semi合集-English.pdf - 第2744页
SEMI E98-1102 © SEMI 2000, 2002 9 • stand-alone (with no co nnection to the factory systems), • fu lly on-line and operated locally (by the operator), • fu lly on-line and operated remotely (by the factory systems), and …
SEMI E98-1102 © SEMI 2000, 2002 8
7.3 Computer Manufacturing Integration Business
Goals
7.3.1 The intent of this section is to provide a context
for, and insight into, those requirements of industries
such as semiconductor and flat panel display (FPD)
manufacturing businesses that affect the object-based
equipment model.
7.3.2 The primary purpose of computer integrated
manufacturing (CIM) technologies is to improve
factory productivity.
4
Other inter-related secondary
CIM business goals are listed below.
• Maximize product yields (line/mechanical yield).
• Maximize device yields (electrical/functional
yield).
• Maximize total factory product substrate
throughput.
• Increase individual equipment product substrate
throughput.
• Reduce product variability.
• Reduce process variability.
• Optimize ability to center processes in a “sweet
spot”.
• Reduce the use of non-product substrates.
• Reduced time to utilization for equipment (i.e., the
time to install, qualify, characterize and ramp
production).
• Increase the usability, accuracy, and reliability of
data used for metrics.
• These business goals can be met by addressing
certain concrete objectives, which are listed below.
7.4 OBEM Functional Objectives
7.4.1 OBEM will standardize specific functional
capabilities to be implemented on semiconductor/FPD
and other manufacturing equipment, providing a
hierarchical view of equipment for effective factory
integration.
7.4.2 The OBEM functional objectives are as follows:
• Manage material into and through the equipment.
• Manage the association of the process instructions
with the material.
4 For a more detailed discussion and list, see the Guidance and
Guideline documents at
http://www.sematech.org/public/docubase/abstract/tech-30.htm
• Report data associated with the equipment, the
process, and the material.
• Facilitate equipment performance monitoring.
7.4.3 These OBEM functional objectives, individually
and collectively, can be shown to directly address the
overall business goals:
7.4.4 The Object Based Model objective directly
affects the ability to implement most of the other
objectives, especially in the case of highly modular
equipment.
7.4.5 Equipment performance monitoring has the effect
of improving product variability, device yield and can
reduce the need for non-product test substrates. It can
also provide a means of targeting a specific process
window to improve device characteristics such as
speed.
7.4.6 Management of the association of process
instructions with the material can reduce scrap due to
misprocessing, thus improving product yield. The
material management objectives impact on the
throughput of individual equipment and the total
factory throughput.
7.5 Relevant Factory Environment — Equipment must
support a variety of different factory environments.
This is necessary because factory business practices and
factory configurations vary not only from company to
company but also from one facility within a company to
another. Items will be added to this section as their
relevance becomes apparent.
7.5.1 Material Handling Systems — Material may be
loaded and unloaded manually by a fab technician or it
may be loaded and unloaded using semi-automated and
automated transport systems. Types of systems
include:
• Automated Guided Vehicles (AGV),
• Personal Guided Vehicles (PGV),
• Overhead Transport Systems (OTS), including
Overhead Hoist Transport (OHT), and
• Fixed Arm Robots.
7.5.2 Containers — Containers may be open (e.g.,
cassettes) or closed (pods, including reticle pods). Pods
may be bottom-opening (SMIF), with a removable
cassette, or front-opening (FIMS), which may have
either a removable cassette or an integrated (non-
removable) cassette (FOUP).
7.5.3 Factory Interface — The equipment must be able
to support different levels of automation, including:
SEMI E98-1102 © SEMI 2000, 2002 9
• stand-alone (with no connection to the factory
systems),
• fully on-line and operated locally (by the operator),
• fully on-line and operated remotely (by the factory
systems), and
• fully on-line and able to support and coordinate
interactions from multiple factory users and
systems at the same time.
8 Equipment Overview
8.1 The Object-Based Equipment Model defines the
objects that are generic components of equipment as
well as the object representing the equipment itself.
OBEM does not dictate the makeup of equipment.
Through support of OBEM, the equipment is able to
describe its own makeup to the factory. However,
OBEM does require certain visibility and access to
those parts of the equipment that control and/or monitor
the environment or the location of the product.
8.2 Two view areas are of importance: the functional
view of the equipment and the internal composition
view of the equipment.
8.3 Functional View of Equipment — From a
functional view, equipment is internally composed of
logical subsystems with different areas of responsibility
that are at different levels within a control hierarchy, as
illustrated in Figure 1. There are three general levels.
Equipment Control is at the highest level, both respon-
sible for, and representing, the equipment as an inte-
grated whole. The middle level provides management
of specific areas, while the lowest level of functionality
has specific time-critical responsibilities and handles all
direct interaction with the equipment’s I/O (sensors and
actuators). The third level is below the factory level of
visibility and is discussed here for completeness.
NOTE 3: This is not intended to represent the design of an
actual implementation.
8.3.1 The functional areas are discussed below in
alphabetical order.
8.3.2 Access Management — Access Management is
responsible for communications with the factory,
including factory computers, local and remote oper-
ators, third party systems, and alternate users (desktop
access by process engineers, maintenance personnel,
supplier remote diagnostics, etc.) Communications
with the local operator include input devices (such as
keyboards, wands, buttons, and optical character read-
ers) and display devices (console, light pole, and LCD
panel) as well as interpretation of operator requests.
8.3.3 Communications Link — Communications Link
is responsible for low-level communications, including
establishing a connection with a communications
partner, sending messages, and receiving messages.
8.3.4 Date/Time Management — Date/Time Manage-
ment is responsible for maintaining an accurate date
and time-of-day, and for providing current date/time
information to the rest of the system. This may include
maintenance of regular time-based scheduling.
8.3.5 Environment Control — Environment Control is
responsible for maintaining the internal environment
according to the equipment’s specifications. While
Process Control is specific to a process and recipe,
other monitoring activities may be required regardless
of whether the equipment is processing or idle. Such
activities include monitoring for particles, humidity, or
temperature.
8.3.6 Equipment Control — Equipment Control is the
supervisory level with overall high-level control.
Equipment Control represents the entire equipment as
an integrated whole to the factory and represents the
decision-making authority within the equipment.
8.3.7 Event Management — Events continually occur
in all equipment states. A variety of these events are of
interest to the factory, including those events that
generate a change of state in any standardized object.
The factory requires notification when selected events
occur, and in many cases, requires reports of the values
of specified information at the time that the event
occurred. Event Management is responsible for
tracking those events and the reports associated with
those events.
8.3.8 Exception Management — Exception Manage-
ment is responsible for determining the proper response
to an action or operation that the equipment was unable
to perform which raised an exception condition. It
prompts notification to all affected components,
including internal components and currently connected
users. In some cases, the proper action may have to be
resolved by the user. Exception Management is a high
level activity that is in addition to underlying hardware
and software interlocks.
SEMI E98-1102 © SEMI 2000, 2002 10
Equipment
Control
Facilities
Interface
Material
I/O
Management
Recipe
Management
Operations
Management
Recipe
Execution
Exception
Management
Material
Management
Process
Execution
Performance
Management
Access
Management
Event
Management
Object
Management
Date/Time
Management
Environment
Control
Communications
Link
Job
Management
Information
Management
Material
Movement
Control
Figure 1
Functional View of Equipment
8.3.9 Facilities Interface — The Facilities Interface is
responsible for managing the physical interfaces
(hookups) to the factory. This includes bulk fill,
continuous chemical services, factory vacuum, factory
exhaust, and the electrical environment of the
equipment.
8.3.10 Information Management — Information
Management is responsible for the information and data
stored by the equipment, including information required
for the user as well as various internal event and data
logs.
8.3.11 Job Management — Job Management is
responsible for all jobs, including process jobs, job
queues, and job execution.
8.3.12 Material I/O Management — The Material
Input/Output (I/O) Management is responsible for
loading and unloading material to and from the factory.
This includes the AMHS interface (parallel I/O), pod
interface, carrier management, and carrier-related
services such as reading, writing, and slot mapping
(identifying unoccupied, correctly occupied, and
incorrectly occupied slots in a carrier).
8.3.13 Material Management — Material Management
is responsible for tracking all material, including
carriers, product, and consumables, within or used by
the equipment. This includes providing historical
information required for product history.
8.3.14 Material Movement Control — Material
Movement Control consists of low-level control of