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SEMI E52-0703 © SEMI 1995, 2003 14 Code Gas Name Symbol Formula Synonym Ref 224 Fluorotriethoxysilane C6H15OSiF (C 2 H 5 O) 3 SiF 2 322 Formaldehyde CH2O CH 2 O H2C0; UN 1198; BFV 2 43 Germane GeH4 GeH 4 1 113 Germanium …

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SEMI E52-0703 © SEMI 1995, 2003 13
Code Gas Name Symbol Formula Synonym Ref
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
134 Difluorosilane SiH2F2 SiH
2
F
2
10
217 Digermane Ge2H6 Ge
2
H
6
2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
97 Disilane Si2H6 Si
2
H
6
2
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
54 Ethane C2H6 CH
3
CH
3
1
348 Ethane, 1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
136 Ethanol C2H6O CH
3
CH
2
OH 2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane orEthane, Chloro or
Ethyl Chloride
1
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
18 Fluorine F2 F
2
1
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
223 Fluoroacetylene C2HF FC=CH 2
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
SEMI E52-0703 © SEMI 1995, 2003 14
Code Gas Name Symbol Formula Synonym Ref
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
43 Germane GeH4 GeH
4
1
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3 - Dioxolane 3
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
137 Halothane C2HBrClF3 BrClHCCF
3
6
1 Helium He He 1
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
192 Hexafluorobenzene C6F6 C
6
F
6
2
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
50 Hydrazine N2H4 H
2
NNH
2
2
269 Hydrazoic Acid HN3 HN
3
1
7 Hydrogen H2 H
2
1
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
12 Hydrogen Fluoride HF HF 1
17 Hydrogen Iodide HI HI 1
23 Hydrogen Selenide H2Se H
2
Se 1
22 Hydrogen Sulfide H2S H
2
S 1
229 Hydrogen telluride H2Te H
2
Te 2
90 Intentionally Left Blank
92 Intentionally Left Blank
175 Intentionally Left Blank
SEMI E52-0703 © SEMI 1995, 2003 15
Code Gas Name Symbol Formula Synonym Ref
115 Iodine Pentafluoride IF5 IF
5
1
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene 2
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
5 Krypton Kr Kr 1
329 Mercury Hg Hg UN 2809 2
28 Methane CH4 CH
4
1
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
47 Methyl Mercaptan CH4S CH
3
SH 1
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate); 2-
Methyl1-2-propenoic acid
2
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
124 Molybdenum Hexafluoride MoF6 MoF
6
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
2 Neon Ne Ne 1
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
346 Niobium Pentachloride NbCl5 NbCl
5
3
167 Nitric Acid HNO3 HNO
3
2
16 Nitric Oxide NO NO 2
13 Nitrogen N2 N
2
1
26 Nitrogen Dioxide NO2 NO
2
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2