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SEMI E109-0305 © SEMI 2001, 2005 24 12.4.4 Reticle Load P ort Reservation State Transi tion Table Table 10 Reticle Load Port Rese r vation State Tra nsition Table # Previous State Trigger Ne w State Actions Comments 1 (n…

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SEMI E109-0305 © SEMI 2001, 2005 23
3. The Bind, ReticleTransferJob, and CancelBind, CancelReticleTransferJob services also trigger changes in the
Reticle Load Port Reservation State Model. If the Reticle Load Port Reservation State Model is in the NOT
RESERVED state, the Bind or ReticleTransferJob service triggers a transition to the RESERVED state. If the
Reticle Load Port Reservation is in the RESERVED State, the CancelBind or CancelReticleTranserJob service
triggers a transition to NOT RESERVED.
12.1.2 For Lithography, reticle inspection, and bare reticle stocker equipment, the Reservation State Model, the
ReserveAtPort service, the CancelReserveAtPort service, and all other associated functionality is a user option and
not necessary for fundamental compliance.
12.1.3 For equipment implementing the reservation state model, the equipment shall provide a reticle
load port
reservation state model for each load port.
12.2 Reservation Visible Signal
12.2.1 When a port reservation has taken place, the equipment shall display a visible signal indicating that the
designated load port is in the Reserved State. Examples of visible signals for the associated load port are: Blinking
LEDs, flags, color indicators, or other methods that allow easy recognition that the load port is reserved; proximity
to or location on the load port is recommended. The visible signal shall remain present as long as the load port state
remains RESERVED. When the state changes to NOT RESERVED the visible indicator shall cease. This
capability is not required for fundamental compliance to RPMS.
12.3 Load Port
Reservation State Model Diagram
NOT
RESERVED
RESERVED
2
3
1
Reticle Load Port
Reservation
Figure 4
Reticle Load Port Reservation State Model Diagram
12.4 Reticle Load Port Reservation State Definitions
12.4.1 RETICLE LOAD PORT RESERVATION — The super state of the substates NOT RESERVED and
RESERVED.
12.4.2 NOT RESERVED — A substate of LOAD PORT RESERVATION, this state is active when there is no
reservation existing at the load port.
12.4.3 RESERVED — A substate of LOADPORT RESERVATION, this state is active when there is a reservation
for future activity at the load port. When in this state, the access mode for a load port may not be changed.
SEMI E109-0305 © SEMI 2001, 2005 24
12.4.4 Reticle Load Port Reservation State Transition Table
Table 10 Reticle Load Port Reservation State Transition Table
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
RESERVED
No event report is
required for this
transition.
2 NOT RESERVED Service: If reserved by
service, the host or operator
sends a ReserveAtPort,
ReticleTransferJob, or a Bind
service to the production
equipment.
PodOut: This happens when
the equipment physically
initiates a PodOut operation.
RESERVED If the user has configured
the equipment to use the
reservation visible signal
indicator, it is activated
for this load port.
Data required to be
available for this event
report:
PortID
PodID may be included
when a pod out,
ReticleTransferJob or a
bind service triggers this
transition.
3 RESERVED Service: If a reservation is
cancelled by service, the host
or operator sends a
CancelBind,
CancelReticleTransferJob, or
a CancelReservationAtPort.
Pod arrival:
A pod arrives at the reserved
port.
NOT
RESERVED
If the user has configured
the equipment to use the
reservation visible signal,
the indicator is
deactivated for this load
port.
Data required to be
available for this event
report:
PortID
12.5 Relation of Reservation to Association
12.5.1 The following figure indicates the relationship of Association to Reservation.
Reservation / Association
ASSOCIAT ED
ID Read
Unload or
carrier in
Complete
Load
Complete
ASSOCIATED
RESERVED
Bind
Carrier Presence
Load
w/o Bind
w/o Reserve
Load
w/ Bind
If fails, then PWC/CC
is received
RESERVED
Reserve
Load
w/ Reserve
ASSOCIAT ED
Visible Signal
Carrier Out
Complete
Unload
Complete
Carrier Out
St a rt
RESERVED
ASSOCIATED
Carrier Out
Figure 5
Relation of Reservation to Association
SEMI E109-0305 © SEMI 2001, 2005 25
13 Reticle Pod Load Port/Pod Association State Model
13.1 The purpose of the Reticle Pod Association State Model is to define the host view of pod to reticle load port
association of the production equipment, as well as the host interactions with the production equipment necessary to
associate a reticle pod to a reticle load port, and to perform equipment based pod verification. Each reticle load port
shall maintain an independent instance of the Pod Association State Model. Each instance of this state model must
not influence the state of the same state model for a different reticle load port.
13.1.1 This state model provides the ability to perform PodID verification with two different methods. If the PodID
is provided before the equipment reads the PodID, the PodID that becomes associated with the reticle load port can
be used later for equipment based pod verification. If the association happens by PodID read (not by a service
execution), then the production equipment shall report the PodID information in a data collection event.
13.2 Reticle Pod Load Port/Pod Association State Model Diagram
NOT
ASSOCIATED
ASSOCIATED
2
3
1
RETICLE POD LOAD PORT
/ POD
A
SSOCIATION
4
Figure 6
Reticle Pod Load Port/Pod Association State Model Diagram
13.2.1 Reticle Pod Load Port/Pod Association State Definitions
13.2.1.1 RETICLE POD LOAD PORT/POD ASSOCIATION — The parent state of the NOT ASSOCIATED and
ASSOCIATED sub-states.
13.2.1.2 NOT ASSOCIATED — A sub-state of RETICLE POD LOAD PORT/POD ASSOCIATION. There is no
pod association present for this load port.
13.2.1.3 ASSOCIATED — A sub-state of RETICLE POD LOAD PORT/POD ASSOCIATION. A PodID has been
associated with this reticle load port. The reticle pod load port is not available for a new pod association.
13.2.2 Reticle Pod Load Port/Pod Association State Transition Table
13.2.2.1 Table 11 defines the transitions of the Reticle Pod Load Port/Pod Association State Model.
Table 11 Reticle Pod Load Port/Pod Association State Transition Definitions
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
ASSOCIATED
No pod associations exist for
reset/re-initialized
equipment.
Data required to be available
for this event report:
PortID.