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SEMI E87-0705 © SEMI 1999, 2005 37 Table 29 CarrierRelease Ser vice Parameter Definitions Parameter Name Req/Ind Rsp/Conf Description PortID C — The ID for the location of the carr ier. Either PortID or CarrierID must be…

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SEMI E87-0705 © SEMI 1999, 2005 36
Table 26 CarrierIn Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The CarrierID for the carrier to internalize.
CMStatus — M Information concerning the result of the service.
16.4.11 CarrierNotification
16.4.11.1 The Carrier Notification service is used by the host to inform the equipment that a Carrier with the ID
specified will be arriving at the equipment. The load port is not specified; therefore no carrier to load port
association takes place. A carrier object with the ObjID equal to the carrierID specified in the service is instantiated.
“The CarrierNotification service will be rejected if the carrier specified has already been instantiated through the
Bind or CarrierNotification service, or a carrierID read.
Table 27 CarrierNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — The CarrierID of the carrier object to instantiate.
PropertiesList C The PropertiesList of the carrier to instantiate.
CMStatus — M Information concerning the result of the service.
16.4.12 CarrierOut
16.4.12.1 The CarrierOut service is sent to internal buffer production equipment, to request that the equipment
move the specified carrier to a load port, as soon as the carrier is completed. When the CarrierOut service is started,
the destination load port state becomes TRANSFER BLOCKED, and the load port’s association state becomes
ASSOCIATED.
16.4.12.2 CarrierOut Queuing
16.4.12.2.1 This service request can be queued by the production equipment. The production equipment is required
to support a queue of n size, where n is equal to the sum of the number of internal buffer locations and the number of
internal FIMS ports. The order of the queue is FIFO for each load port. If the load port is not specified in service
request, the equipment chooses which load port queue to place the CarrierOut service. The queued service does not
take effect until the current substrate handling action is complete (i.e., filling, emptying of the carrier) and the load
port is in the NOT ASSOCIATED state. When a CarrierOut service is queued and the production equipment load
port is currently in the TRANSFER BLOCKED state, the production equipment shall keep the load port in the
TRANSFER BLOCKED state. Then, after the port is cleared, the CarrierOut service shall begin.
Table 28 CarrierOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — CarrierID for the carrier to be moved out.
PortID C — If omitted, the production equipment shall select an appropriate port at the
time the carrier is ready to be moved.
CMStatus — M Information concerning the result of the service.
16.4.13 CarrierRelease
16.4.13.1 CarrierRelease request is used to tell the equipment that the carrier is ready to be moved away from the
read or write position. Equipment shall deny the request if PortID and CarrierID are mismatched.
SEMI E87-0705 © SEMI 1999, 2005 37
Table 29 CarrierRelease Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The ID for the location of the carrier. Either PortID or CarrierID must be
used. For internal buffer equipment when the service is used at an internal
location, only the carrierID is required.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
CMStatus — M Information concerning the result of the service.
16.4.14 CarrierReCreate
16.4.14.1 CarrierReCreate request is used to re-create the carrier object specified by the service. This will allow a
repeated introduction of the same carrier on the loadport. After the service is issued, the equipment shall treat the
carrier occupying the respective loadport identically to one that was physically removed and replaced, deleting the
original carrier and then re-instantiating it. If no PropertiesList is provided with the service, then the host
verification scenarios for re-instantiating the carrier object shall be followed. For example, the carrier ID would be
re-read (at which point Carrier State transition #3, (no state) to Waiting for Host occurs) and subsequently verified
by host, followed by slot map re-read and verification by host. Alternatively, if PropertiesList is provided with this
service, then the equipment shall follow the equipment based verification steps. For example, the carrier object is re-
instantiated with the CarrierID (and possibly content/slot map) information provided within the CarrierReCreate
Service. In this equipment based verification scenario, the equipment is responsible for verifying the contents of the
carrier against the received information. If the equipment supports other SEMI standards (i.e.- SEMI E40/E90/E94),
then from the perspective of those standards, when CarrierReCreate service is received, the scenario would resemble
that of a carrier being removed and a new carrier placed. The service shall be accepted only if the load port is in the
“Ready to Unload” state.
Table 30 CarrierReCreate Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — Carrier ID for the carrier object the service is to be performed upon
PropertiesList C — If sent by the host, then equipment based verification scenario. If not, then
host based verification scenario.
CMStatus — M Information concerning the result of the service
16.4.15 CarrierTagReadData
16.4.15.1 CarrierTagReadData is used to request a block of data from the carrier ID tag. Equipment shall deny the
request if LocationID and CarrierID are mismatched.
Table 31 CarrierTagReadData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the carrier. Either LocationID or CarrierID must
be used.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data — C Data from the carrier ID tag. May be NULL if no data exists for the given
section.
CMStatus — M Information concerning the result of the service.
16.4.16 CarrierTagWriteData
16.4.16.1 CarrierTagWriteData is used to request that a block of data be written to the carrier ID tag. Equipment
shall deny the request if LocationID and CarrierID are mismatched.
SEMI E87-0705 © SEMI 1999, 2005 38
Table 32 CarrierTagWriteData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the carrier. Either LocationID or CarrierID must
be used.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data M — Data from the carrier ID tag. May be NULL if no data exists for the given
section.
CMStatus — M Information concerning the result of the service.
16.4.17 ChangeAccess
16.4.17.1 The ChangeAccess message requests a change of access mode for the load ports specified in the PortList.
Table 33 ChangeAccess Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
AccessMode M — The new desired access mode.
PortList M — The list of ports to use the new access mode.
CMStatus — M Information concerning the result of the service.
16.4.18 ChangeServiceStatus
16.4.18.1 The ChangeServiceStatus service is used to request the production equipment change a load port service
state.
Table 34 ChangeServiceStatus Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ServiceStatus M — The new service state.
CMStatus — M Information concerning the result of the service.
16.4.19 ProceedWithCarrier
16.4.19.1 The ProceedWithCarrier service is sent by the host to indicate that the carrier operations may continue.
When using host based verification it is used by the host to indicate to the production equipment that the verification
of Carrier ID and/or the Carrier Slot Map is correct. For successful production equipment based verification the
production equipment shall not require this message before proceeding with the carrier. For failed production
equipment based verification the production equipment shall require either a CancelCarrier or ProceedWithCarrier
service.
16.4.19.2 Using Table 34, for the Host based CarrierID verification case, the ProceedWithCarrier service sent by
the host after the first carrier ID read is referred to as ProceedWithCarrier #1, the ProceedWithCarrier service sent
after slot map read is referred to as ProceedWithCarrier #2.
Table 35 ProceedWithCarrier Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which processing may proceed.
CarrierID M — The CarrierID for which processing may proceed.
PropertiesList C — A list of name value pairs providing attributes for the carrier object.
CMStatus — M Information concerning the result of the service.