semi合集-English.pdf - 第2773页

SEMI E98-1102 © SEMI 2000, 2002 38 12.9 Cleanup — This service directs the equipment to return a ll substrat es that have bee n remove d from their carriers to their appropriate destinations . Table 22 de fines the Clean…

100%1 / 7923
SEMI E98-1102 © SEMI 2000, 2002 37
Parameter Definition Form
ObjSpec Object specifier of target object.
An empty string implies Equipment is the target.
Formatted text. See SEMI E39 for
restrictions.
ProcessCapability User-defined description Text
Property An attribute name and value. Structure of attribute name, attribute value
RequestAcknowledge Acknowledgement of request. Enumerated:
Request performed
Cannot perform now
Invalid request
Already in requested state
Will perform when able and report results
when complete
RequestStatus Result of request Structure consisting of
RequestAcknowledge and Status
Service New substate of SERVICE Enumerated: IN SERVICE, OUT OF
SERVICE
Status Reports any errors found. List of ErrorCode, ErrorText pairs
12.6 Abort — Table 19 defines the Abort service. The Abort request may be directed to the Equipment or to an
EquiipmentModule.
Table 19 Abort Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for EquipmentModule.
RequestStatus - M Result status
12.7 AddProcessCapability — Table 20 defines the service to add a ProcessCapability. This request may be
directed to the Equipment or to an EquipmentModule.
Table 20 AddProcessCapability Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M Object specifier for owner of capability
ProcessCapability M - User description of a process objective.
RequestStatus - M Result status
12.8 AddElement — Table 21 defines the service to add an AbstractEquipmentElement. This request may be
directed to the Equipment or to an EquipmentModule. Properties needed for the AbstractEquipmentElement must be
included in the list of properties.
Table 21 AddElement Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for new owner
(list of) Property M - Properties of new element
RequestStatus - M Result status
SEMI E98-1102 © SEMI 2000, 2002 38
12.9 Cleanup — This service directs the equipment to return all substrates that have been removed from their
carriers to their appropriate destinations. Table 22 defines the Cleanup service.
Table 22 Cleanup Service Definition
Parameter Req/Ind Rsp/Conf Description
RequestStatus - M Result status
12.10 GetDateTime — Table 23 defines the GetDateTime service.
Table 23 GetDateTime Service Definition
Parameter Req/Ind Rsp/Conf Description
DateTime - M Date and time.
RequestStatus - M Result status
12.11 ChangeService — Table 24 defines the ChangeService service. This service requests that the target object be
placed either in service or out of service. The user shall only be allowed to place an object back into service if it was
originally put out of service by a user.
Table 24 ChangeService Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
Service M - New substate for SERVICE.
RequestStatus - M Result status
12.12 Pause — Table 25 defines the Pause service.
Table 25 Pause Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
RequestStatus - M Result status
12.13 RemoveProcessCapability — Table 26 defines the service to remove a process capability from the
ProcessCapabilityList.
Table 26 RemoveProcessCapability Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
ProcessCapability M - Capability to be removed
RequestStatus - M Result status
12.14 RemoveElement — Table 27 defines the service to remove an element previously added by a user.
Table 27 RemoveElement Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for element to be removed
RequestStatus - M Result status
SEMI E98-1102 © SEMI 2000, 2002 39
12.15 Resume — Table 28 defines the service for starting an activity at a designated EquipmentModule or at the
Equipment.
Table 28 ResumeService Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
RequestStatus - M Result status
12.16 SelectProgram — Table 29 defines the service to select a program for an EquipmentIODevice.
Table 29 SelectProgram Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
DeviceProgramID M - Text
RequestStatus - M Result status
12.17 SetDateTime — Table 30 defines the service for setting the equipment’s date and time.
Table 30 SetDateTime Service Definition
Parameter Req/Ind Rsp/Conf Description
DateTime M - Date and time
RequestStatus - M Result status
12.18 Shutdown — Table 31 defines the service to shut down the equipment or one of its modules.
Table 31 Shutdown Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
RequestStatus - M Result status
12.19 Start — Table 32 defines the service for starting an activity at a designated EquipmentModule or at the
Equipment.
Table 32 Start Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for EquipmentModule or Equipment.
RequestStatus - M Result status
12.20 Startup — Table 33 defines the service to start up the equipment or one of its modules.
Table 33 Shutdown Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
RequestStatus - M Result status