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SEMI T6-0697 © SEMI 1997, 2004 22 Segment: CID Characte ristic/Class ID Level: Detail Loop: CID Usage: Optional Max Use: 1 Purpose: To specify the general class or sp ecific characteristic upon wh ich test results are be…

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SEMI T6-0697 © SEMI 1997, 2004 21
Segment: DTM Date/Time Reference
Level: Detail
Loop: LIN
Usage: Optional
Max Use: 10
Purpose: To specify pertinent dates and times.
Syntax Notes: 1 At lease one of DTM02, DTM03, or DTM06 is required.
2 If either DTM06 or DTM07 is present, then the other is required.
Comments: 1 Report Type Code SR (LIN01 Assigned ID = "PER"): Defines date range covered by summary
data.
2 Report Type Codes CA and RT (LIN01 Assigned ID = "LOT"): May be used to specify a ship date
or other date mutually agreed upon by Buyer and Seller.
3 If date range for all data entities is identical, the DTM Segment at Position Number 040 may be
used to identify a single date.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M DTM01 374 Date/Time Qualifier M ID 3/3
Code specifying type of date or time, or both date and time.
009 Process
011 Shipped
054 Sellers Local
119 Test Performed [Period Range]
157 Test Period Start
158 Test Period Ending
X DTM02 373 Date X DT 6/6
Date (YYMMDD).
Used for start/stop combination.
O DTM03 337 Time X TM 4/4
Time expressed in 24-hour clock time (HHMM).
O DTM05 624 Century O N0 2/2
The first two characters in the designation of the year (CCYY).
X DTM06 1250 Date Time Period Format Qualifier X ID 2/3
Code indicating the date format, time format, or date and time format.
RD6 Range of Dates Expressed in Format YYMMDD-YYMMDD.
RD8 Range of Dates Expressed in Format CCYYMMDD-CCYYMMDD.
A range of dates expressed in the format CCYYMMDD-
CCYYMMDD, where CCYY is the numerical expression of the
century CC and year YY, MM is the numerical expression of the
month within the year, and DD is the numerical expression of the
day within the year; the first occurrence of CCYYMMDD is the
beginning date and the second occurrence is the ending date.
RDM Range of Dates Expressed in Format YYMMDD-MMDD.
X DTM07 1251 Date Time Period X AN 1/35
Expression of a date, a time, or range of dates, times, or dates and times.
SEMI T6-0697 © SEMI 1997, 2004 22
Segment: CID Characteristic/Class ID
Level: Detail
Loop: CID
Usage: Optional
Max Use: 1
Purpose: To specify the general class or specific characteristic upon which test results are being reported or are to
be taken.
Syntax Notes: 1 At least one of CID01, CID02, CID04, or CID05 is required.
2 If either CID03 or CID04 is present, then the other is required.
3 If CID06 is present, then both CID03 and CID04 are required.
4 If CID07 is present, then at least one of CID04 or CID05 is required.
Comments 1 CID06 specifies the individual code list of the agency specified in CID03.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
X CID01 738 Measurement Qualifier X ID 1/3
Code identifying a specific product or process characteristic to which a measurement
applies.
M CID02 750 Product/Process Characteristic Code X ID 2/3
Code identifying the general class of a product or process characteristic.
13 Quality (Quality Level)
X CID03 559 Agency Qualifier Code X ID 2/2
Code identifying the agency assigning the code values.
SM Semiconductor Equipment and Materials International
New code required for SEMI: SM suggested.
ZZ Mutually Defined
May be required until incorporation of the SEMI code.
X CID04 751 Product Description Code X AN 1/12
A code from an industry code list which provides specific data about a
productcharacteristic.
X CID05 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.
O CID06 822 Source Subqualifier O AN 1/15
A reference that indicates the table or text maintained by the Source Qualifier.
SEMI T6-0697 © SEMI 1997, 2004 23
Segment: SPS Sampling Parameters for Summary Statistics
Level: Detail
Loop: CID
Usage: Optional
Max Use: >1
Purpose: To define the sampling parameters associated with summary statistics.
Syntax Notes: 1 If either SPS05 or SPS06 is present, then the other is required.
Semantic Notes: 1 SPS01 is the population size (count) of the class of objects or events to which the statistical
generalizations refer.
2 SPS02 is the sample size, which is the number of observations on which the reported summary
statistics were based.
3 SPS03 is the subgroup size, which is the number of observations in a subgroup of a sample.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
O SPS01 609 Count O N0 1/9
Occurrence counter
O SPS02 609 Count O N0 1/9
Occurrence counter
O SPS03 609 Count O N0 1/9
Occurrence counter
O SPS04 949 Confidence Limit O R 1/4
Percent value expressing the confidence that a true value falls within a certain
confidence interval.
O SPS05 C00101 Composite Unit of Measure X
To identify a composite unit of measure.
C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
Refer to 003051 Data Element Dictionary for acceptable code values.
C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
C00101 through C00103 can be repeated five times using C00103 to C00115.
O SPS06 942 Sample Frequency Value per Unit of
Measurement Code
X N0 1/9
The number of samples collected.