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SEMI E87-0705 © SEMI 1999, 2005 19 # Previous State Trigger New State Actions Comment 20 IN ACCESS The equipment finishes accessing the car rier abnormally. CARRIER STOPPED None. Data required to be available for this ev…

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SEMI E87-0705 © SEMI 1999, 2005 18
# Previous State Trigger New State Actions Comment
11 ID NOT
READ
BypassReadID varia
b
le is set to
TRUE, and a carrier is received
when the id reader is not in
service or not installed.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
CarrierID
CarrierIDStatus
12 (no state) A carrier is instantiated. SLOT MAP
NOT READ
None. No event is required for this
transition.
13 SLOT MAP
NOT READ
Slot Map is read and verified
successfully by the equipment.
SLOT MAP
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
CarrierAccessingStatus
SlotMapStatus
14 SLOT MAP
NOT READ
N
ormal host based verification:
Slot Map is read successfully
and the equipment is waiting
for host verification.
Equipment based verification
fail: Slot Map is read
successfully but equipment
based verification has failed.
Slot map read fail: Slot Map
cannot be read.
Abnormal substrate position
within the carrier: The Slot
Map read has indicated an
abnormal substrate position.
WAITING FOR
HOST
Save new slot
map in the
SlotMap attribute.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
SlotMap (if valid)
Reason
SlotMapStatus
15 WAITING
FOR HOST
A ProceedWithCarrier service
is received.
SLOT MAP
VERIFICATION
OK
Proceed with the
Carrier as
instructed.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
SlotMapStatus
16 WAITING
FOR HOST
A CancelCarrier service is
received.
SLOT MAP
VERIFICATION
FAIL
Prepare the
Carrier for
Unload.
Data required to be available for
this event report:
PortID (if valid)
CarrierID
LocationID
CarrierAccessingStatus
SlotMapStatus
17 (no state) A carrier object is instantiated. NOT
ACCESSED
None. No event is required for this
transition
18 NOT
ACCESSED
The equipment starts accessing
the carrier.
IN ACCESS None. Data required to be available for
this event report:
CarrierID
CarrierAccessingStatus
19 IN ACCESS The equipment finishes
accessing the carrier normally.
CARRIER
COMPLETE
None. Data required to be available for
this event report:
CarrierID
CarrierAccessingStatus
SEMI E87-0705 © SEMI 1999, 2005 19
# Previous State Trigger New State Actions Comment
20 IN ACCESS The equipment finishes
accessing the carrier
abnormally.
CARRIER
STOPPED
None. Data required to be available for
this event report:
CarrierID
CarrierAccessingStatus
21 CARRIER Normal: The carrier is
unloaded from the equipment.
Abnormal by service:
CancelBind or
CancelCarrierNotification
service is received prior to the
carrier load.
Abnormal by equipment: An
equipment based verification
fails and the equipment
performs a self-initiated
CancelBind service.
(no state) The equipment
destroys the
instance of this
carrier object.
Data required to be available for
this event report:
CarrierID
#1
Only one collection event report is required when entering the Carrier State Model (instantiating a carrier object). This event report shall
include the entry state of the all the substates of Carrier State Model, (including CARRIER ID STATUS substate and the CARRIER SLOT MAP
STATUS substate).
10.7.5 Slot Map Read Details
10.7.5.1 The Slot Map shall be read on all production equipment prior to removal of substrates from the carrier.
10.7.6 Carrier Read Failure — A carrier read failure occurs when the carrier ID reader is present, in service, and
reports that it is unable to read the ID of a carrier. This represents a transient random failure rather than a steady
condition.
10.7.7 Bypass Read ID — A carrier ID reader may be unavailable: either out of service, not installed, or otherwise
malfunctioning and unable to execute a read operation. This represents a steady condition that often is known in
advance. The equipment shall provide a user-configurable variable BypassReadID used to bypass verification of the
carrier ID when the carrier ID reader is unavailable or not installed and the loadport is ASSOCIATED.
BypassReadID is not used to bypass the carrier ID reader. In this case, the carrier object is instantiated in the ID
NOT READ state, and when the carrier is received, the state model transitions to either WAITING FOR HOST or
ID VERIFICATION OK, depending upon whether BypassReadID is FALSE (the default value) or TRUE. When
TRUE, then the Carrier ID received in the Bind is used automatically. Otherwise, the carrier transitions to
WAITING FOR HOST and waits for the host to send a ProceedWithCarrier. The ID used will be the ID included
with the ProceedWithCarrier.
11 Access Mode
11.1 Access Mode State Model
11.1.1 The Access Mode State Model defines the host view of equipment access mode, as well as the host
interactions with the equipment necessary to switch the access mode. Each Load Port has its own Access Mode State
Model. There are two access mode states: MANUAL and AUTO. These are defined in ¶11.3.3.
11.1.2 The access mode for a load port may be switched at anytime by the host or the operator, except when the
Load Port Reservation State Model for that Load Port is in the RESERVED state or during carrier transfer. Carrier
transfer boundaries, for determining when access mode may be changed, are designated by Table 8, Carrier Transfer
Boundaries.
SEMI E87-0705 © SEMI 1999, 2005 20
Table 8 Carrier Transfer Boundaries
Transfer Type Transfer Method Starting Boundary Ending Boundary
MANUAL This starting boundary is specified by the
user. Known examples of the starting
boundary include but are not limited to; the
presence sensor detecting a carrier, a load
port door opening, input to the equipment by
the operator through a switch at the load port
or the equipment console.
This ending boundary is specified by the
user. Known examples of the ending
boundary include but are not limited to; a
preset configurable time following presence
and placement sensor detecting a carrier, a
load port door closing, or input to the
equipment by the operator through a switch
at the load port or the equipment console or
a service message.
LOAD
AUTO The PIO signal “READY” is active for load.
See SEMI E84.
PIO signals a transfer complete signal
“COMPT”. See SEMI E84.
MANUAL This starting boundary is specified by the
user. Examples of the starting boundary
include but are not limited to presence and
placement sensor no longer detecting a
carrier, a load port door opening, or input to
the equipment by the operator through a
switch at the load port or the equipment
console or a service message.
This ending boundary is specified by the
user. Examples of the ending boundary
include but are not limited to a preset
configurable time following presence and
placement sensor no longer detecting a
carrier, a load port door closing, or input to
the equipment by the operator through a
switch at the load port or the equipment
console, or a service message.
UNLOAD
AUTO The PIO signal “READY” is active for
unload. See SEMI E84.
PIO signals a transfer complete signal
“COMPT”. See SEMI E84.
11.2 Manual Carrier Transfer Confirmation Trigger
11.2.1 For a manual transfer completion confirmation, the production equipment supplier must implement a
software or hardware mechanism for an operator to inform the equipment that the carrier transfer is complete.
11.3 Access Mode Initial Value
11.3.1 Also, when equipment re-initialization occurs, the access mode(s) must be remembered, and used as the
initial value when initializing. Since the access mode is remembered through re-initializations, the initial value that
is used the very first time the software is ever loaded is not important. The equipment supplier is free to set this
default value.
11.3.2 Access Mode State Model Diagram
ACCESS MODE
MANUAL
AUTO
1
2 3
H
Figure 4
Access Mode State Model Diagram