semi合集-English.pdf - 第2281页
SEMI E81-0600 © 1999, 2 000 18 rec omme nd the next ta sk (d ispat chi ng) o r a sequen ce of tasks (s cheduling) for f actory resources. 7.2.15 Responsibilities of Equipment T r acking and Maintenance Component 7.2.15.1…
SEMI E81-0600 © 1999, 200017
etc.), and inventory regions (see Section 7.3.3 for a
description of the factory model of resources).
• Define the (initial or nominal) capabilities of the
factory and area resources, including factory
capacity, area capacity and process capability
(detailed capabilities of the machines, people, etc.
are the responsibility of other components).
7.2.13.4 Run-time Responsibilities of Factory
Operations Component
• Dynamically receive product requests (from the
enterprise or internally) and map them to product
work-in-progress and planned material release (lot
starts).
• Associate material to a process flow (in the
Specification component) for the product.
• Consolidate product demand in the factory.
• Request Factory Jobs or modify existing
Factory Jobs to drive material through its
process flows, in response to product requests.
• New Factory Jobs for new material release,
• Modify existing Factory Jobs (and
associated material model and assigned
process flow) for assigning new or modified
product requests to material in process.
• Set or modify product material quantity and due
date(s) and other scheduling support
information (such as priority and planned profit
margin).
• Execute Factory Jobs to drive material through its
process flow, using scheduling and dispatching
services of the Scheduling component and
requesting work from Production Machine,
Material Transport and Storage, Equipment
Tracking and Maintenance, and Factory Labor
components.
• Based on factory state (material process state,
material due date and priority, material
location, equipment state, equipment process
capability, operator availability and
qualification, etc.) and where the material is in
its process flow, request and track Production
machine jobs, transport jobs, maintenance jobs
and other jobs that implement and enable the
process steps in the process flow.
• Based on success, failure or partial failure of
production machine jobs and transport jobs, and
based on metrology results and other
information, determine the next activities for
material and factory resources. This may
include splitting or joining product groups,
scrapping material, downgrading or changing
the product type of material, and other actions
responsive to job performance and resource
availability. Once split, scrap and other
decisions are made, Factory Operations may
use scheduling utilities to select the next
activities for the material and resources.
• Record and report factory job status and decisions
in factory job histories.
• Report status and progress on enterprise product
requests.
• Manage assignment of human resources to other
factory resources.
7.2.14 Responsibilities of Scheduling Component
7.2.14.1 The Scheduling component supports Factory
Operations, Material Movement, Production Machine
and other components by ordering, in time, jobs that
process material on equipment, move material, maintain
equipment, etc. The scheduler uses knowledge of
product demand, equipment and material state, process
flows, throughput bottlenecks, operational policy and
constraints, and other information to recommend jobs
that maximize effective utilization of factory resources
to satisfy product demand and planned objectives.
7.2.14.2 The CIM Framework specifies a dispatching
function to support Factory Operations. Dispatching
provides an answer to questions of the form, “What is
next for this material or resource?” The answer may be
based on any number of current or future constraints
and objectives, but the dispatcher does not typically
define a sequence of jobs projected into the future.
Scheduling functions in the Scheduling component
provide this future job sequencing function. Separate
scheduler and dispatcher utilities can also provide
resource-focused utilities, such as scheduling of process
resources within a production machine or scheduling of
material transport and storage resources and internal
material movements within the factory-wide material
transport and storage system.
7.2.14.3 Build-time Responsibilities of Scheduling
Component
• Configure scheduling and dispatching decision
mechanisms (for example, define scheduling goals
and constraints, rules for resolving conflicting
constraints, etc.).
7.2.14.4 Run-time Responsibilities of Scheduling
Component
• Monitor resource and material state and apply
scheduling and dispatching decision mechanisms to
SEMI E81-0600 © 1999, 2000 18
recommend the next task (dispatching) or a
sequence of tasks (scheduling) for factory
resources.
7.2.15 Responsibilities of Equipment Tracking and
Maintenance Component
7.2.15.1 The Equipment Tracking and Maintenance
component implements the Factory Resource
architecture (see Section 7.3.3) specialized for
production equipment (process and metrology tools and
material handling and storage equipment).
7.2.15.2 Note that the machine is the software
representation of physical equipment and should reflect
the state of that equipment. The functionality can be
implemented within the equipment, within the MES, or
in a separate system such as a cell controller, station
controller or equipment integration solution.
7.2.15.3 Build-time Responsibilities of Equipment
Tracking and Maintenance Component
• Configure production machines as a combination
of, or relationship to, process resources (such as
process chambers) and support resources
(loadports, add-on sensors, internal material buffers
and transport, etc.).
• Configure material handling resources as a
combination of transport machines and storage
machines and relations to support resources
(loadports, add-on sensors such as automatic
material identification, etc.).
• Configure equipment state models compatible with
SEMI E10 (at the machine level and/or at the
machine resource level).
• Configure (initial or nominal) production machine
capabilities.
• Configure the (initial) recipe namespaces that
production machines use and manage.
• Configure the (initial) material locations that
material transport equipment is able to reach and
the locations it is authorized to reach.
• Define equipment maintenance tasks and what
triggers them.
• Tasks: repair, calibration, qualification, etc.
• Triggers: failures, usage, elapsed time, need by
another related maintenance task, etc.
• Use document management and version control for
maintenance specification change control.
7.2.15.4 Run-time Responsibilities of Equipment
Tracking and Maintenance Component
• Track the equipment state and update the machine
state, accordingly.
• Keep the machine state model current.
• Report and record equipment and machine state
changes, alarms and events in machine history.
• Support query of machine state and history.
• Update machine and machine resource process
capabilities to reflect machine state and
capability and machine assigned capabilities.
• Drive the equipment to a requested state.
• Collect and report machine performance according
to SEMI E58 and other utilization and
effectiveness measures.
• Monitor equipment maintenance triggers.
• Execute and monitor triggered maintenance jobs.
• Update equipment state and resource capability
(before and after maintenance).
• Recommend maintenance jobs for scheduling.
• Execute maintenance jobs and report job
progress.
• Record maintenance triggered and maintenance
job results in equipment maintenance history.
• Manage the relationships between production
machines that have specific process capabilities
and process flows that need specific process
capabilities.
• Manage the material locations that material
transport equipment is capable of reaching and is
authorized to reach.
7.2.16 Responsibilities of Production Machine
Component
7.2.16.1 The Production Machine component supports
execution of production machine jobs on process
equipment and interaction with material handling
equipment for material input/output at the machine. The
functionality can be implemented within the equipment
and/or in a separate system such as a cell controller,
station controller or equipment integration solution.
7.2.16.2 Build-time Responsibilities of Production
Machine Component
7.2.16.2.1 Note that the configuration of the machine
is the responsibility of the Equipment Tracking and
Maintenance component.
SEMI E81-0600 © 1999, 200019
7.2.16.3 Run-time Responsibilities of Production
Machine Component
• Initiate and execute production machine jobs to
perform specific process operations (and recipes)
on specific material (process groups). Here are the
steps to initiating and executing production
machine jobs:
1) Validate the production machine job:
compatibility and availability of the material in the
process group, process capability of the equipment,
proper machine state, valid and available recipe or
process specification, necessary operator skills, etc.
2) Equipment setup: recipe download and select,
launch advanced process control (APC)
calculation, make operator and APC-recommended
adjustments, configure equipment and sensors
according to data collection plans.
3) Initiate processing.
4) Monitor process operation:
• Collect process run data from equipment,
add-on sensors and operator entry according
to data collection plans.
• per machine and per process resource.
• Store in process run histories.
• Event management: capture, interpret,
record and respond to equipment events,
fault detection events and other process
anomalies.
• Monitor equipment operation and state
(from the equipment tracking and
maintenance component) as another source
of information on process operation.
• Generate MES-level (machine) events and
alarms.
• Track material within machine and record
with process run histories and product
histories.
5) Complete processing.
• Execute post-processing tasks for the
process operation.
• Generate job completed events and invoke
“inform job completed” method on job
requestor.
• Sequence steps between machines and machine
resources (for that sequence logic that is not
covered by embedded equipment control).
• Implement recipe control and recipe agent
functionality as defined in SEMI E42 - Recipe
Management Standard. Integrate with factory-level
recipe namespace functionality in the CIM
Framework Recipe Management component.
• Job accountability: account for and report material
yield loss in material management component and
equipment productivity loss in equipment tracking
component.
• Interact with Material Transport and Storage
component and loadport for material hand-off
handshake protocols.
• Manage and monitor equipment when idle.
7.2.17 Responsibilities of Recipe Management
Component
7.2.17.1 The Recipe Management component provides
a capability for applying machine recipes across the
factory. Recipes for multiple machines of the same
process capability using the same recipe syntax are
managed by specializing the recipes based on specific
machine settings. The Production Machine component
is responsible for merging the recipe with machine-
specific data and run-time data (such as Advanced
Process Control component recommendations for recipe
settings) into an executable recipe and for downloading
it to the equipment or selecting and modifying it in the
equipment. The Recipe Management component also
works with Recipe Executors and Recipe Agents
(terminology from SEMI E42) implemented in the
Production Machine component, in the equipment, or
elsewhere.
7.2.17.2 Build-time Responsibilities of Recipe
Management Component
• Build process recipes.
• Generic.
• Specific to a machine type (same process
capability and recipe syntax).
• Including identification of variable parameters
in recipe.
• Use document management and version control
for change management and effectivity.
• Define, configure and initialize recipe namespaces.
NOTE 12: Including this responsibility under “build
time” does not imply that all recipes are built at MES
system build time. Recipes may be built after the MES
system is running.