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SEMI E109.1-0704 © SEMI 2002, 2004 9 Table 6 Reticle Pod Obj ect Attribute Definitions Attribute Name Attribute Da ta Form: SECS-II Structure “ObjType 1. “ReticlePod” “ObjID” 1. <PODID> (Conforms to the restricti o…

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SEMI E109.1-0704 © SEMI 2002, 2004 8
Variable Name Class Format
LocationID DVVAL 20 (A[1–64])
LocationID
i
SV 20 (A[1–64])
PartitionCapacity DVVAL 51 (U1)
PartitionCapacity
i
SV 51 (U1)
PartitionID DVVAL 20 (A[1–64])
PartitionID
i
SV 20 (A[1–64])
PartitionType DVVAL 20 (A[1–64])
PartitionType
i
SV 20 (A[1–64])
PortAssociationState DVVAL 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationState
i
SV 51 (U1)
Enumerated
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationStateList SV L,n
1.<PortAssociationState
i
>
.
.
n <PortAssociationState
n
>
PortID DVVAL 51 (U1)
PortID
i
SV 51 (U1)
PortStateInfo DVVAL L,2
1.<PortAssociationState>
2. <PortTransferState>
PortStateInfo
i
SV L,2
1.<PortAssociationState
i
>
2. <PortTransferState
i
>
PortStateInfolist SV L,n
1.<PortStateInfo
1
>
.
.
n.<PortStateInfo
n
>
PortTransferState DVVAL 51 (U1)
PortTransferState
i
SV 51 (U1)
PortTransferStateList SV L,n
1.<PortTransferState
1
>
.
.
n.<PortTransferState
n
>
Reason DVVAL 51 (U1)
ReticleIDVerification ECV 11 (BOOLEAN)
ReticleParticleInspection ECV 11 (BOOLEAN)
SEMI E109.1-0704 © SEMI 2002, 2004 9
Table 6 Reticle Pod Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType 1. “ReticlePod”
“ObjID” 1. <PODID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
“Capacity” 51 (U1) Capacity
Capacity Range: 1..6
Capacity Examples: 1, 6
“ReticlePodAccessingStatus” 51 (U1) ReticlePodAccessingStatus
ReticlePodAccessingStatus enumerated per Variable
ReticlePodAccessingStatus
0: “NOT AVAILABLE”
1: “AVAILABLE”
2: “IN ACCESS”
3: “COMPLETE”
“PodIDStatus” 51 (U1) PodIDStatus
PodIDStatus enumerated per Variable PodIDStatus
0: “ID NOT READ”
1: “WAITING FOR HOST ON ID STATUS”
2: “ID VERIFICATION OK”
3: “ID VERIFICATION FAILED”
“ContentMap” L,n n = Capacity
1. ReticleID
n. ReticleID
“ReticlePodLocationID” 20 (A) ReticlePodLocationID
ReticlePodLocationID conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.
“ReticlePodLockingStatus” 51 (U1) ReticlePodLockingStatus
ReticlePodLockingStatus enumerated per VariableReticlePodLockingStatus
0: “NOT LOCKED”
1: “RELEASED AND LOCKED”
2: “HOLD”
“SlotMap” L,n n = Capacity
1.51 (U1) enumerated
…
n.51 (U1) enumerated
Enumerated
0: “UNDEFINED”
1: “EMPTY”
2: “CORRECTLY OCCUPIED”
“SlotMapStatus” 51 (U1) SlotMapStatus
SlotMapStatus enumerated per Variable SlotMapStatus.
0: “SLOT MAP NOT READ”
1: “WAITING FOR HOST ON SLOT MAP STATUS”
2: “SLOT MAP VERIFICATION OK”
3: “SLOT MAP VERIFICATION FAILED”
Table 7 Reticle Object Attribute Definition
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 1. “Reticle”
“ObjID” 1. <RETICLEID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
# of Exposures 51 (U1) # of Exposures
QualificationIntervalTime 52 (U2) 0–99999 / 0 is not limit.
SEMI E109.1-0704 © SEMI 2002, 2004 10
Attribute Name Attribute Data Form: SECS-II Structure
QualificationTerminationTime YYYYMMDDHHMMSSCC
ReticleStatus 51 (U1) ReticleStatus
0 “RETICLE NOT PRESENT”
1 “WAITING QUALIFICATION”
2 “READING ID”
3 “QUALIFIED”
4 “IN USE”
5 “REJECTED”
6 “RETICLE WAITING FOR HOST
7 “ PARTICLE INSPECTION”
ReticleAllocationStatus 51 (U1) RetcileAllocationStatus
0 “NOT ALLOCATED”
1 “ALLOCATED”
ReticleLocationID 20 (A) ReticleLocationID
ReticleLocationID conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.
ReticleType Equipment dependent
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