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SEMI S2-0703a E © SEMI 1991, 2004 102  the frequency and complexity of operating, servicing and maintenance tasks; and  safety critical parts. NOTE #: The term mishap was re placed with the results of h arm in the SEMI…

SEMI S2-0703a

DELAYED REVISIONS SECTION 2 (EFFECTIVE JULY 1, 2006)

SEMI S10 CHANGES TO SEMI S2

NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the

SEMI Environmental Health and Safety Committee, but is not immediately effective. The provisions of this

material are not an authoritative part of the document until their effective date. The main body of SEMI S2-

0703 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may

optionally be applied prior to the effective date, providing they do not conflict with portions of the

authoritative version other than those that are to be revised or replaced as part of the deferred revision, and

are labeled accordingly.

NOTICE: Unless otherwise noted, all material to be added shall be underlined

, and all material to be deleted shall

be struck through

D2-1 Revisions to Section 5 (Terminology) — OPTIONAL Before Effective Date

D2-1.1 Addition of the following at the beginning of Section 5.2 (Definitions):

NOTE #: Composite reports using portions of reports based upon earlier versions of SEMI S2 and SEMI S10 may require

understanding of the SEMI S2-0703 or SEMI S10-12-96 definitions for the terms hazard, likelihood, mishap, severity, and risk.

D2-1.1 Addition (in alphabetical order), deletion, and revision of the following in Section 5.2 (Definitions):

5.2.# harm — physical injury or damage to health of people, or damage to equipment, buildings or environment.

5.2.25 hazard — a condition that is a prerequisite to a mishap

condition that has the potential to cause harm.

5.2.38 likelihood — the expected frequency with which a mishap will occur. Usually expressed as a rate (e.g.,

events per year, per product, or per substrate processed). the expected frequency with which harm will occur.

Usually expressed as a rate (e.g., events per year, per product, or per substrate processed).

5.2.44 mishap

— an unplanned event or series of events that results in death, injury, occupational illness, damage to

or loss of equipment or property, or environmental damage.

5.2.60 risk — the expected losses from a mishap, expressed in terms of severity and likelihood.

the expected

magnitude of losses from a hazard, expressed in terms of severity and likelihood.

5.2.64 severity — the extent of the worst credible

loss from a mishap caused by a specific hazard. the extent of

potential credible harm.

D2-2 Revisions to Section 6.5 — OPTIONAL Before Effective Date

D2-3.1 Revision of the following in Section 6.5:

NOTE 7 The intent is to control single fault conditions that result in significant risks (i.e., Critical

Very High, High, or Medium

risks based on the example risk assessment matrix in SEMI S10).

NOTE #: The risk category of “Very High” corresponds identically to the risk category, used in previous SEMI documents (e.g.,

S10-1296, SEMI S2, and SEMI S14) of “Critical”. The term was changed to facilitate translation from English.

D2-3 Revisions to Section 6.8.1 — OPTIONAL Before Effective Date

D2-3.1 Revision of the existing Section 6.8.1 as shown below:

6.8.1 The hazard analysis should include consideration of:

 the application or process;

 the hazards associated with each task;

 anticipated failure modes;

 the probability of occurrence and severity of a mishap

harm;

 the level of expertise of exposed personnel and the frequency of exposure;

SEMI S2-0703a

 the frequency and complexity of operating, servicing and maintenance tasks; and

 safety critical parts.

NOTE #: The term mishap was replaced with the results of harm in the SEMI S10 1103 revision.

D2-4 Revisions to Section 11.6 — OPTIONAL Before Effective Date

D2-4.1 Revision of the following in Section 11.6:

NOTE 26: Where a safety interlock is provided to safeguard personnel from a

severe or catastrophic mishap harm as categorized

by SEMI S10, consideration of positive-opening type of switches is recommended.

NOTICE: Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to

modify or supersede the official safety guideline. These have been supplied by the committee to enhance the usage

of the safety guideline.

SEMI makes no warranties or representations as to the suitability of the guideline set forth herein for any particular

application. The determination of the suitability of the guideline is solely the responsibility of the user. Users are

cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature

respecting any materials mentioned herein. This guideline is subject to change without notice.

The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted

material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,

and the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S3-91 © SEMI 19911

SEMI S3-91

SAFETY GUIDELINES FOR HEATED CHEMICAL BATHS

NOTICE: These guidelines do not purport to address

all of the safety issues associated with their use. It is the

responsibility of the users of these guidelines to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

NOTE: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

1 Purpose/Scope

This safety guideline pertains to open top heated

chemical baths, or “wet stations”, used in the

manufacturing of semiconductors. The purpose of this

guideline is to provide general safety information for

the construction, operation, and maintenance of

chemical baths heated by electric immersion, externally

bonded or heat exchange type heating devices. This

guideline is not intended to provided detailed design

information for the individual components of the

heating systems, but rather to supply the safety criteria

for the design of these systems. (See Figure 1.)

2 Introduction

2.1 Failure to follow the manufacturer’s instructions as

to the application or installation of heating systems used

for chemical baths can result in accidents and fires in

which such systems may be implicated.

2.2 The human element plays a major role in how well

the hardware is used. The user of heated chemical bath

systems needs to understand the available technology to

minimize the risk involved.

2.3 The issue of bath operation and maintenance has

been included in this guideline to support the safe use

and maintenance of heated baths over their normal

service life.

3 Heated Bath Methodology

3.1 Electric Immersion Heaters — Electric immersion

bath heaters are resistive element heaters. The element

itself is typically protected by an outer sheathing which

acts as a corrosion and electrical barrier. The element is

mounted to the inside of the bath.

3.2 External Tank Heaters — External type heaters

are normally bonded by a mastic to the outside of a

chemical bath. The most common types are

manufactured from a thin metal foil material that results

in a very low profile configuration.

3.3 Heat Exchangers — The most common type of

heat exchanger employs a separate heating source that

may be remote from the station. This heating source can

be electrically powered to generate steam or some other

heat transfer fluid. The heat transfer fluid is then

delivered by chemically compatible plumbing to the

bath and recirculated to the heater.

4 Minimum Heated Bath Saf ety Requirements

To ensure the safe operation and maintenance of

heating systems, the following features are required.

• overcurrent protection

• power interrupt

• manual reset

• automatic temperature controller

• liquid level sensor

• overtemperature protection

• proper grounding and ground fault protection

• compatible construction materials

NOTE: Interlocks should operate as outlined in SEMI S2.

These features should be totally compatible with each other.

4.1 Overcurrent Protection — A fused disconnect

switch or circuit breaker sized for the amperage of the

heater.

4.2 Power Interrupt — In the event of an

overtemperature, low liquid level, or ground fault

condition, power to the heater(s) is interrupted upon

receiving the respective signal. The interrupt should be

separate from any relay incorporated into the automatic

temperature controller. The interrupt should be wired in

such a manner that any signal from the liquid level

sensor, overtemperature sensor, or ground fault

condition should shut off power to the heaters and place

the system in a “fail safe” condition.

4.3 Manual Reset — This reset should be incorporated

into the power interrupt device so that when the system

shuts off power to the heating element, a manual reset

is required to re-energize the system.

4.4 Automatic Temperature Controller — An

automatic temperature controller maintains the liquid at

a set temperature by turning the heating element on and

off. The controller is activated by signals from a sensor

that is located at the bath. To preserve the integrity of

this system, quarterly service/testing and calibration in