semi合集-English.pdf - 第5592页

SEMI P10-0705 © SEMI 1990, 2005 87 - < x s : s e q u e n c e > < x s : e l e m e n t n a m e = " P a t t e r n G r o u p I d " t y p e = " x s : s t r i n g " / > < x s : e l e m e n t …

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SEMI P10-0705 © SEMI 1990, 2005 86
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use
= " requir e d" / >
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fixed
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/ >
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fixed
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SEMI P10-0705 © SEMI 1990, 2005 87
- < xs: sequence>
< xs: elem ent nam e= "Pa t t e r nGrou pI d" t ype= "x s:st r ing" / >
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< xs: elem ent nam e= "De fect M easur em en t s"
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< / xs: sequence>
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use
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
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fixed
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< / xs: com plexType>
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- < xs: sequence>
< xs: elem ent nam e= " Psm W a ve lengt h" type= " xs:double" / >
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- < xs: elem ent nam e= "Tr a nsm issionMea sure m e nt s"
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- < xs: com plexType>
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< xs: elem ent
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< xs: elem ent nam e= "Tr a n sm issionEquipUse d"
type
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< xs: elem ent nam e= "
Tr ansm ission M ode Used"
type
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< xs: elem ent
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" type= "xs:st r in g" m inOccurs= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 88
< xs: elem ent nam e= "Tr ansm ission Ta rget "
type
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< xs: elem ent
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type
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< xs: elem ent nam e= "Tr ansm issionRan ge"
type
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< xs: elem ent nam e= "Tr ansm ission Er ror "
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= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent
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< xs: elem ent
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type
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< xs: elem ent
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type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Tr ansm ission Ma r k Feat ure"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
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< xs: elem ent
nam e= " Tra nsm issionM ark D ra w in g"
type
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0 " / >
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= "Mea su re dTr a nsm issionM a rkSit e I d"
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">
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" fixed= "2 "
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< / xs: ext ension>
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>