semi合集-English.pdf - 第4401页
SEMI F97-0305 © SEMI 2005 11 9.4.5.3 The locked sub state of R un and Stan d-by may be used in o rder to force the FPU to maintain the c urrent Run or Stand-by state un til the lock is disabled. Th e reasons causing the …
SEMI F97-0305 © SEMI 2005 10
with respect to that particular FPU. On the FPU this control mode may be used to enable or disable remote control
of the FMCS.
Local: FPU operates in local mode, i.e. it can be controlled locally.
Remote: FPU operates in remote mode, i.e. it can be remotely controlled by the FMCS.
Control-Mode
Local Remote
2
3
C
1
Figure 6
State Transition Diagram Control-Mode
Table 3 State Transition Table Control-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. Local or Remote FPU disables remote
control from FMCS.
Dependent on type of FPU.
2 Local Trigger to switch to
Remote.
Remote FPU enables remote
control from FMCS.
Trigger may be caused by:
manual operator action
or automatic trigger by a
programmed logic.
3 Remote Trigger to switch to
Local.
Local FPU disables remote
control from FMCS.
Trigger may be caused by:
manual operator action
or automatic trigger by a
programmed logic.
9.4.5 Run-Mode
9.4.5.1 Run-Mode specifies the different running states of the FPU. It assumes three main values: Down, in Stand-
by or Run. The behavior of the FPU with respect to the states of Run-Mode is out of scope. It is dependent on the
type of FPU. The Annex to this Standard (see Related Information 1) provides some examples of the use of Run-
Mode. The Run-Mode provides general information of the FPU, whether it is Down, in Stand-by or in Run:
Down (the FPU is in a fault situation or it may be switched into Down by a pre scheduled function; this is
specified by an optional flag):
o flag set for scheduled down
o flag set for unscheduled down
Stand-by (the FPU is ready to be switched into Run).
Run (the FPU is running).
9.4.5.2 The FPU should assume optionally sub states when in Run or Stand-by. These sub states are:
Run: sub state Locked (the FPU is locked to hold the Run state) or Not_Locked and
Stand-by: sub state Locked (the FPU is locked to hold the Stand-by state) or Not_Locked.
SEMI F97-0305 © SEMI 2005 11
9.4.5.3 The locked sub state of Run and Stand-by may be used in order to force the FPU to maintain the current Run
or Stand-by state until the lock is disabled. The reasons causing the lock are out of scope of this standard. In
addition to the trigger to unlock, only critical failures can cause the FPU to leave the locked sub state. These critical
failures are being defined on a case by case basis by the purchaser and supplier of the FPU and the system
integrator.
Run-Mode
C
1
Run
Not_locked
Locked
10
12
11
14
Down
Stand-by
Not_locked
Locked
4
6
5
8
3
2
13
9
7
Figure 7
State Transition Diagram Run-Mode
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Table 4 State Transition Table Run-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. Down
or
Stand by
or
Run
None. Dependent on type of FPU;
Normally when to Stand-by
then to Stand by and not
locked, but an automatic
function may force FPU to
Stand-by and locked;
Normally when to Run then to
Run and not locked, but an
automatic function may force
FPU to Run and locked.
2 Down Trigger to activate the
principal availability of the
FPU (e.g. operator action or
logical function).
Stand-by FPU activates its stand-
by functions including
watchdog-toggle.
Normally to Stand-by and not
locked, but an automatic
function may force FPU to
Stand-by and locked.
3 Stand-by
and
Not_Locked
Failure occurred. Down FPU deactivates its
stand-by functions.
4 Stand by
and
Not_Locked
Trigger to lock Stand by
state.
Stand-by and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
5 Stand-by
and
Locked
Trigger to perform a
scheduled down or non
critical failure.
Stand-by and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
6 Stand-by
and
Locked
Trigger to unlock. Stand by and
Not_Locked
FPU releases pending
triggers to change to
other states.
7 Stand-by
and
Locked
Critical failure occurred. Down FPU deactivates its stand
by functions.
8 Stand-by
and
Not_Locked
Trigger to activate Run (e.g.
operator action or logical
function).
Run
and
Not_Locked
FPU activates its running
functions.
9 Run
and
Not_Locked
Trigger to activate Stand-by
(e.g. operator action or
logical function).
Stand-by
and
Not_Locked
FPU deactivates its
running functions.
10 Run
and
Not_Locked
Trigger to lock Run. Run
and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
11 Run
and
Locked
Trigger to perform a
scheduled down or non
critical failure.
Run
and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
12 Run
and
Locked
Trigger to release locked
state of Run.
Run
and
Not_Locked
FPU releases pending
triggers to change to
other states.
13 Run
and
Locked
Critical failure occurred. Down FPU stops its running
functions.
14 Run
and
Not_Locked
Trigger to perform a
scheduled down or a critical
failure.
Down FPU deactivates its
running functions.