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SEMI M31-0705 © SEMI 1998, 2005 16 Value Specified Symbol Used Figure Number Manual Door Auto-Door Datum Measured from Feature Measured to r 67 10 240 mm (9.45 in.) maximum y 67 in front of n ominal wafer centerline any …
SEMI M31-0705 © SEMI 1998, 2005 15
view, the positions of sensors on a load port will be switched, with the sensor for info pad A on the right and the
sensor for info pad B on the left as one faces the tool from the front. Table 3 defines all dimensions.
Table 3 External FOSB Dimensions and related forces applied to FOSB (Figures 8
14)
Value Specified
Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
#1
11 60° bilateral datum plane centerline of the right and left
kinematic grooves in the top robotic
handling flange
#1
11 45 ± 1° nominal wafer centerline surface of the center hole in the top
robotic handling flange
#1
11 52 ± 1°
b
ilateral datum plane or
vertical plane rotated away
from it about nominal wafer
centerline
angled surface of the kinematic grooves
in the top robotic handling flange
#1
11 45 ± 0.5° either vertical datum plane sides of position and orientation
notches
14 30 ± 0.5° horizontal line on bilateral
datum plane
ramp of front retaining feature
d63
#1
11 35.0 + 0.9 / - 0.1 mm
(1.378 + 0.035 / -0.004 in.)
diameter centered on the
nominal wafer centerline
sides the center hole in the top robotic
handling flange at height z47
d65 8, 9, 12 10 ± 0.5 mm
(0.39 ± 0.02 in.)
diameter centered on the
intersection of x65 and the
facial datum plane
surface of cylindrical fork-lift pin holes
in left and right bottom conveyor rails
f60 None 175 N (39.3 lbf.) minimum not applicable force in any direction which both
retaining features are able to withstand
f61 None not applicable 40 N (8.99
lbf.) maximum
not applicable force that a FOSB should be able to
withstand when applied to one of the
retaining features in any direction
without negative impact to the intended
function
r13 12 2.5 mm (0.10 in.) minimum line segment along center of
carrier sensing pad
edge of carrier sensing pad
r14 12 7.5 mm (0.30 in.) minimum intersection of x21 and y10 edge of info pads A and B
r17 12 10 mm (0.39 in.) minimum intersection of x22 and y9 edge of info pads C and D
r59
#1
11 6 mm (0.24 in.) maximum not applicable radius on peak of kinematic grooves in
the top robotic handling flange
r60 13,14 16 ± 0.5 mm
(0.63 ± 0.02 in.)
nominal wafer center line ends of slot for center retaining feature
r61 13,14 16 mm (0.63 in.) minimum nominal wafer center line walls of chamber above slot in
center retaining feature
r63
#1
11 66 mm (2.60 in.) maximum nominal wafer centerline near end of the right and left kinematic
grooves in the top robotic handling
flange
r64 13 9.5 mm (0.37 in.)
maximum
not applicable corners of front retaining feature
r65 None 1 mm (0.04 in.) maximum not applicable all concave features (radius)
r66 None 2 mm (0.08 in.) maximum not applicable all required convex features (radius)
SEMI M31-0705 © SEMI 1998, 2005 16
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
r67 10 240 mm (9.45 in.) maximum y67 in front of nominal wafer
centerline
any part of FOSB
r68
#2
10 271 mm (10.67
in.) maximum
Not applicable y67 in front of nominal wafer
centerline
any part of FOSB manual door
r69 None 10 mm (0.4 in.) minimum
(required)
15 mm (0.6 in.) (recommended
for ergonomic reasons)
not applicable correctable FOSB misalignment in any
horizontal direction
x8 12 12.5 mm (0.49 in.) bilateral datum plane end of the line segment along center of
center carrier sensing pad
x13 12 88.5 mm (3.48 in.) bilateral datum plane near end of the line segment along
center of front carrier sensing pads
x14 12 118.5 mm (4.67 in.) bilateral datum plane far end of the line segment along center
of front carrier sensing pads
x17 12 17.5 mm (0.69 in.) bilateral datum plane line segment along center of rear carrier
sensing pads
x21 12 30 mm (1.18 in.) bilateral datum plane origin of radius r14 at center of info
pads A and B
x22 12 70 mm (2.76 in.) bilateral datum plane origin of radius r17 at center of info
pads C and D
x41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
bilateral datum plane front right orientation notch on robotic
handling flange
x42
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane front left orientation notch on robotic
handling flange
x43
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane rear orientation notch on robotic
handling flange
x44
#1
9, 11 53 mm (2.09 in.) maximum bilateral datum plane encroachment of FOSB underneath
robotic handling flange
x45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
bilateral datum plane nearest point of side position and
orientation notches on robotic handling
flange
x46
#1
9, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
bilateral datum plane sides of robotic handling flange
x47
#1
11 58 mm (2.28 in.) minimum bilateral datum plane end of robotic handling flange front and
rear
x50 9, 10, 12 215 mm (8.46 in.) maximum bilateral datum plane furthest reach of human handles
x53 9, 10, 12 195 mm (7.68 in.) maximum bilateral datum plane FOSB sides (apart from human
handles)
x56 9, 12 194.75 ± 0.25 mm (7.667 ±
0.010 in.)
bilateral datum plane outside edge of bottom conveyor rails
x57 9, 12 180 mm (7.09 in.) maximum bilateral datum plane FOSB sides underneath bottom
conveyor rails
x60 13 8 ± 0.5 mm
(0.31 ± 0.02 in.)
bilateral datum plane sides of slot for center retaining feature
x64 13 35 mm (1.38 in.) minimum bilateral datum plane sides of front retaining feature
SEMI M31-0705 © SEMI 1998, 2005 17
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
x65 9, 12 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical fork-lift pin
holes in left and right bottom conveyor
rails
x68 13 25 mm (0.98 in.) minimum bilateral datum plane sides of volume above ramp on front
retaining feature
x69
#1
11 7.6 ± 0.1 mm
(0.299 ± 0.004 in.)
b
ilateral datum plane or
vertical plane rotated away
from it about nominal wafer
centerline
b
eginning of angled surface of the
kinematic grooves in the top robotic
handling flange
x81
#2
1 215 mm (8.46
in.) maximum
Not applicable bilateral datum plane outer edge of manual door
y9 12 92.5 mm (3.64 in.) facial datum plane front end of the line segment along
center of rear carrier sensing pads and
origin of radius r17 at center of info
pads C and D
y10 12 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along
center of rear carrier sensing pads and
origin of radius r14 at center of info
pads A and B
y17 12 27.5 mm (1.08 in.) facial datum plane line segment along center of center
carrier sensing pad
y18 12 40.2 mm (1.58 in.) facial datum plane near end of the line segment along
center of front carrier sensing pads
y19 12 61.1 mm (2.41 in.) facial datum plane far end of the line segment along center
of front carrier sensing pads
y40
#1
8, 10, 12 116 mm (4.57 in.) maximum facial datum plane furthest extent of human handles
toward the front
y41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
facial datum plane left orientation notch on robotic
handling flange
y42 None ± 0.5 mm (± 0.02 in.) flatness
over each area
facial datum plane surfaces that mate with the seal zones
y44
#1
8, 11 53 mm (2.09 in.) maximum facial datum plane encroachment of supports under the
outer edge of the robotic handling
flange
y45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
facial datum plane nearest point of front and rear position
and orientation notches on robotic
handling flange
y46
#1
8, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
facial datum plane front and rear edge of robotic handling
flange
y47
#1
11 58 mm (2.28 in.) minimum facial datum plane end of robotic handling flange sides
y49 None 134 mm (5.28 in.) maximum facial datum plane interior of FOSB sides between x51 and
x52
y50 8, 10 130 mm (5.12 in.) minimum facial datum plane rear of upper door frame volume