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SEMI S6-93 © SEMI 199 3 8 PROCESS EQUIPMENT EXHA UST REQUIREM ENT SUMMA RY (cont inued) Page 2 of 2 NOTE: Repeat th is sheet for each exhaust c on nection t o the machine. Manufacturer Equipm ent Name_________ __________…

SEMI S6-93 © SEMI 19937

APPENDIX 1

PROCESS EQUIPMENT EXHAUST REQUIREMENT SUMMARY

Page 1 of 2

Manufacturer

Equipment Name Model

Supplier Representative Date

Demand Status Normal Peak Other (Explain)

Doors, Hatches & Covers Closed % Open Removed

Chemical Location Chemical Contents Condition

1. ____________________ _____________________ ______Empty ______Full

2. ____________________ _____________________ ______Empty ______Full

3. ____________________ _____________________ ______Empty ______Full

4. ____________________ _____________________ ______Empty ______Full

5. ____________________ _____________________ ______Empty ______Full

6. ____________________ _____________________ ______Empty ______Full

Electrical Power ______On ______Off _______Disconnected

Equipment at Operating Temperature Yes ______No

Other Utilities On ______Off _______Disconnected

Process Material Positions ______Occupied ________Empty

Equipment Status at Time of Measurement

_______Up and at Idle _______Up and Ready to Start Cycle

_______Specific Point in the Process Cycle

(Explain)___________________________________________________________________________________

___________________________________________________________________________________________

_______Down for Installation/Modification _______Down for Cleaning

_______Down for Preventive Maintenance _______Down for Repair

SEMI S6-93 © SEMI 1993 8

PROCESS EQUIPMENT EXHAUST REQUIREMENT SUMMARY (continued)

Page 2 of 2

NOTE: Repeat this sheet for each exhaust connection to the machine.

Manufacturer

Equipment Name________________________________________________ Model

Demand Status __________________Normal ___________Peak ____________Other (Explain)__________

Duct Connection Identity

Connection Inside Diameter_____________________________________________centimeters (inches)

Connection Outside Diameter____________________________________________centimeters (inches)

*Priority Target Tolerance Stability

Flow Volume m/s (CFM) _______ ______ -0% +______% ±_______%

Flow Velocity m/s (FPM) _______ ______ -0% +______% ±_______%

Static Pressure _______ ______ -0% +______% ±_______%

pascals (inches of water)

Data Corrected to Sea Level ______Yes ______No

Data Corrected to Std Air Density ______Yes ______No

Exhaust Stream Temperature ______°C (°F) ______°C (°F) ______°C (°F)

Min Normal Max

Measurement Location

Altitude____________m (ft) ambient temperature____________°C (°F) Humidity

Chemical Make-up of Expected Effluent Stream

Element State % Concentration Volume Weight

___________ ________ ________________ ________ ______

___________ ________ ________________ ________

Exhaust Schematic Diagram Included _______Yes _______No

* Priority is the rank order importance (from one to four) of the indicated value in proper operation of the

equipment. The balance will adjust to priority one values at the expense of other values in this sheet.

SEMI S6-93 © SEMI 19939

APPENDIX 2

REFERENCED DOCUMENTS

A2-1 Industrial Ventilation

A Manual of Recommended Practice

Library of Congress Catalog Card Number: 62-12929

Published by: ACGIH (American Conference of

Government Industrial Hygienists)

6500 Glenway Ave., Building D-7

Cincinnati, OH 45211-4438

Telephone: 513-661-7881

A2-2 HVAC Systems Duct Design

1981 Second Edition

Published by: SMACNA (Sheet Metal and Air

Conditioning Contractors’ National Association, Inc.)

8224 Old Courthouse RoadTyson’s Corner

Vienna, VA 22183

Telephone: 703-790-9890

A2-3 HVAC Systems

Testing, Adjusting, and Balancing

Third Printing - June 1986

Published by: SMACNA (Sheet Metal and Air

Conditioning Contractors’ National Association, Inc.)

A2-4 Procedural Standards for Certified

Testing of Cleanrooms

First Edition — October 1988

Published by: NEBB (National Environmental

Balancing Bureau) 8224 Old Courthouse Road Tyson’s

Corner Vienna, VA 22180

A2-5 Threshold Limit Values for Chemical

Substances and Physical Agents and

Biological Exposure Indices

Published by: ACGIH

A2-6 AABC National Standards for Field

Measurement and Instrumentation — Total

System Balance

Volume Two, No. 12173

Published by: AABC (Associated Air Balance Council)

1518 K Street Northwest

Suite 503

Washington, D.C. 20005

Telephone: 202-737-0202

A2-7 ASHRAE 1981 Fundamentals Handbook

Chapter 33 Duct Design

Published by: ASHRAE (American Society of

Heating, Refrigerating, and Air Conditioning

Engineers, Inc.)

1791 Tullie Circle, N.E.Atlanta, GA 30329

Telephone: 404-636-8400

A2-8 SEMI S2, Safety Guidelines for

Semiconductor Manufacturing Equipment

Published by: SEMI (Semiconductor Equipment and

Materials International)

3081 Zanker Road

San Jose, CA 95134

Telephone: 408-428-9600

A2-9 SEMI F15, Test Method for Enclosures

Using Sulfur Hexafluoride Tracer Gas and Gas

Chromatography

Published by: SEMI