semi合集-English.pdf - 第2536页

SEMI E88-1104 E © SEMI 1999, 2004 33 STEP COMMENTS HOST SC COMMENTS 6. Event Report Acknowledge (ERA) S6,F12   S6,F11 Event Report Send (ERS) ZoneCapacityChange Event Report Acknowledge (ERA) S6,F12  7.  S6,F11 Event…

100%1 / 7923
SEMI E88-1104
E
© SEMI 1999, 2004 32
STEP COMMENTS HOST SC COMMENTS
12.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID = “123456”
· CarrierLoc
· CarrierZoneName
13. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CraneActive
15. Event Report Acknowledge (ERA)
S6,F12
16.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID
· CarrierID = “123456”
· CarrierLoc
· ResultCode = “0”
· CarrierZoneName
17. Event Report Acknowledge (ERA)
S6,F12
18.
S6,F11
Event Report Send (ERS)
CarrierStored
· CarrierID
· CarrierLoc = “112”
· CarrierZoneName
19. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
20.
S6,F11
Event Report Send (ERS)
CraneIdle
21. Event Report Acknowledge (ERA)
S6,F12
13.1.3 Carrier Transfer to an Automated Stocker Output Port
13.1.3.1 The carrier is transferred from a stocker location (storage location or input port) to an output port where it
is then automatically transferred (Carrier Handoff) to an automated vehicle such as an OHV or AGV.
STEP COMMENTS HOST SC COMMENTS
1. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID
· PRIORITY
· TRANSFERINFO
1. CARRIERID
2. SOURCE
3. DEST = “LP1”
S2,F49
In this scenario SOURCE is the
name of a CarrierLoc or
ZoneName and DEST is the name
of a loading port. Either
CARRIERID or SOURCE is
optional.
2.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
3.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID
· CarrierID
· CarrierLoc
· CarrierZoneName
· Dest = “LP1”
4. Event Report Acknowledge (ERA)
S6,F12
5.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID
· CarrierLoc
· CarrierZoneName
SEMI E88-1104
E
© SEMI 1999, 2004 33
STEP COMMENTS HOST SC COMMENTS
6. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
7.
S6,F11
Event Report Send (ERS)
CraneActive
8. Event Report Acknowledge (ERA)
S6,F12
9.
S6,F11
Event Report Send (ERS)
CraneIdle
10. Event Report Acknowledge (ERA)
S6,F12
11.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID
· CarrierID
· CarrierLoc
· ResultCode = “0”
· CarrierZoneName
12.
Event Report Acknowledge (ERA)
S6,F12
13.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID
· CarrierLoc = “LP1”
· CarrierZoneName
· PortType = “LP”
14. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
15. Carrier leaves the domain of
the stocker as it is acquired
by the transport vehicle.
16.
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = AUTOMATED
17. Event Report Acknowledge (ERA)
S6,F12
18.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
19. Event Report Acknowledge (ERA)
S6,F12
13.1.4 Carrier Transfer to a Stocker Output Port Requiring Intermediate Storage
13.1.4.1 The carrier is requested by the Host to be transferred from a stocker input port (with an ID reader) to a
manual output port but requires intermediate storage due to the destination output port being fully occupied with
carriers.
STEP COMMENTS HOST SC COMMENTS
1. Carrier 123456 is sitting at
the stocker crane accessible
input port position.
2. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID
· PRIORITY
· TRANSFERINFO
1. CARRIERID
2. SOURCE
3. DEST = “LP”
S2,F49
In this scenario SOURCE is the
name of an in
p
ut
p
ort
p
osition
and DEST is the name of a
loading port. Either
CARRIERID or SOURCE is
optional.
3.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
SEMI E88-1104
E
© SEMI 1999, 2004 34
STEP COMMENTS HOST SC COMMENTS
4.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID
· CarrierID
· CarrierLoc
· CarrierZoneName
· Dest = “LP”
5. Event Report Acknowledge (ERA)
S6,F12
6.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID
· CarrierLoc
· CarrierZoneName
7. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
8.
S6,F11
Event Report Send (ERS)
CraneActive
9. Event Report Acknowledge (ERA)
S6,F12
10.
S6,F11
Event Report Send (ERS)
CraneIdle
11. Event Report Acknowledge (ERA)
S6,F12
12.
S6,F11
Event Report Send (ERS)
CarrierStoredAlt
· CommandID
· CarrierID
· CarrierLoc = “132”
· Dest = “LP”
· CarrierZoneName
13. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CarrierResumed
· CommandID
· CarrierID
· CarrierLoc = “132”
· Dest = “LP”
· CarrierZoneName
15. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
16.
S6,F11
Event Report Send (ERS)
CraneActive
17. Event Report Acknowledge (ERA)
S6,F12
18.
S6,F11
Event Report Send (ERS)
CraneIdle
19. Event Report Acknowledge (ERA)
S6,F12
20.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID
· CarrierID
· CarrierLoc
· ResultCode = “0”
· CarrierZoneName
21.
Event Report Acknowledge (ERA)
S6,F12