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SEMI E54.##-0705 © SEMI 2005 16 9.3.3.3. 4 Sensor AI-SLS Object  Additional attributes are mapped as follo wing table. Table 25 Sensor AI-SLS Object A ttribute Identifiers Attribute ID SDM A-LINK Attribute Name SlsA1 19…

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9.3.3.3.1 DM Object
Additional attributes and services are mapped as following tables.
Table 20 DM Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A33 33 Gain
A34 34 Filter Bandwidth
A35 35 Tool State
A36 36 Laser Status
A37 37 Flow Path
A38 38 Volume
A39 39 Volume Units
A40 40 Leak Status
A41 41 Time Stamp
Table 21 DM Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 33 Laser On
S2 34 Laser Off
9.3.3.3.2 SAC Object
Additional attributes and services are mapped as following tables.
Table 22 SAC Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
SacA65 33 Number of Bins
SacA66 34 Count Mode
SacA67 35 Duration
Table 23 SAC Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S33 33 Clear Counts
9.3.3.3.3 Sensor AI-LCS Object
Additional attributes are mapped as following table.
Table 24 Sensor AI-LCS Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
LcsA1 192 Reading Valid
LcsA2 193 Full Scale
LcsA3 194 Alarm Setting Time
LcsA4 195 Warning Setting Time
SEMI E54.##-0705 © SEMI 2005 16
9.3.3.3.4 Sensor AI-SLS Object
Additional attributes are mapped as following table.
Table 25 Sensor AI-SLS Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
SlsA1 192 Reading Valid
SlsA2 193 Full Scale
SlsA3 194 Alarm Setting Time
SlsA4 195 Warning Setting Time
9.3.3.3.5 Sensor AI-MNS Object
Additional attributes are mapped as following table.
Table 26 Sensor AI-MNS Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
MnsA1 192 Reading Valid
MnsA2 193 Full Scale
MnsA3 194 Alarm Setting Time
MnsA4 195 Warning Setting Time
9.3.3.3.6 Sensor AI-Counter Object
Additional attributes are mapped as following table.
Table 27 Sensor AI-Counter Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
CounterA1 192 Reading Valid
CounterA2 193 Full Scale
CounterA3 194 Alarm Setting Time
CounterA4 195 Warning Setting Time
CounterA5 196 Upper Size
CounterA6 197 Lower Size
9.4 Endpoint Detector
9.4.1 EPD Device
Reference SEMI E54.11 for a complete specification of the SDM for Endpoint Devices.
Accordingly, the following mapping rules apply to the identification tags for the Objects, Attributes and Services of
this model.
9.4.2 Objects
Consistent with SEMI E54.11 and ¶7.4 above, the DM and SAC objects are identified as Object 1
and Object 2, respectively.
9.4.2.1 Table 28 shows the mapping of the SDM Object Instances specified in SEMI E54.11 (Instance numbers are
listed under heading Inst. in the table) and the A-LINK Object ID (listed under ID in the table).
Table 28 EPD Object Identifiers
SDM Object Name SDM Object ID ID Instance
Device Manager (DM) EPD1 1 1
Sensor Actuator Controller (SAC) EPD2 2 1
Sensor-BI-TH-EP EPD3 36 0 or n
*
Assembly-EPD#1 EPD4 32 1
Assembly-EPD#2 EPD5 33 0 or 1
Assembly-EPD#3 EPD6 34 0 or 1
Assembly-EPD#4 EPD7 35 0 or 1
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#1
Minimum number of the n is one and possible maximum number is 1024.
9.4.2.2 Additional objects may be defined by the manufacturer in the Device Profile for a given device.
9.4.3 Attributes and Services
9.4.3.1 Attributes
The mapping of Attribute tags and Identifiers is defined in ¶7.5.3.2 for the CDM. Basically the
same definitions are applied for attributes in the Endpoint Detector SDM.
9.4.3.2 Services
The mapping of Service tags and Identifiers is defined in ¶7.6.2.2 for the CDM. Basically the
same definitions are applied for attributes in the Endpoint Detector SDM.
9.4.3.3 EPD Specific Attributes and Services
Some objects appear in EPD SDM use additional attributes and/or
additional services.
9.4.3.3.1 SAC Object
Additional attributes and services are mapped as following tables.
Table 29 SAC Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
SacA65 33 Number of Endpoint Objects
Table 30 SAC Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S33 33 Reset Endpoint
S34 34 Download Recipe
S35 35 Upload Recipe
S36 36 Calibrate
9.4.3.3.2 Sensor-BI-TH-EP Object
Additional attributes and services are mapped as following tables.
Table 31 Sensor-BI-TH-EP Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
EpA1 192 Minimum Time
EpA2 193 Maximum Time
EpA3 194 Target Time
EpA4 195 Elapsed Time
EpA5 196 Time Stamp
EpA6 197 Recipe Identifier
EpA7 198 Step Identifier
Table 32 Sensor-BI-TH-EP Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 16 Endpoint On
S2 17 Endpoint Off
S3 18 Endpoint Start
S4 19 Endpoint Suspend
S5 20 Endpoint Resume