semi合集-English.pdf - 第3059页
SEMI E122.1-0703 © SEMI 2003 14 Host Test Equipmen t Read Data Set Request (DSRR) L,2 1. HANDLE = H-LOT12345 2. READLN = 0 (read all available) S13,F5 ! SC processes incoming data … " S13,F6 Re ad Data Set Data (DSR…
SEMI E122.1-0703 © SEMI 2003 13
Perform dispositioning…
Repeat until Lot is Complete …
R1-1.4 Buffered Test Data Acquisition
R1-1.4.1 This scenario shows acquisition of test results data using the buffered approach. The buffered test data log
is read at the end of entire lot processing. How the buffered data is being stored on tester is implementation specific.
Table R1-2 Buffered Test Data Acquisition
Host Test Equipment
SC introduces lot to equipment and other
external systems.
Tester completes PP-SELECT and in READY state.
SC configures Test Data Collection plan on
Tester and issues START command. See
Test Result Data Collection section for
details.
Assume all Testheads are assigned to
f
ile/bufferred Data Set “LOT12345.DLG”.
DATALOG-DATASETS
L,3
1. L,2
1. DSNAME=file:LOT123
45.DLG
2. L,0 (all sites)
S2,F49
!
"
S2,F50
Tester starts Testing and as Test Result data becomes
available, is buffered to assigned dataset name.
Repeat until Test Completes …
"
S6,F11 Event Report Send (ERS)
Test Complete Event or State Transition Event
associated with Test Complete, along with attached Bin
Data Report.
Event ACK S6,F12
!
Perform dispositioning on results from Bin
Data report…
Repeat until Lot is Complete …
When all units for lot have been processed,
before ending the lot, SC requests all
buffered data from tester …
Note: This transfer step can be skipped if file
is shared on network. In this case, just copy
the file and reset the dataset.
Open Data Set Request (DSOR)
L,2
1. HANDLE = H-LOT12345
(arbitrary but unique)
2. DSNAME = file:LOT12345.DLG
S13,F3
!
"
S13,F4 Open Data Set Data (DSOD)
L,5
1. HANDLE = H-LOT12345
2. DSNAME = file:LOT12345.DLG
3. ACKC13 = 0
4. TYPE = STREAM
5. RECLEN = 0 (N/A for streams)
SEMI E122.1-0703 © SEMI 2003 14
Host Test Equipment
Read Data Set Request (DSRR)
L,2
1. HANDLE = H-LOT12345
2. READLN = 0 (read all available)
S13,F5
!
SC processes incoming data …
"
S13,F6 Read Data Set Data (DSRD)
L,4
1. HANDLE = H-LOT12345
2. ACKC13 = 0
3. CKPNT = …
4. L,n
1. <FILDAT>
2. …
n. <FILDAT>
Upon completion of transfer, SC ends the
lot.
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SEMI E123-0703 © SEMI 2003 1
SEMI E123-0703
STANDARD FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT
MODEL (HSEM)
This standard was technically approved by the Global Information and Control Committee and is the direct
responsibility of the North American Information and Control Committee. Current edition approved by the
North American Regional Standards Committee on November 22, 2002. Initially available at www.semi.org
January 2003; to be published March 2003.
NOTICE: The designation of SEMI E123 was updated
during the 0703 publishing cycle to reflect the addition
of SEMI E123.1.
NOTICE: This standard replaces SEMI E30.2, which
has been removed from publication as of the March
2003 (0303) publication cycle.
1 Purpose
1.1 This document establishes a Specific Equipment
Model (SEM) for Handling equipment (HSEM). The
SEM consists of equipment characteristics and
behaviors that are applicable to this class of equipment.
The intent of this document is to facilitate the
integration of Handling equipment into an automated
(semiconductor) factory. This document accomplishes
this by defining an operational model for Handling
equipment as viewed by a factory automation
controller. This definition provides a standard host
interface and equipment operational behavior.
2 Scope
2.1 The scope of this document is limited to the
definition of Handling equipment behavior as perceived
by a host. It defines the view of the equipment through
the equipment communications interface. It does not
define the internal operation of the equipment. It
includes a specific processing state model as the basis
for the behavior of all equipment of this class.
2.2 This document expands the handler equipment
requirements and capabilities in the areas of the
processing state model, collection event, alarm
documentation, remote commands, variable item, and
process program management.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 Communications — HSEM-compliant equipment
shall support the High Speed Messaging Service
(HSMS) communication standard sending SEMI E5
messages over TCP/IP. The reason behind this
requirement is the amount of data available for
monitoring from this class of equipment. This
specification deals only with the behavior of the handler
in communicating with the host.
3.2 Multi-Process-Site HSEM Implementations — This
SEM makes some demands and assumptions about the
Handler with multiple process-sites in a configuration.
These requirements are as follows:
3.2.1 Handling equipment in a multiple process-site
configuration (i.e., lead conditioning site, electrical test-
site) provides identification and status information (see
Variable Item) at both the site level and the subsite
level. An example could be a handler with both a lead
conditioning site and an electrical test-site, with the
electrical test-site containing multiple subsites (i.e., test
heads).
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services
Single Selected-Session Mode (HSMS-SS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 alignment location — Location that individual
packaged units are placed at the process-site (e.g.,
electrical test).
5.1.2 chaining — The process of execution over
multiple lots or runs with the same Process Program
and the same handler operating conditions.
5.1.3 electrical test-site — A process-site on the
equipment which is coupled with electrical testing