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SEMI S13-0305 © SEMI 1998, 2005 8 APPENDIX 1 DOCUMENT CRITERIA RELATING TO SEMI S2 NOTICE : The material in this Appendix is an official part of SEMI S13 and was approved by full letter ballot procedures on Novem ber 24,…

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SEMI S13-0305 © SEMI 1998, 2005 7
16 Related Documents
16.1 International SEMATECH
4
01104197AXFR — Guidelines for Environmental Characterization of Semiconductor Equipment
4 SEMATECH, 2706 Montopolis Drive, Austin, TX, website: http://www.sematech.org
SEMI S13-0305 © SEMI 1998, 2005 8
APPENDIX 1
DOCUMENT CRITERIA RELATING TO SEMI S2
NOTICE: The material in this Appendix is an official part of SEMI S13 and was approved by full letter ballot
procedures on November 24, 2004.
NOTE 1: Documentation criteria described in §A1-2 regarding safety interlock systems are part of conformance criteria to this
guideline.
A1-1 Purpose of this Appendix
A1-1.1 This appendix contains criteria for documents that relate to technical criteria that are presented in SEMI S2.
A1-1.2 The criteria in this appendix are not included in SEMI S2 as of the time this Appendix was written, but are
included herein as criteria for determining whether the documents provided to the equipment user conform to SEMI
S13.
A1-1.3 The criteria in this appendix were included in SEMI S13-0298.
A1-1.4 The criteria in this appendix are arranged to correspond with the sections of SEMI S2.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this appendix be incorporated in a
future revision of SEMI S2 and that this appendix be removed from SEMI S13 by revising SEMI S13 with the same effective
date as the effective date of the addition of these criteria to SEMI S2.
A1-2 Safety Interlock Systems
A1-2.1 The equipment supplier should describe the safety interlock systems provided for the equipment and their
operation in a list or similar format in the documents provided to the equipment user. Each interlock system
description should include at least the hazard for which the interlock system is provided, the detection methods
utilized, and equipment condition after the interlock system is activated.
A1-2.2 The locations of safety interlock sensors (e.g. door switches, pressure sensors, gas detectors) should be
clearly indicated using a layout sketch.
SEMI S13-0305 © SEMI 1998, 2005 9
RELATED INFORMATION 1
LAWS AND REGULATIONS
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision Task Force. This related information was approved for publication by a letter ballot on November 24,
2004.
R1-1 Laws and Regulations
R1-1.1 The contents of this section should be addressed in the terms and conditions of sale or other contractual
agreements between the supplier and user. The following information may be included in the documents provided
to the equipment user.
R1-1.2 Relevant Administrative Laws and Regulations — These may include laws and regulations relevant to
installation, operation, maintenance, and decommissioning of the equipment.
R1-1.2.1 The supplier may describe, in the documents provided to the equipment user, the laws and regulations
related to EHS of the user’s jurisdiction relevant to operation, maintenance, and supervision of the system.
R1-1.2.2 The supplier may describe the measure of support by the supplier for the implementation of laws and
regulations related to EHS after delivery of the equipment.
NOTE 1: It is recommended that equipment supplier and equipment user jointly investigate the laws and regulations of the
jurisdiction where the equipment is to be used, and they incorporate these requirements into the purchase specification. In
addition, the supplier has a right to describe the laws and regulations considered, and means of compliance implemented, during
the development and production of the equipment.
R1-1.3 Issues Regarding Product Liability (PL)
R1-1.3.1 The supplier may describe the following in the documents provided to the equipment user to ensure
mutual understanding of the issues regarding product liability for the equipment:
R1-1.3.1.1 How a field retrofit is announced and implemented.
R1-1.3.1.2 How to notify discontinuance information of the equipment production to the equipment user and what
repair and maintenance services are available after discontinuation of production of the equipment.
R1-1.3.1.3 How parts should be handled by the user for the transport for repair.
R1-1.3.1.4 The equipment supplier should describe, in the documents provided to the equipment user, the
possibility of not being able to carry out servicing for reasons of safety and health of the dispatched personnel, if the
equipment user refuses to disclose the names and contents of materials being used, for reasons of confidentiality or
trade secret protection.
R1-1.3.1.5 The limit of the responsibility of the equipment supplier when the equipment user transports, reuses,
resells, or modifies the equipment without the equipment supplier’s agreement.
R1-1.3.1.6 The responsibility with regard to the parts designed by the equipment user without the approval of the
equipment supplier.