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SEMI E6-0303 © SEMI 1982, 2003 4 8.4.3.1 There should be a unique Connection Num ber, or identifier, for every connection. If a utility type has more than one connection, each point of connection should have a num ber. 8…

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SEMI E6-0303 © SEMI 1982, 2003 3
NOTE 2: Additional documentation covering items such as
testing, training, sign-off, qualification, and commissioning
should also be provided as necessary to complete the tool
accommodation process making the equipment process
capable.
NOTE 3: See SEMI E76 for 300 mm equipment point of
connection documentation recommendations, point of
connection location recommendations, as well as
recommendations for providing pre-facilitation templates and
jigs.
8 Data Sheets Overview
8.1 The following table shows the data sheets included
in SEMI E6.
Data Sheet
Number
Data Sheet Title
100 Equipment Identification
200 Environmental Conditions
300 Physical Characteristics
400 Electrical Power
500 Water
600 Bulk Chemicals
700 Drains
800 Gases
900 Vacuum
1000 Exhaust
8.2 Equipment suppliers should provide data for all
necessary facilities even if not specifically covered in
the data sheets included in this standard. (See Section
19, Other Data Sheets)
8.3 Data Sheet Format
8.3.1 The data sheets in this document are designed to
facilitate use of electronic communication and database
storage of the facility interface information.
8.3.2 The format shown also provides a
recommendation for printed output of the information.
8.3.3 The data sheets shown define data relationships
that can be used for spreadsheet or database storage of
the information.
• A number, 100–1000, identifies each datasheet.
• A letter, starting with A, identifies each column of
the data sheet.
• A number, starting with 1, identifies each row of
the data sheet.
• Data item names are in the first row of each data
sheet.
• Units of measure for the data are in the second row
of each data sheet. (In many cases a simple data
definition such as text or number is provided in this
row.)
• Specific equipment data starts in row 3 of each data
sheet. One row per equipment component in data
sheets 200 and 300. One row per connection in
data sheets 400 through 1000.
8.4 Data Entry
8.4.1 As defined above, data entry involves the first
three rows. Row 1 identifies data item. Enter the unit of
measure for data in row 2. For example: mm. Specific
equipment data will be entered starting in row 3.
8.4.1.1 Preferred units of measure are listed in row 2 of
each data sheet. If data entered is in units different from
the units specified in row 2 change the units specified in
row 2 to match the data. If two units of measure are
shown in row 2 select the unit of measure that matches
the entered data.
8.4.1.2 Data values should be entered in the units of
measure used to design the equipment.
8.4.1.3 Data values should be entered as numbers only.
For example: 12.0 or 300 (Do NOT enter 300 mm).
8.4.1.4 Not every data item will have a value because
all data items do not apply to all equipment. The
equipment supplier should insert n/a (not applicable)
for any item that does not apply to that particular
equipment component or connection. Do NOT use the
n/a designation in place of missing data or data that is
not available. If data is applicable to the equipment and
not available leave the cell blank. If necessary, include
reason for blank cells in comments cell.
8.4.2 The unique Equipment Component identifier is
the first column, A, of each data sheet 200–1000.
8.4.2.1 The data sheets are designed to document all
facilities connections including connections made to
support equipment; therefore a unique equipment
component name should be used to locate each
connection. Included equipment components should be
the mainframe unit plus any other support equipment
provided by the equipment supplier, including but not
limited to vacuum pumps, process chambers, load lock
pumps, water heaters, gas boxes, gas panels, chillers,
radio frequency generators, and electrical power
distribution panels.
8.4.3 The unique Connection Number is the second
column, B, of each data sheet 400–1000.
SEMI E6-0303 © SEMI 1982, 2003 4
8.4.3.1 There should be a unique Connection Number,
or identifier, for every connection. If a utility type has
more than one connection, each point of connection
should have a number.
8.4.3.2 A consistent Connection Numbering system
should be used to identify all connections in all
documents relating to the equipment.
8.4.4 The Connection Label is the third column, C, of
each data sheet 400-1000. The Connection Label and
Connection Number system should provide a clear link
between all documentation and the actual connection on
the equipment.
8.4.5 Utility Type is the fourth column, D, of each data
sheet 400–1000. A consistent Utility Type naming
convention should be used to identify the utility types
in all documents relating to the equipment. (For
example SEMI E52 should be used for defining gases.)
8.4.6 Fitting Size, Fitting Material, and Fitting Type
(found in most data sheets) refer to connectors or
fittings on the equipment; such that the equipment
purchaser can identify and procure the matching
connector for fit up to the equipment. Do not define the
facilities side connectors in these data sheets.
8.4.7 Comments are the last column of each data sheet
400–1000. All comments should be entered in a single
cell at the end of the row corresponding to the
connection requiring comment. Comments may need to
be repeated in comments cell for each similar
connection. General comments for equipment model
may be included in the comments cell in table 100, or if
specific to an equipment component in tables 200 or
300.
8.5 Data Collection
8.5.1 Actual measured utility data, based upon
representative operating conditions, is preferred over
unverified estimates or calculations.
8.5.2 All data measures of flow rate, chemical waste,
dump volumes, etc., should be based upon the
supplier’s standard process and production rate.
8.5.3 All specifications and measurements in data
sheets 400–1000 should be at the equipment point of
connection.
8.5.4 If utility consumption data entered into the data
sheet is not measured data, note in the comments cell
how the data was obtained. For example: calculated
data or estimated data.
8.6 The following sections, 9 through 19, include
recommendations on how to complete each individual
data sheet.
9 Equipment Identification Data Sheet
9.1 Include in Data Sheet 100, Equipment
Identification the requested information for general
equipment identifiers, descriptions, installation
documentation references and data sheet set revision.
9.2 The 10 data sheets that follow the equipment
identification data sheet are specific to equipment
component and connection requirements (for example
gases, exhaust, vacuum, etc.) and describe the needs of
the equipment identified in the equipment identification
data sheet.
9.3 Data Sheet 100, Equipment Identification contains
the following items.
NOTE 4: Many of the items in data sheet 100 should be
included in a header on each page of any SEMI E6 Data print
outs or reports.
9.3.1 Equipment Install Data ID (100A) — Enter a
unique reference number (or file name) as a reference
for this equipment installation data set which includes
all data sheets 100 through 1000.
9.3.2 Equipment Install Data Revision (100B) — Enter
the revision number (or code) for this equipment
installation data set.
9.3.3 Equipment Install Data Revision Date (100C) —
Enter the data of the last revision to this equipment
installation data set.
9.3.4 SEMI Standard Name and Revision Date (100D)
— Enter the name and revision of the version of SEMI
E6 that this data set is in conformance with. For
example SEMI E6-96.
9.3.5 Equipment Name (100E) — Enter the name for
this equipment.
9.3.6 Equipment Model Number (100F) — Enter the
equipment supplier’s model number for the equipment.
9.3.7 Generic Process Type (100G) — Enter the
generic process type the equipment was designed to
perform. For example metal etch, Al PVD, or copper
CMP.
9.3.8 Wafer Size (100H) — Enter in mm the size of
wafer the equipment was designed to process. For
example: 200 or 300.
9.3.9 Number of Equipment Components (100I) —
Enter the number of stand-alone modules provided by
the supplier that together make the equipment process
capable. Typically one for the mainframe plus one for
each piece of supplier provided support equipment.
These equipment components will be named in column
A of data sheets 200 and 300. This number will be the
rows required in data sheet 200 and 300.
SEMI E6-0303 © SEMI 1982, 2003 5
9.3.10 Equipment Comments (100J) — Enter any
comments necessary to clarify or add to information
given for this equipment.
9.3.11 Equipment Supplier Name (100K) — Enter legal
name of equipment supplier.
9.3.12 Equipment Supplier Street Address (100L) —
Enter legal address for equipment supplier.
9.3.13 Equipment Supplier City, State, Country, Mail
Code (100M) — Enter city, state, country, and mail
code corresponding to legal address.
9.3.14 Equipment Supplier Phone (100N) — Enter
phone number corresponding to legal address.
9.3.15 Administrative Interface Information Reference
(100O) — Enter reference for document containing
relevant supplier and purchaser contacts. (See Section
7.1.1 and Related Information 1)
9.3.16 Optional Order Specific Data Purchasing
Company (100P) — If needed enter name of company
purchasing the equipment.
9.3.17 Optional Order Specific Data Purchase Order
Number (100Q) — If needed enter the P.O. Number
issued by the purchaser for procuring the equipment.
9.3.18 Optional Order Specific Data Purchaser’s
Equipment ID (100R) — If needed enter the number
used by the purchaser to track the purchased equipment.
9.3.19 Optional Order Specific Data Equipment Serial
Number (100S) — If needed enter the number issued by
the supplier and used to track the equipment as
purchased.
Data Sheet 100 – Equipment Identification (See SEMI E6 Section 9)
100 Equipment Identification
A B C D
1
Equipment Install Data ID Equipment Install Data
Revision
Equipment Install Data
Revision Date
SEMI Standard Name and
Revision Date
2 text text text text
3 SEMI E6 mmyy
100 Equipment Identification
E F G H I J
1
Equipment
Name
Equipment
Model Number
Generic
Process Type
Wafer Size Number of
Equipment
Components
Equipment Comments
2 text text text mm # text
3
100 Equipment Identification
K L M N O
1
Equipment Supplier
Name
Equipment Supplier
Street Address
Equipment Supplier
City, State, Country,
Mail Code
Equipment Supplier
Phone
Administrative
Interface Information
Reference
2
text text text text text
3
100 Equipment Identification
P Q R S
1
Optional
Order Specific Data
Purchasing Company
Optional
Order Specific Data
Purchase Order Number
Optional
Order Specific Data
Purchaser’s Equipment ID
Optional
Order Specific Data
Equipment Serial Number
2 text text text text
3