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SEMI E107-1102 © SEMI 2001, 2002 5 8.1.6 Map Dat a Format of YMS Link — T his section is reserve d for data f ormat of above item s . 0 1 2 3 4 5 11 10 9 8 7 6 5 4 3 2 1 0 Die Address X (The case of BottomLeft) (3,10) (4…

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SEMI E107-1102 © SEMI 2001, 2002 4
Item Name Data Type Size Description
YSize Float 14 Y-direction size of fail bit data’s error range. Unit ‘um’.
Area Float 14 Area of fail bit data’s error range. Unit ‘um’.
DefectCate String 16 Category name of fail bit data.
XMinPhysic Integer 10 X minimum cell physical address of fail bit data’s error range.
XMaxPhysic Integer 10 X maximum cell physical address of fail bit data’s error range.
YMinPhysic Integer 10 Y minimum cell physical address of fail bit data’s error range.
YMaxPhysic Integer 10 Y maximum cell physical address of fail bit data’s error range.
IoNumber Integer 10 Cell logical IO number of fail bit data’s error range.
XMinLogic Integer 10 X minimum cell logical address of fail bit data’s error range.
XMaxLogic Integer 10 X maximum cell logical address of fail bit data’s error range.
YMinLogic Integer 10 Y minimum cell logical address of fail bit data’s error range.
YMaxLogic Integer 10 Y maximum cell logical address of fail bit data’s error range.
Table 4 Data Items for AnalogDataTemplate
Item Name Data Type Size Description
XAddress Integer 5 X address of die with analog data.
YAddress Integer 5 Y address of die with analog data.
TestNumber Integer 7 Test number corresponding to analog data.
Note String 256 Note
Measure Float 14 Analog data measured value.
MeasureUnit String 4 Unit of above. See Tables 5 and 6.
Std Float 14 Standard deviation, etc., for measuring analog data.
Parameter Float 14 Analog data measurement parameter value.
ParameterUnit String 4 Unit of above. See Tables 5 and 6.
UpperLimitData Float 14 Upper limit of first type of parameter for judging analog data.
LowerLimitData Float 14 Lower limit of first type of parameter for judging analog data.
TestResult String 256 Analog data PASS/FAIL or decision result such as category type number, etc.
Table 5 Unit Table
Unit Code Description
s Seconds
Hz Hertz
A Amperes
V Volts
Ohm Ohms
W Watts
F Farad
H Henry
% Percent
dB Decibel
lsb Least Significant Bit
rad Radian
deg Degree
Table 6 Prefix Symbol Table
Prefix Symbol Multiplicative
T 10
12
G 10
9
M 10
6
k 10
3
m 10
-3
u (micro) 10
-6
n 10
-9
p 10
-12
Example:
[MeasureUnit] = ‘V’ or ‘mV’
[ParameterUnit] = ‘A’ or ‘uA’
The units above are a subset of those in Section 9
(“Units of Measure”) of SEMI E5 (SECS-II).
SEMI E107-1102 © SEMI 2001, 2002 5
8.1.6 Map Data Format of YMS Link — This section is reserved for data format of above items.
0 1 2 3 4 5
11
10
9
8
7
6
5
4
3
2
1
0
Die Address X
(The case of BottomLeft)
(3,10)
(4,10)
(2,10)
(4,11)
(3,11)
(4,1)
(3,1)
(2,2)
(5,10)
(0,0)
Wafer Center Position
Reference Die
Reference Die Center
Offset in µ m of the center of a
reference die from the center of
substrate,
RefDiePosX, RefDiePosY
Die with address X,Y on Wafer
DieSizeY
DieSizeX
The case when WaferOrientation is 180
Die Address Y
Wafer Size
Figure 1
Wafer Coordinates
(The case of BottomLeftXY)
Fail Bit Data Location X
(µ m)
Fail Bit Data Location Y
(µ m)
0
Die Origin Position
line-fail
b
it-fail
block-fail
(XCenter,YCenter)
YSize
XSize
die
(XMin,YMin)
(XMax,YMin)
(XMin,YMax) (XMax,YMax)
Figure 2
Die Coordinates
SEMI E107-1102 © SEMI 2001, 2002 6
Table 7 Die Coordinates
Coordinate Information Meaning Coordinate Information Meaning
TopLeftXY
0 x
y
TopRightXY
x 0
y
BottomLeftXY
y
0 x
BottomRightXY
y
x 0
TopLeftYX
0 y
x
TopRightYX
y 0
x
BottomLeftYX
x
0 y
BottomRightYX
x
y 0
9 Map Data Format for YMS Link Data
9.1 Because this standard defines extensional data for YMS Link Data map for generic test data map standardized
by SEMI G81 and G85, data format of each item for YMS Link Data is defined independently as extra definition
here.
9.2 It is very appropriate for this document to define such format with XML Schema, for SEMI G85 defines the
generic test data map in XML. List 1 below defines YMS Link Data map format.
List 1. YMS Link Data Map Format
<xsd:schema xmlns:xsd=" http://www.w3.org/2001/XMLSchema"
xmlns:mdf=" http://www.semi.org/ATE" targetNamespace=" http://www.semi.org/YMSLDF" >
<xsd:import namespace=" http://www.semi.org/ATE" />
<! -- Commonized Part may be imported from schemaLocation " somehere/mdfSchema.xsd" -->
<xsd:complexType name=" ymsldfMap" >
<xsd:extension base=" Map" >
<xsd:all>
<xsd:element name=" Comment" type=" string256Type" use=" optional" />
<xsd:element name=" TestProgramName" type=" string256Type" use=" optional" />
<xsd:element name=" TestEquipmentId" type=" string256Type" use=" optional" />
<xsd:element name=" DieCoordinate" type=" dieCoordinateType" use=" optional" />
<xsd:element name=" ErrorClassList" type=" errorClassListType" use=" optional" />
<xsd:element name=" FailBitDataTemplate" type=" failBitDataTemplateType" use=" optional" />
<xsd:element name=" FailBitData" type=" failBitDataType" use=" optional" />
<xsd:element name=" AnalogDataTemplate" type=" analogDataTemplateType" use=" optional" />
<xsd:element name=" Invalid" type=" string14Type" use=" optional" />
<xsd:element name=" AnalogData" type=" failBitDataType" use=" optional" />
<xsd:element name=" ErrorTotal" type=" unsignedInt10Type" use=" optional" />
<xsd:element name=" TestDie" type=" unsignedInt10" use=" optional" />
</xsd:all>
</xsd:extension>
</xsd:complexType>
<! -- EnumSchemas -->
<xsd:simpleType name=" dieCoordinateType" >
<xsd:restriction base=" xsd:string" >