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SEMI S7-96 © SEMI 199 4, 1996 3 10.4.2 System Description — Type of eq uipment evaluated and its functio n. 10.4.3 Anal ysis and Test Met hods — S p ecif ic te sts used to determin e the compliance with the criteria. T h…

SEMI S7-96 © SEMI 1994, 1996 2

evaluation should include accordance with the codes,

guidelines, and the local regulations of potential users.

To assist in this, the supplier should provide the

evaluator with a list of jurisdictions in which the

supplier intends to market the equipment.

6 Requirements for Third Pa rty Evaluators

6.1 The evaluator should have at least five years’

experience in the semiconductor equipment or

fabrication or similar industry and:

a. be established in accordance with ANSI Z34.1,

Third Party Certification Program; or

b. consist of individual(s) who are registered or

certified professional(s) in the discipline(s) in

which the evaluations were performed; or

c. consist of individual(s) with baccalaureate or

higher degrees in related technical discipline(s)

(engineering or science).

NOTE: In the United States, the United Kingdom, and several

other countries, the “baccalaureate” or “bachelor of science”

degree is awarded upon completion of a technical course of

study, typically of four years, at a college or university. It is

the degree prerequisite for professional registration in most

U.S. states and for study towards a master’s degree or

doctorate.

7 Contracting with an Evalu ator

7.1 The supplier initiates the evaluation by providing a

“scope of work” to the evaluator. This scope should

define the services to be provided, including the

standards and guidelines that will be used to evaluate

the equipment and the responsibilities of each party.

7.2 The evaluator is responsible only to the supplier.

7.3 Changes made to the equipment to bring it into

accord with codes, regulations, and guidelines are the

responsibility of the supplier.

8 Documentation Provided to the Evaluator

by the Supplier

8.1 Any previous evaluations of equipment related to

the included documents, with all appropriate

documentation.

8.2 Material Safety Data Sheets (MSDS’s) for all

chemicals used in the maintenance of the equipment

and for those used in baseline and known, user-intended

processes.

8.3 When information is known for user intended or

baseline process(s), the evaluator should be provided

the estimated consumption of raw materials and the

amount(s) of by-products generated as described in

Section 20.2.1 of SEMI S2.

8.4 Copies of the equipment’s installation,

maintenance, and operation manuals.

8.5 Copies of any hazard analysis or safety reviews of

the subject equipment.

8.6 A list of all assemblies and sub-assemblies.

8.7 Design drawings and schematics.

9 Evaluation Methods

9.1 The evaluator should ensure the review of the

supplier's documents (listed above) and the outlining of

deficiencies with corrective and/or improvement

recommendations.

9.2 The ESH testing and evaluation may proceed

concurrently with the document review by agreement of

the parties.

9.3 After the supplier has addressed all deficiencies

noted in the third party report, the supplier should

review the actions taken with the evaluator. If

appropriate, the evaluator may re-evaluate some or all

of the areas addressed.

10 Contents of Reports

10.1 An interim report should be provided to the

supplier after evaluator has performed the agreed

services. It should include an overview of the services

performed, the standards, guidelines, and codes against

which the equipment was evaluated, and the evaluator’s

findings. Items found in conformance with the

documents should be documented as well as those

found to be deficient.

10.2 The evaluator’s final report should be provided

after the supplier and the evaluator have agreed that the

changes made have brought the equipment into

conformance with the applicable documents. This

report should be attached to the supplier's bid to a

potential user.

10.3 If the evaluator and the supplier differ in their

interpretation of requirements of the applicable

documents, the creator of the document in question

should be consulted for an interpretation. If the

difference remains unresolved, the evaluator should

include this and any other unresolved issues in its final

report.

10.4 The final report should be signed by the evaluator

and should contain at least the following sections:

10.4.1 Management Summary — A brief description

of the evaluation, recommendations, and results. A

statement that the equipment does or does not conform

(with noted exceptions) with the ESH specifications,

guidelines, and codes that were used for the evaluation.

SEMI S7-96 © SEMI 1994, 19963

10.4.2 System Description — Type of equipment

evaluated and its function.

10.4.3 Analysis and Test Methods — Specific tests

used to determine the compliance with the criteria. This

should include a point-by-point evaluation of

requirements listed in the pertinent specifications.

10.4.4 Environmental, Safety, and Health Assessment

— The detailed results of the evaluation, including the

point-by-point results, using SEMI S2 as an outline. If a

section is not applicable, so state.

10.4.5 Body — The body of the report should describe

the type of ESH evaluations, methods, and test

equipment used, and results achieved. The methods

used may include: fault testing, fault tree analysis, task

analysis, industrial hygiene analysis, chemical mass

balance, and ergonomics assessment.

10.4.6 Recommendations — Listings of

recommendations made by the evaluator and statements

that the recommendations were implemented, rejected,

or otherwise addressed.

10.4.7 Detailed Analysis and Test Worksheets —

Copies of the laboratory and field test data.

10.4.8 Additional Information/Remarks — Any

information that may clarify tests performed,

exceptions not specifically defined in the documents,

precautions for certain applications of the equipment, or

conditions of operation.

11 Provision of Reports to Po tential Users

11.1 Whenever possible, copies of the evaluator’s

final report should be made available to potential users.

If the supplier considers some information in the

evaluator’s report proprietary, the supplier should write

an overview report that includes all environmental,

safety, and health information with all proprietary

information deleted.

11.2 Deficiencies that have been remedied and now

meet the appropriate standards do not need to be listed

in the report available to users.

11.3 This modified report should be signed by the

evaluator.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the safety

guideline set forth herein for any particular application.

The determination of the suitability of this safety

guideline is solely the responsibility of the user. Users

are cautioned to refer to manufacturer’s instructions,

product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein.

This safety guideline is subject to change without

notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S8-0705

SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF

SEMICONDUCTOR MANUFACTURING EQUIPMENT

These safety guidelines were technically approved by the global EH&S Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available

at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; previously

published in 2003.

NOTICE: The official values in this guideline are expressed in The International System of Units (SI). Values that:

— are expressed in inch-pound (also known as “US Customary” or “English”) units,

— are enclosed in parentheses, and

— directly follow values expressed in SI units

are not official, are provided for reference only, and might not be exact conversions of the SI values.

1 Purpose

1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing

equipment.

1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the

manufacturing environment. The following general principles are integral to the ergonomics design and evaluation

of equipment:

1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among

hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and

hazards. Appropriate distribution of tasks will also optimize performance.

1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’

expectations.

1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size,

strength, and range of motion characteristics of the user population. Such design will also facilitate task

performance.

2 Scope

2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing

equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some

guidelines also address general design goals for effective human-machine performance. The guidelines apply to the

design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited

extent, equipment installation (see ¶7.3).

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the

responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment

meets regulatory requirements.

3.2 Human factors data compiled in references and specifications are influenced by the population from which they

were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using

few subjects or are context-specific. Ergonomics experts should be consulted where data development or

interpretation is required.