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SEMI E35-0305 © SEMI 1995, 2005 18 RELATED INFORMATION 2 EXAMPLE VALUES TABLE NOTICE : This relat ed information is not an offi cial part of SEM I E35 and is not i n tended t o modify or supersede the official standa rd.…

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SEMI E35-0305 © SEMI 1995, 2005 17
RELATED INFORMATION 1
COST OF OWNERSHIP
NOTICE: This related information is not an official part of SEMI E35 and was derived from North American
Metrics Committee. This related information was approved for publication by full letter ballot on December 10,
2004.
R1-1 COO Calculation Graphical Overview
R1-1.1 A discussion of COO is provided in this related information to supplement the presentation within the
guideline.
R1-1.2 The COO calculation is shown graphically in Figure R1-1. This figure is not a flowchart, but rather is
meant to illustrate the elements of the calculation.
R1-1.3 The left side of the diagram shows various cost factors, while the right side shows how they are incorporated
in the calculation. The upper section is the determination of the number of pieces of equipment required to process
the specified number of units. In the middle section, the fixed costs are converted to an annual basis and combined
with the recurring costs. In the last section, the total cost is then divided by the number of good unit equivalents.
Production Utilization
Recurring Cost Categories
Fixed Cost Categories
Annualized
Fixed Costs
Total
Annual
Cost
Recurring
Costs
+
=
Nonproduct
Units
COST FACTORS CALCULATION
Volume
Re
q
uiremen
t
#
Equipment
Required
#
Good
Units
Throughput per Equipment
Unit Volume Required
(e.g., Wafers, Devices)
Fixed
Costs
=
=
÷ Lifetime
Cost of Equipment Ownership
per Unit for # Equipment
Required
÷ Number of Units
× Yield
Figure R1-1
Cost of Equipment Ownership
SEMI E35-0305 © SEMI 1995, 2005 18
RELATED INFORMATION 2
EXAMPLE VALUES TABLE
NOTICE: This related information is not an official part of SEMI E35 and is not intended to modify or supersede
the official standard. It has been derived from multiple sources. Publication was authorized by vote of the SEMI
Metrics Committee. These values are provided only as examples. Actual values should be determined by
considering company experience, specific equipment characteristics, applications, process technology, product type,
regional differences and analysis objectives. Determination of the suitability of the material is solely the
responsibility of the user.
Example Values Description 150 mm Example
#1
200 mm Example
#2
300 mm Example
#3
1. Fab Values
Engineering Usage 0 0 0
Standby Time 0 0 0
Production Tests 127 14 14
MTTT 0.31 0.25 0.3
Whole Systems NA 1 1
2. Scheduled Production
Hours/Week/Shift 42 42 42
Shifts/Week 4 4 4
Hours/Day 24 24 24
Days/Year 350 365 365
Supplier Shifts/Week NA 4 4
3. Labor and Salary Rates
Engineering $100,000 $111,000 $111,000
Supervision $80,000 $111,000 $111,000
Operator/Hour $26 $25 $25
Maintenance/Hour $26 $30 $30
Productivity 80% 80% 80%
4. Space Rates in cost/m
2
/year (cost/ft
2
/year)
Fed. Std 209E Class 1 or ISO Class 3 $3875 ($360) $4306 ($400) $4306 ($400)
Fed. Std 209E Class 10 or ISO Class 4 $2583 ($240) $2691 ($250) $2691 ($250)
Fed. Std 209E Class 100 or ISO Class 5 $1076 ($100) $1076 ($100) $1076 ($100)
Other $538 ($50) $538 ($50) $538 ($50)
5. Wafer Costs
Test Wafer $5.50 $100 $500
Test Wafer Reuse Times
1
1 10 10
Incoming Wafer $250 $500 $1317
Completed Wafer $500 $1000 $2034
6. Depreciation Values
Life of Equipment Years 5 7 7
Depreciation Life Years NA 5 5
Salvage Value $0 $0 $0
Depreciation Method Straight Line Straight Line Straight Line
7. Other Values
Systems/Engineer 5 10 10
Systems/Supervisor 20 30 30
Systems/Operator 2 3 3
Defect Fault Probability 0.167 0.05 0.08
SEMI E35-0305 © SEMI 1995, 2005 19
Example Values Description 150 mm Example
#1
200 mm Example
#2
300 mm Example
#3
8. Installation Cost as Percent of Equipment Cost
Lithography NA NA 8%
Metrology NA NA 5%
Other NA NA 12%
#1
Derived from SEMATECH Cost of Ownership Rev. B December 1990.
#2
Approved, Metrics Committee, July 11, 1995.
#3
Derived from joint Selete and International 300mm Initiative (I300I) inputs, 1997.
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literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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