semi合集-English.pdf - 第4534页
SEMI D25-0600 E © SEMI 2000, 2003 17 Incoming Figure A1-7 Incoming Customer norm al room Figure A1-8 Customer Nor mal Room
SEMI D25-0600
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© SEMI 2000, 2003 16
Truck
Outgoing
Figure A1-5
Outgoing
Shipping
Figure A1-6
Shipping
SEMI D25-0600
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© SEMI 2000, 2003 17
Incoming
Figure A1-7
Incoming
Customer normal room
Figure A1-8
Customer Normal Room
SEMI D25-0600
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© SEMI 2000, 2003 18
Air shower
Figure A1-9
Customer Normal Room to Air Shower
Customer clean
Figure A1-10
Customer Clean Room