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SEMI F53-0600 © SEMI 2000 9 N2 Source Regulat or Heat Exchang er Inlet Valve Outle t Valve MFC Flow Standard Gas Tem perature Figure 2 MFC Te st Se tu p Comput er Con troller S ignal Gene rator Power Amplifier (See NOTE …

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SEMI F53-0600 © SEMI 2000 8
Any
Malfunctions
End of Radiated
Testing
Initiate Conducted
Testing
Set Up Apparatus
Spike on "+" DC
Lead Tests
A.
Increase Spike
Amplitude and
Record Data
B.
Is MFC Digital
C.
Hold at Highest
Level for 5 Minutes
Locate Frequency
of Malfunction and
Record
D.
Spike on "+" DC
Lead
E.
Increase Spike
Amplitude and
Record Data
G.
Hold at Highest
Level for 5 Minutes
F.
Is MFC Digital
Spike on "-" DC
Lead
Repeat steps A-G
Spike on Control
Lead
H.
Apply Full Scale
Control Signal and
Increase Spike,
Record Data
J.
Hold at Highest
Level for 5 Minutes
I.
If Not Susceptible
and Digital
Apply Negative
Spike on Control
Leads
Repeat Steps H-J
End Test
Yes
No
Yes
No
Yes
No
Yes
No
Figure 1 (continued)
Flow Chart of Test Method
SEMI F53-0600 © SEMI 20009
N2 Source
Regulator
Heat
Exchanger
Inlet
Valve
Outlet
Valve
MFC
Flow Standard
Gas
Temperature
Figure 2
MFC Test Setup
Computer Controller Signal Generator
Power Amplifier
(See NOTE 1.)
Equipment Under Test
A
ntenna (See NOTE 2.)
1M
Oscilloscope
A
NOTE 1: Change Power Amp as Required.
NOTE 2: Change Antenna as Required.
Figure 3
Radiated Electric Field Susceptibility Test Setup
SEMI F53-0600 © SEMI 2000 10
Spike Generator
Equipment Under Test
SCOPE
AB
+
-
G
Figure 4
Transient Susceptibility (Conducted) Test Setup