semi合集-English.pdf - 第4937页

SEMI M9.7-0200 © SE MI 1995, 2000 3 (111)Ga Vector Normal to Wafe r Surfa ce (100) Vector Normal to (100) plane _ (101) _ (001) _ (011) (010) _ _ (111)Ga (110) _ (111) As Tolerance Figure 2 Notched GaAs Wa fer Illustrat …

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SEMI M9.7-0200 © SEMI 1995, 2000 2
_
(111)
As
_
(111)
As
_
(011)
_
(001)
(010)
(110)
(101)
(001)
(011)
_
(110)
_ _
(111)
Ga
(111)
Ga
_
(011)
_
(101)
(100)
_ _
(011)
KOH Etch Pit
_
(010)
Cross Section of Etch Figure
on Front Face of Wafer
Top View of LEC Crystal
Showing As and Ga Facet
A
s
Ga
Figure 1
Diagram Shows a GaAs Wafer with Notch
SEMI M9.7-0200 © SEMI 1995, 20003
(111)Ga
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) plane
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)Ga
(110)
_
(111)
As
Tolerance
Figure 2
Notched GaAs Wafer Illustrating Surface Orientation A
SEMI M9.7-0200 © SEMI 1995, 2000 4
(111)Ga
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) Plane
Tilt
Angle
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)Ga
(110)
_
(111)
As
_
(110)
(100)
Tilt Angle
wafe
r
(110)
Direction of tilt
toward (110) plane
Figure 3
Notched GaAs Wafer Illustrating Surface Orientation B, with Tilt