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SEMI C3.47-11 01 © SEMI 1993 , 2001 5 NOTICE: T hese st andards do n ot purport to address safety issu e s, if any, associated with their use. It is t he responsibility of the user o f these standards to establish appro …

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SEMI C3.47-1101 © SEMI 1993, 2001 4
Figure 1
Column Configuration for the Analysis of CO, CO
2
, and Hydrocarbons
Figure 2
Iron Analysis Sampling Apparatus
SEMI C3.47-1101 © SEMI 1993, 20015
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
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product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
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Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
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SEMI C3.35-1101 © SEMI 1988, 20011
SEMI C3.35-1101
SPECIFICATION FOR HYDROGEN CHLORIDE (HCl), 99.997%
QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on August 27, 2001. Initially available at www.semi.org September 2001; to be published
November 2001. Originally published in 1988; previously published in 1995.
1 Description
1.1 Hydrogen chloride is a colorless, pungent,
corrosive gas having a suffocating odor. Hydrogen
chloride is heavier than air and fumes strongly in moist
air. It is very soluble in water and alcohol, and also
soluble in ether. While in the cylinder under pressure,
hydrogen chloride is in the form of a gas over liquid. As
long as liquid is present in the cylinder, the pressure
will remain fairly constant. When the liquid phase is
exhausted, the cylinder pressure will drop rather
rapidly.
2 Specifications
QUALITY: 99.997% (See Notes 1, 2, and 3.)
Impurities
Maximum Acceptable
Level (ppm)*
Carbon dioxide (CO
2
)10
Hydrogen (H
2
)5
Nitrogen (N
2
)10
Oxygen (O
2
) + Argon (Ar) 1
Methane and Acetylene 1
Water (H
2
O) (v/v) 1
TOTAL LISTED IMPURITIES
(excluding metals)
28
Maximum Acceptable
Level (ppm)*
Iron (Fe) 1 wt. vapor phase
* An analysis of significant figures has not been considered. The
number of significant figures will be based on analytical accuracy and
the precision of the procedure provided.
NOTE 1: Due to the reactive nature of the material and the
impurities, this product should be used within a period which
may be specified by the supplier.
NOTE 2: It is recommended that the user discontinue the use
of a cylinder prior to complete consumption of the liquid
phase. The content of cylinders should be determined by
weight, not pressure.
NOTE 3: This specification applies to the gas phase of the
cylinder as received.
3 Physical Constants (for information only)
Metric Units US Units
Molecular weight 36.465 36.465
Boiling point at 1 atm –85.°C –121.°F
Density of gas at 21.1°C
(70°F) and 1 atm
1.522 kg/m
3
0.095 lb/ft
3
Specific gravity of gas at
0°C (32°F) and 1 atm
1.268 1.268
4 Analytical Procedures
4.1 Carbon Dioxide — This procedure is for the
determination of carbon dioxide in hydrogen chloride
using a gas chromatograph with a thermal conductivity
detector. A backflush is used to keep the main
component from reaching the detector.
4.1.1 Detection Limit — 2 ppm.
4.1.2 Instrument Parameters
4.1.2.1 Column: Porapak Q, 2.4 m (8 ft) by 6.4 mm
(1/4 in) OD ss or equivalent.
4.1.2.2 Carrier Flow: 40 mL/min helium.
4.1.2.3 Temperatures:
Detector 50°C
Column Oven 40°C
4.1.2.4 Sample Volume: 10 mL.
4.1.3 Calibration Standard — 100 ppm carbon dioxide
in helium.
4.1.4 Operating Procedure
4.1.4.1 To determine the backflush time, inject the
calibration standard, using a gas sampling valve.
Record the retention time for carbon dioxide. Choose
the backflush time so that the complete carbon dioxide
peak is eluted.
4.1.4.2 Inject the calibration standard into the column
using a gas sampling valve. Record the retention times
and peak areas. Backflush at the time determined in
Section 4.1.4.1.