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SEMI D36-1103 © SEMI 2003 3 5.3.9 correlated color tempera ture (CCT) — A term used to descri be the color of a light source whose chromaticity lies clo se to the Planckian (black body) locus on a CIE chromaticity chart.…

SEMI D36-1103 © SEMI 2003 2

5.2.2 reflection sheet — the sheet that reflects the light

to prevent the loss of the light toward back side of the

BLU.

5.2.3 light guide plate — the plate, one of important

components of the BLU, that changes the path of the

light from line light source to face light source.

5.2.4 diffusion sheet — the sheet that diffuses the light

to the previous surface.

5.2.5 prism sheet — the film to enhance the brightness.

5.2.6 protection sheet — a kind of sheet placed on the

top of BLU for protecting other components from

damage outside.

5.2.7 frame — the frame to make the components of

the BLU stably combined.

5.2.8 electrode — the conductor, an electron source

inside the lamp, which releases the electron by the

electric current or flows the discharge current.

5.2.9 hot (electrode) — the electrode part receiving

current from the inverter, namely anode.

5.2.10 ground (electrode) — the opposite part against

the hot electrode of the lamp, namely cathode.

5.2.11 inverter — the device that transfers the voltage

of the power supply from low voltage DC to high

voltage AC to start the cold cathode fluorescence lamp.

5.2.12 lamp — the light source device mainly using the

cold cathode fluorescence lamp that lights the BLU.

5.2.13 lamp assembly — the total light source devices

to light lamp.

5.2.14 lamp cover — the part protecting the lamp

makes the light released from the luminance factor

incident over the light guide plate.

5.2.15 lamp holder — the part that protects the lamp

form external collision or contact.

5.2.16 lamp ring — the part that protects lamp from the

fragility.

5.2.17 mercury — as an ultraviolet light source,

elemental name in the periodic table is Hg.

5.2.18 mixing gas — the gas needed to open the

discharge consists of Neon and Argon gas etc

maintaining the discharge.

5.2.19 phosphor — the phosphor with commonly red,

blue and green color that transfers the ultraviolet came

from the mercury to the visible ray.

5.2.20 shrinkage tube — the part made of insulation

material to protect the wire.

5.2.21 adhesive tape — the tape to be used for adhering

the components of the BLU to each other.

5.2.22 back cover — the device that complements

fragile part of the lamp, etc. by means of utensil.

5.2.23 clip — the part fixing the sheet on the frame to

prevent flux and looseness of sheet.

5.3 Characteristics

5.3.1 luminance — the luminance flux from the surface

per unit solid angle per unit area in a given direction.

Unit: nit and/or cd/m

5.3.2 average luminance — average value of measured

luminance.

5.3.3 maximum luminance — maximum value among

the measured luminance.

5.3.4 minimum luminance – minimum value among the

measured luminance.

5.3.5 luminance uniformity — The value that indicates

the uniformity of luminance for the measured point.

And the value is obtained by selecting one or multiple

among below equations.

a) (maximum/minimum) × 100

b) (minimum/maximum) × 100

c) [(maximum-minimum)/Maximum] × 100

d) [(maximum-minimum)/Average] × 100

where average = Σ(i!n)/N

5.3.6 center point — The position corresponding to the

center of active area of BLU.

5.3.7 chromaticity — The indication of the suitable

color for the mark of same color, namely the spectro-

distribution-chart (λ) of the measured light source. The

light source color is indicated by the 3 measured

stimulus factors X, Y, Z (the quality of stimulus

evoking the primary color sense) at the sensitivity of

eye (2° ).

Tri

stimulus factors: X, Y, Z

x = X/(X + Y + Z),

y = Y/(X + Y + Z),

z = Z/(X + Y + Z),

x + y + z = 1

(Referred by CIE 1931 color space)

5.3.8 life time — The shorter period of the time during

no re-lit the lamp when lighting the lamp and during the

flux of light’s reaching the minimum value of

regulations.

SEMI D36-1103 © SEMI 2003 3

5.3.9 correlated color temperature (CCT) — A term

used to describe the color of a light source whose

chromaticity lies close to the Planckian (black body)

locus on a CIE chromaticity chart. Specially, it is the

temperature of a black body radiator which produces

the chromaticity most similar to that of the light source

evaluated. It is usually expressed in degrees Kelvin.

5.3.10 surface temperature — The surface temperature

of the lamp and BLU.

Unit: ° C

5.3.11 turn-on test — The test for checking turn-on &

off of the BLU.

5.3.12 appearance test — The test for appearance

inspection of the BLU.

5.3.13 reliability test — The test for checking the

changes of the display quality and part size during

lighting of the BLU at the measurement condition (ex:

temperature 60° C, humidity 75%, aging time 96hr,

250hr, 500hr).

5.3.14 efficiency — The ratio

of total light fluxes

generated by the lamp and consumed electric power at

input part of the lamp.

Unit: lm / W (lumen/Watt)

5.4 Equipment

5.4.1 photometer — The equipment that measures the

luminance of the object at the point of the perpendicular

angle view for the surface of BLU.

5.4.2 colorimeter — The equipment that measures the

color of the object at the point of the perpendicular

angle view for the surface of BLU.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

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consent of SEMI.

SEMI D37-0304 © SEMI 2004 1

SEMI D37-0304

SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES

This specification was technically approved by the Global Flat Panel Display – Materials & Components

Committee and is the direct responsibility of the Japanese Flat Panel Display – Materials & Components

Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004.

Initially available at www.semi.org February 2004; to be published March 2004.

1 Purpose

1.1 This specification defines standard outer and inner

dimensions, stand off, minimum transmittance, and

strength of pellicle film used for masks.

2 Scope

2.1 These dimensions apply to pellicle for masks that

are principally used in fabricating liquid crystal

displays. The mask size specifies range from 330 × 450

mm to 520 × 800 mm.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI D6 — Specification for Edge Length and

Thickness for Liquid Crystal Display (LCD) Mask

Substrates

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 stand off — a certain distance on a mask or

reticle to a membrane.

5 Ordering Information

5.1 Ordering information shall be discussed between

suppliers and users.

6 Requirements

6.1 Pellicle Size — Pellicle Size shall be defined as

shown in Table 1.

6.2 Minimum Transmittance — Average transmittance

shall be 94.5% or more within the range of wave length

of 360–440 nm.

6.3 Measurement Condition for Pellicle Film Strength

6.3.1 Not to be broken by air blow

6.3.2 Air nozzle diameter: 1 mm

6.3.3 Air pressure: 3 kg/cm

6.3.4 Distance from air nozzle to film: 5 cm

6.3.5 Air blow time: 5 sec.

Table 1 Pellicle Size (mm)

Mask Size Outer Diameter Inner Diameter Stand O

330 × 450 294 427 283 416 5.9

348 582 334 568 5.9

390 × 610

353 592 340 580 5.9

520 × 610 474 592 460 578 5.9

500 × 750 436 732 418 724 7.0

520 × 800 474 782 456 768 5.9