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SEMI D23-0999 © SEMI 1999 4 Item Unit Value Definition & Formula Notes Power/ Utilities Normal use and max i mu m us e v al ue s entere d by equipm ent manuf acturer . Normal Use [Uni t] Maxim um Use [Uni t] (32) Ele…

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SEMI D23-0999 © SEMI 19993
Item Unit Value Definition & Formula Notes
Area for handling substrates and
having the highest level of
cleanliness.
(17) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the
clean area.
(18) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the clean area.
(19) Maintenance
Area (W*D)
(m
2
) Dimensions of space in clean
area necessary for maintenance
of the equipment and
accessories.
(20) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in clean
area from above items (17)
through (19).
(21) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in clean area (by area unit).
Clean Areas
(22) Monthly
Dedicated Floor Cost
$/month Monthly cost for clean area (20)
× (21).
Area with lower cleanliness
level than above clean area.
(23) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the gray
area.
(24) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the gray area.
(25) Maintenance
Area (W*D)
(m
2
) Dimensions of space in gray
area necessary for maintenance
of the equipment and
accessories.
(26) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in gray
area from above items (23)
through (25).
(27) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in gray area (by area unit).
Gray Area
(28) Monthly
Dedicated Floor Cost
($/month) Monthly costs for gray area (26)
× (27).
Area with the lowest level of
cleanliness (i.e., sub-floor, etc.).
(29) Dedicated
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment in other
dedicated floor area.
(30) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in other dedicated floor area (by
area unit).
Other
Dedicated
Floor Area
(31) Monthly
Dedicated Floor Cost
($/month) Monthly costs for other
dedicated floor area (29) × (30).
D. Running
Costs
SEMI D23-0999 © SEMI 1999 4
Item Unit Value Definition & Formula Notes
Power/
Utilities
Normal use and
maximum use values
entered by equipment
manufacturer.
Normal
Use [Unit]
Maximum
Use [Unit]
(32) Electricity ($/month) Monthly cost of electricity
necessary to operate equipment.
[ ] [ ]
(33) Cooling Water ($/month) Monthly cost of cooling water
necessary to operate equipment.
[ ] [ ]
(34) Air ($/month) Monthly cost of air conditioning
necessary to operate equipment.
[ ] [ ]
(35) Gas Exhaust
Processing
($/month) Monthly cost of gas exhaust
processing necessary to operate
equipment.
[ ] [ ]
(36) Liquid Waste
Processing
($/month) Monthly cost of liquid waste
processing necessary to operate
equipment.
[ ] [ ]
(37) Vacuum Line ($/month) Monthly cost of vacuum
volume necessary to operate
equipment.
[ ] [ ]
(38) Nitrogen Gas ($/month) Monthly cost of nitrogen gas
necessary to operate equipment.
[ ] [ ]
(39) Dry Gas ($/month) Monthly cost of dry gas
necessary to operate equipment.
[ ] [ ]
(40) Other ($/month) Other monthly power & utilities
costs necessary to operate
equipment.
(41) Power/Utilities
Subtotal
($/month) Subtotal of monthly power &
utilities costs necessary to
operate equipment; sum of (32)
through (40).
Cost of materials necessary for
processing.
Example: Resist,
chemicals, process
gases, cleaning gas,
sputter target, etc. Enter
by equipment in (42) to
(46).
(42) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(43) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(44) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(45) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(46) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
Process
Materials
Costs
(47) Process Materials
Subtotal
($/month) Subtotal of monthly costs for
process materials; sum of (42)
through (46).
SEMI D23-0999 © SEMI 19995
Item Unit Value Definition & Formula Notes
Expenditures (to external) for
maintenance.
(48) Consumables ($/month) Monthly cost for scheduled
replacement parts.
(49) Scheduled
Maintenance
($/month) Monthly cost for scheduled
maintenance.
Forecast maintenance
Maintenance
Costs
(50) Other ($/month) Monthly maintenance costs not
included in above items.
(51) Maintenance
Subtotal
($/month) Subtotal of monthly
expenditures (to external) for
maintenance; sum of (48)
through (50).
(52) Running Cost
Subtotal
($/month) Monthly running cost total:
(41) + (47) + (51).
E. Labor
Costs
In-house labor costs
(53) Operator ($/month) Equipment operator monthly
labor cost
(54) In-house
maintenance
($/month) Equipment maintenance
monthly labor cost
(55) Labor Cost
Subtotal
($/month) Subtotal of above costs (53) +
(54).
Managers and engineers
not included.
F. Cost Total
(56) Cost ($/month) Total monthly costs necessary
for operation of equipment: (11)
+ (16) + (22) + (28) + (31) +
(52) + (55).
G. Runtime
(57) Operating time (hr/month) Hours per month of factory
operation
(58) 1-Item process
time
(hr/
process)
Process recipe exchange time
(59) Number of
processes/month
(process/
month)
Number of process recipe
exchanges per month
(60) Process time (hr/month) Hour per month of process
recipe exchange (58) × (59)
(61) Scheduled
maintenance time
(hr/month) Monthly scheduled maintenance
time
(62) Start-up
inspection time
(hr/month) Time necessary, per month, for
start-up.
(63) Down time
(mc failure)
(hr/month) Down time, per month, for
machine failure.
(64) Other down time (hr/month) Down time, per month, not
included in above items.
Product wait time not
included.
(65) Run time (hr/month) Monthly operation time (57) –
[Σ (60) through (64)].
H. Process
Capacity
(66) Sheets/hour (sheets/hr) Number of sheets processed per
hour
(67) Process capacity (sheets/
month)
Number of sheets processed per
month (65) × (66)