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SEMI S8-0705 © SEMI 1995, 2005 2 3.3 The equipm ent design should in corporate reasonable accomm odations for users with special needs, such as left- handedness and color blindness. Where feasible the design should also …
SEMI S8-0705 © SEMI 1995, 2005 1
SEMI S8-0705
SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF
SEMICONDUCTOR MANUFACTURING EQUIPMENT
These safety guidelines were technically approved by the global EH&S Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; previously
published in 2003.
NOTICE: The official values in this guideline are expressed in The International System of Units (SI). Values that:
— are expressed in inch-pound (also known as “US Customary” or “English”) units,
— are enclosed in parentheses, and
— directly follow values expressed in SI units
are not official, are provided for reference only, and might not be exact conversions of the SI values.
1 Purpose
1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing
equipment.
1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the
manufacturing environment. The following general principles are integral to the ergonomics design and evaluation
of equipment:
1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among
hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and
hazards. Appropriate distribution of tasks will also optimize performance.
1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’
expectations.
1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size,
strength, and range of motion characteristics of the user population. Such design will also facilitate task
performance.
2 Scope
2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing
equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some
guidelines also address general design goals for effective human-machine performance. The guidelines apply to the
design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited
extent, equipment installation (see ¶7.3).
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment
meets regulatory requirements.
3.2 Human factors data compiled in references and specifications are influenced by the population from which they
were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using
few subjects or are context-specific. Ergonomics experts should be consulted where data development or
interpretation is required.
SEMI S8-0705 © SEMI 1995, 2005 2
3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as left-
handedness and color blindness. Where feasible the design should also accommodate users with hearing or vision
impairments and/or physical disabilities. It should be understood that although designing for the target user
population will accommodate some users with special needs, these guidelines cannot anticipate and fully
accommodate all such users.
3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines
of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of
the equipment should include conformance to the latest version of SEMI S8 for the redesign.
NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.
3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment
4.2 CEN/CENELEC Standards
1
4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to
be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and
consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards
are subject to revision prior to adoption.
EN 894-2 — Safety/Ergonomics for Displays
EN 894-3 — Safety/Ergonomics for Control Actuators
EN 60204-1 — Safety of Machinery — Electrical Equipment of Machines, Part 1. Specification for General
Requirements
4.3 Military Standard
2
MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities
4.4 NFPA Standard
3
NFPA 79 — Electrical Standard for Industrial Machinery
4.5 ISO Standard
4
ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals
4.6 Other Standards and Documents
Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974
ANSI/IES RP7
5
— Practice for industrial lighting
1 European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue
de Stassart 35, B-1050 Brussels, Belgium, Website: www.cenelac.org
2 United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 19120-
5099, USA. Telephone: 215.697.3321
3 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, Website: www.nfpa.org
4 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: www.iso.ch
5 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website:
www.ansi.org
SEMI S8-0705 © SEMI 1995, 2005 3
Waters, Thomas, et. al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health
and Human Services (NIOSH), Cincinnati, OH, 1994.
A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 MAWL — Maximum Acceptable Weight of Lift
5.1.2 MMH — Manual Material Handling
5.1.3 SESC — Supplier Ergonomics Success Criteria (See Appendix 1.)
5.2 Definitions
5.2.1 administrative controls — administrative controls modify the way in which a job is performed without
involving equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-
rest scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative
controls.
5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength)
limitations of user personnel.
5.2.3 anthropometry — description of the physical measurement of humans (e.g., size, strength).
5.2.4 cognitive — relating to human information processing, perception, and attention.
5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate
that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur.
Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical
controls and displays.
5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces,
repetitive movements, etc.) to a body part over a period of time.
5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or
multiple risk factors.
5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown
condition.
5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.
5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that
contributes to the risk of developing either an acute injury or a cumulative trauma disorder.
5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and
human performance limitations in relation to the design of machines, tasks, and other features of the human’s
working environment.
5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and
the equipment operated by the worker.
5.2.13
excessive reach — a reach which may result in biomechanical or other stress to the user.
5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist
greater than 20 degrees, or shoulder flexion or abduction greater than 45 degrees.
5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static
exertions, which produce no motion but have significant duration; dynamic exertions, which are motions including
lifting, pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.
5.2.16 frequency — how often a task is performed over time.