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SEMI E125-0305 © SEMI 2003, 2005 37 11 Requirements for Compliance 11.1 Compliance to Equipment Self-Description 11.2 Table 55 provides a checklist for Equipment Self Description compliance. Table 65 Equipment Self-Descr…
SEMI E125-0305 © SEMI 2003, 2005 36
standardVersion
objType
SEMIObjType
1
attributes2..*
Parameter
1
stateMachine
0..1
StateMachineInstance
1
eventData 0..*
Figure 21
Describing Implemented SEMI ObjTypes
10.9.1.1 SEMIObjType — This class describes the attributes and events for a SEMI ObjType that has been
implemented by the equipment. If it is a SEMI standard ObjType then it is identified by the name of the SEMI
standard within which it was defined, and the name of the ObjType specified in that standard. Each ObjType
includes at least two attributes, corresponding to its type name and its instance id (see SEMI E39).
10.9.1.2 SEMIObjType Attribute Definition Table
Table 63 SEMIObjType Attribute Definition
Attribute Name Definition Required Form
standardVersion The complete SEMI standard version number for
the document where the ObjType is defined, if
applicable.
Y Text, using the SEMI standard form for
representing a specific version of a
standard document (for example, “E87-
1101”), no spaces, upper-case
alphanumeric characters and hyphens
only. If not a SEMI standard ObjType,
then this attribute shall be empty.
objType The name of the SEMI objType. Y Text. Named using identical spelling and
case as the documented objType in the
corresponding standard.
10.9.1.3 SEMIObjType Association Definition Table
Table 64 SEMIObjType Association Definition
Association Role Name Definition Comments
attributes Attributes defined for this ObjType. Unordered list of elements of type Parameter, described in
Section 10.4 . Each Parameter shall be typed and named
according to Sections 10.5.4 and 10.4.10 . All attributes
b
elonging to an ObjType are maintained independently in each
ObjType instance.
eventData Parameters that are not formal
attributes that this ObjType provides
with generated events.
List of zero or more elements of type Parameter, described in
Section 10.4 .
stateMachine The state machine (if any)
supported by this ObjType.
Zero or one element of type StateMachineInstance, described
in Section 10.8.6 .
SEMI E125-0305 © SEMI 2003, 2005 37
11 Requirements for Compliance
11.1 Compliance to Equipment Self-Description
11.2 Table 55 provides a checklist for Equipment Self Description compliance.
Table 65 Equipment Self-Description Compliance Statement
Fundamental Requirements Section Implemented using
SEMI technology
mapping
Implementation complies
with ESD specification
and technology mapping
ESD data associated with all
information sources and items
accessible via data
acquisition are described
Metadata Access 9.1
Yes No Yes No
N/A
Management of Equipment Metadata 10.1
Yes No Yes No
N/A
Equipment Physical Structure 10.2
Yes No Yes No Yes No
Equipment Node Description 10.3
Yes No Yes No Yes No
Parameters 10.4
Yes No Yes No Yes No
Types 10.5
Yes No Yes No Yes No
Units 10.6
Yes No Yes No Yes No
Exceptions 10.7
Yes No Yes No Yes No
State Machines 10.8
Yes No Yes No Yes No
ObjTypes 10.9
Yes No Yes No Yes No
SEMI E125-0305 © SEMI 2003, 2005 38
RELATED INFORMATION 1
TYPICAL USE CASES
NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Example Use Cases
R1-1.1 Figure R1-1 shows an example of some typical use cases that this specification supports. The actors shown
represent some of the possible applications that could make use of the information provided by this specification,
and are only examples. In an actual factory, other applications/actors not shown here may make use of equipment
metadata. The system boundary in this diagram represents all entities that comprise or represent a single equipment
installation.
R1-2 Example Actors
R1-2.1 EquipmentDiagnosticsClient — This actor represents an application that helps factory or supplier personnel
troubleshoot mechanical, electrical, chemical, or other problems identified with the equipment.
R1-2.2 UtilizationTrackingClient — This actor represents an application that collects performance information
from the equipment to calculate relevant utilization metrics.
R1-2.3 ProcessControlClient — This actor represents an application that orchestrates material processing,
measurement, or testing performed by the equipment.
Figure R1-1
Typical Equipment Metadata Use Cases