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SEMI E126-0305 © SEMI 2003, 2005 7 9.5.5 Listing of Sup ported Linked Process Program Parameters — This fiel d is a listing of supported PPPs as indicated in t he correspon ding “EQIP a n d Linke d PPP Support Co mplianc…
SEMI E126-0305 © SEMI 2003, 2005 6
9.2 Declaration of Equipment Type(s) — An equipment complying with this standard shall provide an indication
(i.e., declaration) of its equipment type or types. This declaration shall be determined through matching of
equipment description to the equipment type definitions in Table 1.
9.3 Specification of Linked Process Program Parameters — An equipment complying with this standard must
specify a non-null set of settable equipment process program parameters that can be altered to effect change of each
EQIP associated with this equipment type or types. These process program parameters are termed “linked process
program parameters”. It is not required that the actual mathematical relationship between each EQIP and associated
process program parameters be specified.
9.4 Method for Effecting Control of EQIPs — An equipment complying with this standard must support and specify
at least one SEMI standard method for individual actuation of each linked process program parameters. An EQIP is
not supported unless a SEMI standard method for effecting control of the EQIP through individual actuation of
linked process program parameters is supported and defined. The following are SEMI standard methods for
individual actuation of process program parameters that could be utilized.
9.4.1 SEMI E30 (Generic Model for Communications and Control of Manufacturing Equipment (GEM))
Application Note A.8: Process Parameter Modification for Process and Equipment Control — This specification
defines a method for effecting control of EQIPs utilizing the GEM “Equipment Constants” capability. These
Equipment Constants could be set up as Linked PPPs thereby enabling control of EQIPs. Refer to these sections of
SEMI E30 for a precise definition of the GEM capability to be used and an example of its use for process control.
9.4.2 SEMI E40 (Standard for Process Management) — This standard specifies a method for setting recipe
variables, which can be assigned a value at Process Job creation time, and can be adjusted at a later time. These
recipe variables could be set up as Linked PPPs, thereby enabling control of EQIPs. Refer to ¶¶7.5.4 and 10.4 of
SEMI E40 for additional information.
9.5 Compliance Sheets — Compliance to this standard by equipment shall be indicated with compliance sheets that
shall be provided with the equipment. Templates for the compliance sheets are provided in Tables 4 and 5.
9.5.1 EQIP and Linked PPP Support Compliance Sheet — A template for this compliance sheet is provided in
Table 4. This compliance sheet has the following fields:
9.5.1.1 Unique Identifier Corresponding to Equipment — This field provides for a unique identification of the
equipment type for that manufacturer. The contents of this field are manufacturer specific, but could include the
company name and equipment model number.
9.5.1.2 Equipment Type — This field will indicate the specific type or types, from Table 1, to which this equipment
belongs.
9.5.1.3 Listing of EQIPs — This field will indicate the EQIPs defined for each equipment type specified for this
equipment, copied from the list in Table 2 associated with each equipment type. Modifiers for this field will
indicate, for each EQIP, whether the EQIP is required and whether it is supported for this equipment model. Note
that if an EQIP is specified as required for that equipment type in Table 2, then this EQIP must be specified as
supported. If the EQIP is specified as optional for that equipment type then the field modifier shall indicate whether
that EQIP is supported.
9.5.1.4 Listing of Linked Process Program Parameters — This field will indicate, for each supported EQIP, a non-
null list of linked process program parameters.
9.5.1.5 Additional Information — This optional field will provide additional information that could include forms
of models relating EQIPs to linked process program parameters, value limits on actuation of these parameters,
preferred method(s) and timing for actuation of these parameters, and behavior of equipment in response to
actuation of these parameters. The contents of this field are manufacturer specific.
9.5.2 EQIP and Linked PPP Data Format Compliance Sheet — A template for this compliance sheet is provided in
Table 5. This compliance sheet has the following fields:
9.5.3 Listing of Supported EQIPs — This field is a listing of supported EQIPs. This is a subset of the listed EQIPs
in the corresponding “EQIP and Linked PPP Support Compliance Sheet” (see ¶9.5.1.3).
9.5.4 EQIP Format Descriptors — These fields collectively provide the description of the format of the supported
EQIPs. The fields shall be copied from the list for each supported EQIP specified in Table 3.
SEMI E126-0305 © SEMI 2003, 2005 7
9.5.5 Listing of Supported Linked Process Program Parameters — This field is a listing of supported PPPs as
indicated in the corresponding “EQIP and Linked PPP Support Compliance Sheet” (see ¶9.5.1.3).
9.5.6 Linked PPP Format Descriptors — These fields collectively provide the description of the format of the
supported EQIPs. Note that required descriptor fields are Name, Data Type, and Data Units. Additional descriptor
fields can be provided as desired.
Table 4 EQIP and Linked PPP Support Compliance Sheet Template
Company
Company Name
Unique Identifier
Key for Identifying Classification of Equipment Within Company (e.g., Model Number(s))
Equipment Type(s)
Types from Figure 2; minimum of one type must be specified
EQIP Required Supported Linked PPPs Comments
From Table 2, linked to
Equipment Type
From Table
2
Y/N Could include
recommended method for
measuring and/or
calculating EQIP
parameter
…
Supported Methods for
Individual Actuation of
Linked PPPs
Additional Information
Additional Information, See ¶9.5.1.5
#1
Text in italics provides further description of a field; it is not part of the template.
Table 5 EQIP and Linked PPP Data Format Compliance Sheet Template
Company
Company Name
Unique Identifier
Key for Identifying Classification of Equipment Within Company (e.g., Model Number(s))
Equipment Type (s)
From list in Table 1
EQIP DATA FORMATS
Format Descriptors
EQIP From
Table 3
From Table 3 From Table 3 . . . Comments
Supported EQIPs (from
EQIP and Linked PPP
Support Compliance
Sheet)
Could
include
additional
descriptors
…
LINKED PPP DATA FORMATS
Format Descriptors
Linked PPP Name Data Type Data Units … Comments
Supported Linked PPPs
(from EQIP and Linked
PPP Support
Compliance Sheet)
Could
include
additional
descriptors
SEMI E126-0305 © SEMI 2003, 2005 8
…
#1
Text in italics provides further description of a field; it is not part of the template. Format descriptors for EQIPs represent union of required
descriptors for supported EQIPs. Format descriptor fields for an EQIP do not have to be filled out if the entity claiming compliance and
submitting the compliance sheets does not provide a measurement of the EQIP (e.g., the EQIP for the process tool is measured by another
metrology tool). A value of “N.A.” indicating “not applicable” is inserted wherever the descriptor is not specified and is not supported for an
EQIP.
10 Template for Adding Equipment Types and EQIPs to this Standard
10.1 The standard is structured so that it can be updated. Specifically, EQIPs for equipment types may be added to
an existing set, as the community reaches consensus on these additions. Further, EQIPs may be defined for a new
equipment type not previously addressed in this standard. Thus typical additions to this standard will impact Table 2
and Table 3, and possibly Table 1 of this standard. These typical additions should not impact any other portions of
this standard.
10.2 Template — The template for typical additions to this standard is shown in Table 6. Note that this template
addresses only the technical content of the ballot addition to the standard. For development and submission of the
complete ballot, refer to SEMI documentation.
Table 6 Template for Typical Additions to this Standard
# Ballot Component Conditions for including in Ballot
1 Add the following rows to Table 1 Include only if adding equipment types. Add one row for each type added.
2 Add the following EQIP information
to the EQIP column of Table 2
Include only if adding EQIPs to existing equipment types. Add for each new
EQIP defined. Add to each equipment type that will use this EQIP. Indicate
requirement (Y/N). Note that one of ballot components 2 and 3 must be in
included in the ballot.
3 Add the following rows to Table 2 Include only if adding equipment types. Define the EQIPs for these new types.
Note that one of ballot components 2 and 3 must be in included in the ballot.
4 Add the following rows to Table 3 This component must be included in the ballot. Add a row for each new EQIP
defined.
#1
Column 1 is an index column utilized only for reference.
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