semi合集-English.pdf - 第7737页
SEMI T12-0305 © SEMI 2004, 2005 16 VA C A N T FULL PUBLIC LOC A T ION OCCUPIED C C UNOCCUPIED 1 3 4 5 6 2 Figure 16 Public Location State Table 5 Transition De finition Table for Public Loc ation State # PREVIOUS STATE T…

SEMI T12-0305 © SEMI 2004, 2005 15
9.12.1.1 Public Location object is assigned on a piece of equipment and represent one and only one official location
of the equipment. However a piece of equipment may have more than one Public Location objects, they have to be
prepared for different types of Attachments. But a Public Location may be used by two or more different
attachment types if they can share the physical attachment location and such side effects as contamination may not
be expected.
9.12.1.2 It may be also assigned in physical or logical inventory. More than one Public Location may be defined
for the inventory. If it is physically divided, each location have to be prepared for physically categorized
attachments such view point as attachment types or allowable dimensions. If it is logically divided, there have to be
explicit rule to distribute or the inventory has to manage implicitly.
PublicLocation
showId
showName
changeName
showLocationType
showPossibleTypes
showCapacity
showAvailableSpace
showAttachments
updateOccupancy
showState
updateState
Figure 15
PublicLocation Class
9.12.2 Public Location Class — Public Location Class defines its inherent data, behavior and services. This class is
illustrated as above for reference.
9.12.2.1 Responsibility of PublicLocation — This class is responsible for identifying location, its status including
remaining room to be occupied by Jigs or Implements and manage them.
9.12.2.1.1 To complete the responsibility it accepts many inquiries about inherent data of the class or request to
update them. They are defined as services of PublicLocation in this specification. Service names may be different
from capabilities above.
9.12.2.1.2 Inherent data is used to complete the responsibility. The data is also referred to as attributes and they
have to be defined in some way. This document doesn’t define attributes directly with attribute definition table
shown in some SEMI standard documents but defines them indirectly as service parameters.
9.12.2.1.3 Behavior is also defined to complete the responsibility. Behavior is often represented by collaboration
with outside of this class and state model. Collaboration reflects a part of associations of this class with others.
Collaboration works by asking services defined on accompanying object which is the other end of association on
class diagram. State model is representation of the other part of behavior of this class. Because this class has
explicit state, it defines following states and state model by state chart and transition definition table.
9.12.2.1.3.1 UNOCCUPIED — Public Location is not occupied by any jig or implement.
9.12.2.1.3.2 OCCUPIED — Public Location is occupied by some jigs or/and implements.
9.12.2.1.3.3 VACANT — Public Location is occupied by some jigs or implements and further occupancy is
possible.
9.12.2.1.3.4 FULL — Public Location is occupied by some jigs or implements and no further occupancy is allowed.

SEMI T12-0305 © SEMI 2004, 2005 16
VACANT FULL
PUBLIC LOCATION
OCCUPIED
C
C
UNOCCUPIED
1
3
4
5
6
2
Figure 16
Public Location State
Table 5 Transition Definition Table for Public Location State
#
PREVIOUS
STATE
TRIGGER NEW STATE ACTIONS COMMENTS
1 (No state) Public Location is assigned. UNOCCUPIED
[or] OCCUPIED
No action.
2 UNOCCUPIED At least one attachment is placed on
the location.
OCCUPIED Destination state is
dependent on room of
occupancy.
3 OCCUPIED Public Location is occupied. VACANT [or]
FULL
Unit Transition may be
reported.
Destination state is
dependent on room of
occupancy.
4 VACANT Attachments are moved to the
location and no further occupancy is
possible.
FULL Unit Transition may be
reported.
5 FULL Attachments are removed from the
location.
VACANT Unit Transition may be
reported.
6 OCCUPIED All attachments are removed from
the location.
UNOCCUPIED Unit Transition may be
reported.
#1
A unit of transition may be decomposed into transition fragments described in transition numbers on leftmost column in this table and the state
chart above for explanation purpose. If a unit of transition is reported or represented, sequenced fragments are required to be consolidated and
identified one unique number. For example when capacity of a location is just one and transition fragment #6 happens on the state
UNOCCUPIED, new state may not be OCCUPIED but has to be FULL. Following table defines unique unit transition ID.
Table 6 Transition ID of Public Location State
Unit
Transition
ID
SOURCE STATE
Transition
Fragment
numbers
TRIGGER
DESTINATION
STATE
COMMENTS/CONDITION
1 1 UNOCCUPIED No attachment was there.
2 VACANT Location was partially occupied.
3
(No state)
1, 3
Public Location is
assigned.
FULL Location was fully occupied.
4 VACANT Location is partially occupied.
5
UNOCCUPIED 2, 3 At least one attachment
is placed.
FULL Location was fully occupied.

SEMI T12-0305 © SEMI 2004, 2005 17
Unit
Transition
ID
SOURCE STATE
Transition
Fragment
numbers
TRIGGER
DESTINATION
STATE
COMMENTS/CONDITION
6 VACANT 4 At least one attachment
is placed.
FULL Location was fully occupied.
7 5 VACANT
8
FULL
6
Location is partially occupied.
9 VACANT 6
At least one attachment
is removed.
UNOCCUPIED
No attachment is there.
9.13 Secondment — Secondment represents an Attachment on equipment. This has subset information of the
original Attachment’s.
9.13.1 Secondment Object — Secondment object represents such supporting resource as Jig or Implement on
equipment logically. Secondment object is an instance of Secondment class defined later. This object is created at
the time delivered physical attachment has been verified successfully. If the equipment doesn’t have verification
capability, this object is created at the time an Attachment arrived and it is identified. This is removed when
physical Attachment has been taken away from the equipment. Attachment object identifies corresponding physical
attachment on equipment and its information. This object is abbreviated as “Secondment” in this document and
often ‘object’ is omitted.
Secondment
showId
showName
changeName
showType
showState
destruct
Figure 17
Secondment Class
9.13.2 Secondment Class — Secondment Class defines its inherent data, behavior and services. This class
generalizes Jig and Implement registered on equipment. This class is illustrated as above for reference.
9.13.2.1 Responsibility of Secondment — This class is responsible for holding and organizing such information as
history for a Jig or Implement on equipment.
9.13.2.1.1 To complete the responsibility it accepts requests and inquiries. Also it checks events, exceptions and
expiration by itself and stimulates such collaborative objects as HistoryBuffer and Exception. They are defined as
services of Secondment in this specification. Service names may be different from above capabilities.
9.13.2.1.2 Inherent data is used to complete the responsibility. The data is also referred to as attributes and they
have to be defined in some way. This document doesn’t define attributes directly with attribute definition table
shown in some SEMI standard documents but defines them indirectly as service parameters.
9.13.2.1.3 Behavior is also defined to complete the responsibility. Behavior is often represented by collaboration
with outside of this class and state model. Collaboration reflects a part of associations of this class with others.
Collaboration works by asking services defined on accompanying object which is the other end of association on
class diagram. State model is representation of the other part of behavior of this class. Because this class has
explicit state, it defines following states and state model by state chart and transition definition table. This class has
a couple of parallel substates: USING and EXPIRATION.
9.13.2.1.3.1 USING — This substate specifies use of Secondment whether it is in-use or not.
9.13.2.1.3.2 NOTUSED — One of substates of USING state. Attachment (Secondment) is located somewhere on
equipment but it is not used for such intension as process or maintenance.