semi合集-English.pdf - 第2502页

SEMI E87.1-0702 © SEMI 2000, 2002 6 Variable Name Class Format PortStateInfo i SV L,2 1. <PortAssociationState i > 2. <PortTransferState i > PortStateInfoList SV L ,n 1. <PortStateInfo 1 > . n. <Port…

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SEMI E87.1-0702 © SEMI 2000, 2002 5
Variable Name Class Format
CarrierLocationMatrix SV L,n
1. L,2
1. <LocationID
1
>
2. <CarrierID
1
>
.
.
n. L,2
1. <LocationID
n
>
2. <CarrierID
n
>
LoadPortReservationState DVVAL 51 (U1)
Enumerated as:
0 = NOT RESERVEED
1 = RESERVED
LoadPortReservationState
I
SV 51 (U1)
Enumerated as:
0 = NOT RESERVED
1 = RESERVED
LoadPortReservationStateList SV L,n
1.<LoadPortReservationState
1
>
.
.
n.<LoadPortReservationState
N
>
LocationID DVVAL A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
LocationID
i
SV A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionCapacity DVVAL 51
PartitionCapacity
i
SV 51
PartitionID DVVAL A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionID
i
SV A[1-80] (Conforms to restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
PartitionType DVVAL A[1-64]
PartitionType
i
SV A[1-64]
PortAssociationState DVVAL 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationState
i
SV 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationStateList SV L,n
1. <PortAssociationState
1
>
.
.
n. <PortAssociationState
n
>
PortID DVVAL 51
PortID
i
SV 51
PortStateInfo DVVAL L,2
1. <PortAssociationState>
2. <PortTransferState>
SEMI E87.1-0702 © SEMI 2000, 2002 6
Variable Name Class Format
PortStateInfo
i
SV L,2
1. <PortAssociationState
i
>
2. <PortTransferState
i
>
PortStateInfoList SV L,n
1. <PortStateInfo
1
>
.
n. <PortStateInfo
n
>
PortTransferState DVVAL 51 (U1)
Enumerated as:
0 = OUT OF SERVICE
1 = TRANSFER BLOCKED
2 = READY TO LOAD
3 = READY TO UNLOAD
PortTransferState
i
SV 51 (U1)
Enumerated as:
0 = OUT OF SERVICE
1 = TRANSFER BLOCKED
2 = READY TO LOAD
3 = READY TO UNLOAD
PortTransferStateList SV L,n
1. <PortTransferState
1
>
.
.
n. <PortTransferState
n
>
Reason DVVAL 51 (U1)
Enumerated as:
0 = VERIFICATION NEEDED
1 = VERIFICATION BY EQUIPMENT UNSUCCESSFUL
2 = READ FAIL
3 = IMPROPER SUBSTRATE POSITION
SlotMapStatus DVVAL 51 (U1)
Enumerated as:
0 = SLOT MAP NOT READ
1 = [SLOT] WAITING FOR HOST
2 = SLOT MAP VERIFICATION OK
3 = SLOT MAP VERIFICATION FAILED
SlotMap
DVVAL
L, n n= capacity (1...25)
1. Enumerated
2. Enumerated
3.
.
.
n
Each as
51 (U1)
Enumerated as:
0 = UNDEFINED
1 = EMPTY
2 = NOT EMPTY
3 = CORRECTLY OCCUPIED
4 = DOUBLE SLOTTED
5 = CROSS SLOTTED
UnAllocatedPartitionCapacity DVVAL 51
UnAllocatedPartitionCapacity
i
SV 51
SEMI E87.1-0702 © SEMI 2000, 2002 7
7 SECS-II Attribute Definitions
7.1 Carrier Object SECS-II Attributes Definitions
7.1.1 The following are the SECS-II structure definitions for the E87 Carrier Object.
Table 5 Carrier Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 1. “Carrier”
“ObjID” 1. <CARRIERID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
“Capacity” 51 (U1) Capacity
Capacity Range: 1..25
Capacity Examples: 1, 13, 25
“CarrierAccessingStatus” 51 (U1) CarrierAccessingStatus
CarrierAccessingStatus enumerated per Variable CarrierAccessingStatus
“CarrierIDStatus” 51 (U1) CarrierIDStatus
CarrierIDStatus enumerated per Variable CarrierIDStatus
“ContentMap” L, n n=Capacity
1. L,2
1. 20 (A) LotID
2. 20 (A) SubstID
…
n. L,2
1. 20 (A) LotID
2. 20 (A) SubstID
SubstID conform to the restrictions of ObjID as specified in SEMI E39.1, Section 6.
“LocationID” 20 (A) LocationID
LocationID conforms to the restrictions of ObjID as specified in SEMI E39.1, Section 6.
“SlotMap” L, n n=Capacity
1. 51 (U1) enumerated
…
n. 51 (U1) enumerated
enumerated per variable SlotMap
“SlotMapStatus” 51 (U1) SlotMapStatus
SlotMapStatus enumerated per Variable SlotMapStatus.
“SubstrateCount” 51 (U1) SubstrateCount
SubstrateCount Range: 0..25
SubstrateCount Examples: 1, 3, 21, 25
“Usage” 20 (A) Usage
Usage is equipment defined, examples: “TEST”, “DUMMY”, “PRODUCT”
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