

marked with the symbol.

NOTE 3: The reference point is at a fixed location on the

object. Different cells may be chosen as the reference point,

depending on the desired orientation of the symbol on the

object and the size variability of the symbol. The particular

cell to be used as the reference point must be specified for

each application.

5 Ordering Information

5.1 Purchase orders for wafers furnished to this

specification shall include the following items:

5.1.1 Message Characters

5.1.1.1 Quantity (10 to nn, where nn is 11–31 and de-

pends on the character set to be encoded (see Table 1).

5.1.1.2 Content of Message Characters 11 and up, if

present.

5.1.2 Cell Spacing (125 or 150 µm).

6 Requirements

6.1 Shape and Size of the Matrix Code Symbol

6.1.1 Each square matrix code symbol shall be

composed of an equal even number (from 16 to 20) of

rows and columns of equally spaced square cells. Cell

spacing shall be either 125 or 150 µm (see Table 2, and

Figures 1 and 2).

6.1.2 Dot Size — The nominal shape of the dot

produced in the matrix may be circular or square. Its

dia-meter or edge length (after polishing) shall be 100 ±

10 µm.

6.2 Border Rows and Columns (see Figure 3)

6.2.1 One border row and one border column shall

contain a dot in each cell. These are identified as the

primary border row and the primary border column.

These are used by the code reader to determine the

reference point and orientation of the matrix.

6.2.2 The opposing (secondary) border row and

column shall contain dots in alternating cells.

6.2.3 The reference point of the symbol shall be the

physical centerpoint of the cell common to the primary

border row and the secondary border column.

6.2.4 The maximum dot misalignment within a cell is

20 µm. This ensures that a minimum size dot covers a

cell central area of radius 25 µm (see Figure 4).

Table 1 Matrix Code Symbol Dimensions

Square Arrays for Use on 125 to 200 mm Wafers C

, R

(µm)

, R

(µm)

# of cells in row or column 16 18 20 16 18 20

125 µm spacing 1875 2125 2375 2000 2250 2500

150 µm 2250 2550 2850 2400 2700 3000

#1: See Figure 1 for pictorial representation of Dimensions C

, C

, R

, and R

Table 2 Message Character Count in Square Arrays for Use on 125 to 200 mm Wafers

# of Cells in a Row or Column 16 18 20

8-bit 10 16 20 Maximum # of Message Characters

Mostly upper-case 16 25 31

Figure 1

Data Matrix Field Dimensions

Cell

Cell Center

Row

Column

S = 125 or 150 um, center to center

Figure 2

Data Matrix Cell Spacing

Figure 3

Border Rows and Columns: ECC200